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Carl V. Thompson
Researcher at Massachusetts Institute of Technology
Publications - 422
Citations - 22680
Carl V. Thompson is an academic researcher from Massachusetts Institute of Technology. The author has contributed to research in topics: Thin film & Grain growth. The author has an hindex of 77, co-authored 416 publications receiving 21156 citations. Previous affiliations of Carl V. Thompson include Max Planck Society & Harvard University.
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Laser-assisted focused-ion-beam-induced deposition of copper
TL;DR: In this paper, focused ion-beam-induced deposition of a low resistivity Cu film has been produced using local heating of the substrate with a semiconductor laser, where a spot of order 70 μm diameter is irradiated using suitable optics to couple the 1.3 W, 977 nm laser radiation to the sample.
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Kinetic Study of the Initial Lithiation of Amorphous Silicon Thin Film Anodes
Jinghui Miao,Carl V. Thompson +1 more
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Failure in Tungsten-Filled Via Structures
TL;DR: In this article, a self-limiting void volume is predicted, resulting in a selflimiting resistance increase which is a function of structure geometry and the void morphology, and modified procedures for extrapolating lifetimes are discussed.
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Effects of microvoids on the linewidth dependence of electromigration failure of dual-damascene copper interconnects
TL;DR: In this paper, the electromigration lifetime of dual-damascene Cu interconnects was found to decrease with increasing linewidth, and void nucleation was also found to preexist in these lines.
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Experimental characterization and modeling of the contact resistance of Cu–Cu bonded interconnects
TL;DR: In this article, the effects of surface roughness and applied loads on the specific electrical contact resistance of three-dimensional Cu-Cu bonded interconnects have been quantitatively investigated.