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Technical manual : 日本語版

https://cyberleninka.org/article/n/1380904.pdf

ASAP7: A 7-nm finFET predictive process design kit

It has been shown that a ferroelectric material integrated into the gate stack of a transistor can create an effective negative capacitance (NC) that allows the device to overcome “Boltzmann tyranny”. While this switching below the thermal limit has been observed with Si-based NC field-effect transistors (NC-FETs), the adaptation to 2D materials would enable a device that is scalable in operating voltage as well as size. In this work, we demonstrate sustained sub-60 mV/dec switching, with a minimum subthreshold swing (SS) of 6.07 mV/dec (average of 8.03 mV/dec over 4 orders of magnitude in drain current), by incorporating hafnium zirconium oxide (HfZrO2 or HZO) ferroelectric into the gate stack of a MoS2 2D-FET. By first fabricating and characterizing metal–ferroelectric–metal capacitors, the MoS2 is able to be transferred directly on top and characterized with both a standard and a negative capacitance gate stack. The 2D NC-FET exhibited marked enhancement in low-voltage switching behavior compared to th...

Sustained Sub-60 mV/decade switching via the negative capacitance effect in MoS2 transistors

An efficient way to reduce the power consumption of electronic devices is to lower the supply voltage, but this voltage is restricted by the thermionic limit of subthreshold swing (SS), 60 millivolts per decade, in field-effect transistors (FETs). We show that a graphene Dirac source (DS) with a much narrower electron density distribution around the Fermi level than that of conventional FETs can lower SS. A DS-FET with a carbon nanotube channel provided an average SS of 40 millivolts per decade over four decades of current at room temperature and high device current I60 of up to 40 microamperes per micrometer at 60 millivolts per decade. When compared with state-of-the-art silicon 14-nanometer node FETs, a similar on-state current Ion is realized but at a much lower supply voltage of 0.5 volts (versus 0.7 volts for silicon) and a much steeper SS below 35 millivolts per decade in the off-state.

https://science.sciencemag.org/content/sci/361/6400/387.full.pdf

Dirac-source field-effect transistors as energy-efficient, high-performance electronic switches

In this letter, we report the performance of high-κ /metal gate nanowire (NW) transistors without junctions fabricated with a channel thickness of 9 nm and sub-15-nm gate length and NW width. Near-ideal subthreshold slope (SS) and extremely low leakage currents are demonstrated for ultrascaled gate lengths with a high on-off ratio (Ion/Ioff) >; 106. For the first time, an SS lower than 70 mV/dec is achieved at LG = 13 nm for n-type and p-type transistors, highlighting excellent electrostatic integrity of trigate junctionless NW MOSFETs.

Scaling of Trigate Junctionless Nanowire MOSFET With Gate Length Down to 13 nm

We report on the measurement of a 101-stage ring oscillator (RO) consisting of state-of-the-art 14 nm FinFET devices with a ferroelectric gate layer that exhibits negative capacitance. We show that the gate stage delay as a function of applied voltage can be directly modeled from DC characteristics of the individual NC-nFET and NC-pFET devices that constitute the RO, thereby demonstrating that there is no slowdown of the NC effect at the highest speed tested - per-stage delay as small as 7.2 ps.

Response Speed of Negative Capacitance FinFETs

We propose a new scheme to consider the dielectric (DE) phases inside polycrystalline ferroelectric (FE) materials. The scheme is used to extract material parameters from experimental polarization-electric field (P-E) measurements from the literature. A Sentaurus TCAD structure is constructed with the extracted parameters, and the simulated P-E curve is in a good agreement with the experimental data. Furthermore, variation of the device performance in a negative capacitance field-effect transistor (NCFET) due to the spatial distribution of DE and FE phases is studied using Sentaurus TCAD. It is found that the resultant variations of on and off currents can be up to 14.44% and 30.23%, respectively, thus showing the impact of inhomogeneous crystalline phases of the FE material on device performance.

Variation Caused by Spatial Distribution of Dielectric and Ferroelectric Grains in a Negative Capacitance Field-Effect Transistor

BSIM-CMG 108.0.0: Multi-gate MOSFET compact model: technical manual

In this paper, we discuss the recent enhancements made in the BSIM6 bulk MOSFET model. BSIM6 is the latest compact model of bulk MOSFET from BSIM group which have body referenced charge based core. Junction capacitance model is improved over BSIM4 and is infinitely continuous around Vbs=Vbd=0V. Symmetry of the model is successfully validated by performing Gummel Symmetry Test (GST) in DC and symmetry test for capacitances in AC. Self heating model is also included in BSIM6 and test results are reported. Model capabilities are compared against an advanced 40nm CMOS technology and it is observed that simulated results are in excellent agreement with the measured data.

http://in4.iue.tuwien.ac.at/pdfs/sispad2013/5-1.pdf

Recent enhancements in BSIM6 bulk MOSFET model

Negative capacitance field-effect transistors (NCFETs) boost the electric field at the semiconductor-channel interface by virtue of the gate voltage amplification effect of a ferroelectric (fe) layer. NCFETs should be designed in such a way that this elevated field does not exceed the maximum electric field ( ${E}_{\max}$ ) determined by the reliability limit of the interfacial dielectric or NBTI/PBTI reliability. In this letter, a compact model-based methodology is presented to determine the NCFET design space considering several variables of the fe-layer and the baseline transistor, including the fe-layer thickness ( ${T}_{\mathrm {fe}}$ ), coercive field ( ${E}_{c}$ ), remnant polarization ( ${P}_{r}$ ), baseline transistor equivalent oxide thickness, supply voltage ( ${V}_{\mathrm {dd}}$ ), threshold voltage ( ${V}_{\mathrm {th}}$ ), and ${E}_{\max}$ . Using this methodology, an NC-FDSOI transistor is designed in TCAD, and the result shows that even without raising the maximum interface field as compared with the baseline transistor, NCFET achieves much better ${I}_ \mathrm{\scriptstyle ON}/{I}_ \mathrm{\scriptstyle OFF}$ ratio and sub-threshold swing while operating at lower ${V}_{\mathrm {dd}}$ .

Juan Pablo Duarte

Papers

Response Speed of Negative Capacitance FinFETs

Variation Caused by Spatial Distribution of Dielectric and Ferroelectric Grains in a Negative Capacitance Field-Effect Transistor

BSIM-CMG 108.0.0: Multi-gate MOSFET compact model: technical manual

Recent enhancements in BSIM6 bulk MOSFET model

NCFET Design Considering Maximum Interface Electric Field