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Synthesis of metastable epitaxial zinc‐blende‐structure AlN by solid‐state reaction

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TLDR
In this paper, a metastable zinc-blende-structure β-AlN was synthesized by the solid-state reaction between single-crystal Al(001) and TiN(001), grown on MgO(001).
Abstract
Epitaxial metastable zinc‐blende‐structure β‐AlN was synthesized by the solid‐state reaction between single‐crystal Al(001) and TiN(001) layers grown on MgO(001) by ultrahigh vacuum magnetron sputter deposition. At an annealing temperature Ta=600 °C, the interaction proceeded according to the following overall reaction: 4Al+TiN→Al3Ti+AlN, in which β‐AlN was formed pseudomorphically between cubic TiN and tetragonal Al3Ti layers. The lattice constant of β‐AlN was found to be 0.438 nm, which corresponds to a 3.3% lattice mismatch with the underlying TiN layer.

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Citations
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Journal ArticleDOI

Band parameters for nitrogen-containing semiconductors

TL;DR: In this paper, a comprehensive and up-to-date compilation of band parameters for all of the nitrogen-containing III-V semiconductors that have been investigated to date is presented.
Journal ArticleDOI

Large‐band‐gap SiC, III‐V nitride, and II‐VI ZnSe‐based semiconductor device technologies

TL;DR: In this article, the authors compare the performance of SiC, GaN, and ZnSe for high-temperature electronics and short-wavelength optical applications and conclude that SiC is the leading contender for high temperature and high power applications if ohmic contacts and interface state densities can be further improved.
Journal ArticleDOI

Thermal stability of nitride thin films

TL;DR: In this paper, a review of the thermal stability of state-of-the-art transition metal nitride thin films synthesized by physical vapour deposition techniques is presented, where the authors show that they are successfully applied as well.
Journal ArticleDOI

Heteroepitaxial wurtzite and zinc‐blende structure GaN grown by reactive‐ion molecular‐beam epitaxy: Growth kinetics, microstructure, and properties

TL;DR: In this paper, a combination of in situ reflection high-energy electron diffraction, double-crystal x-ray diffraction and cross-sectional transmission electron microscopy was used to determine the film/substrate epitaxial relationships.
Journal ArticleDOI

Consistent set of band parameters for the group-III nitrides AlN, GaN, and InN

TL;DR: In this paper, the authors derived consistent sets of band parameters such as band gaps, crystal field splittings, band-gap deformation potentials, effective masses, and Luttinger and EP parameters for AlN, GaN, and InN in the zinc-blende and wurtzite phases employing many-body perturbation theory in the G0W0 approximation.
References
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Book

Thermochemical properties of inorganic substances

Ihsan Barin, +1 more
TL;DR: In this paper, a volume of tables conveying the thermochemical parameters of more than 2000 substances, cover enthalpy, entropy, chemical potential and Planck's function, and commentaries on the chemical reactions of the relevant component and indications of stability/metastability.
Journal ArticleDOI

Thermal stability of indium nitride at elevated temperatures and nitrogen pressures

TL;DR: In this paper, the authors investigated the pressure-temperature relations of indium nitride at moderate temperatures and nitrogen pressures and found that the dissociation pressure rises steeply as a function of temperature.
Journal ArticleDOI

The optical absorption edge of single‐crystal AlN prepared by a close‐spaced vapor process

P. B. Perry, +1 more
TL;DR: In this paper, the optical absorption edge was measured at 300 K and for the first time at low temperature (5 K) and a value of 6.28 eV was found to be the best value of Eg(5 K).
Journal ArticleDOI

Stability of the Wurtzite Structure

Peter Lawaetz
- 15 May 1972 - 
TL;DR: In this article, a simple qualitative model is proposed to account for the variability in the ratio of the ratio from the ideal value of 1.633 to the true value of 0.1%.
Journal ArticleDOI

Low‐energy ion irradiation during film growth for reducing defect densities in epitaxial TiN(100) films deposited by reactive‐magnetron sputtering

TL;DR: In this paper, the defect structure in epitaxial TiN(100) films as a function of the growth temperature (Ts=550-850 C) and negative substrate bias (Vs=0-500 V) applied during reactive magnetron sputter deposition onto cleaved MgO substrates was studied.
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