K
Kestutis Grigoras
Researcher at VTT Technical Research Centre of Finland
Publications - 22
Citations - 346
Kestutis Grigoras is an academic researcher from VTT Technical Research Centre of Finland. The author has contributed to research in topics: Atomic layer deposition & Silicon. The author has an hindex of 7, co-authored 22 publications receiving 250 citations.
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Journal ArticleDOI
Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors
Kestutis Grigoras,Jari Keskinen,Leif Grönberg,Elina Yli-Rantala,Sampo Laakso,Hannu Välimäki,Pertti Kauranen,Jouni Ahopelto,Mika Prunnila +8 more
TL;DR: In this article, the authors demonstrate that excellent wettability and electrochemical properties in aqueous and organic electrolytes can be obtained by coating the porous silicon matrix with an ultra-thin layer of titanium nitride by atomic layer deposition.
Journal ArticleDOI
Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”
Esko Ahvenniemi,Andrew R. Akbashev,Saima Ali,Mikhael Bechelany,Maria Berdova,Stefan Ivanov Boyadjiev,David Campbell Cameron,Rong Chen,Mikhail Chubarov,Véronique Cremers,Anjana Devi,Viktor Drozd,Liliya Elnikova,Gloria Gottardi,Kestutis Grigoras,Dennis M. Hausmann,Cheol Seong Hwang,Shih Hui Jen,Tanja Kallio,Jaana Kanervo,Ivan Khmelnitskiy,Dohan Kim,Lev Klibanov,Yury Koshtyal,A. Outi I. Krause,Jakob Kuhs,Irina Kärkkänen,Marja-Leena Kääriäinen,Tommi Kääriäinen,Luca Lamagna,Adam A. Łapicki,Markku Leskelä,Harri Lipsanen,Jussi Lyytinen,A. A. Malkov,A. A. Malygin,Abdelkader Mennad,Christian Militzer,Jyrki Molarius,Małgorzata Norek,Çaǧla Özgit-Akgün,Mikhail Panov,Henrik Pedersen,Fabien Piallat,Georgi Popov,Riikka L. Puurunen,Geert Rampelberg,Robin H. A. Ras,Erwan Rauwel,Fred Roozeboom,Fred Roozeboom,Timo Sajavaara,Hossein Salami,Hele Savin,Nathanaelle Schneider,Thomas E. Seidel,Jonas Sundqvist,Dmitry Suyatin,Tobias Törndahl,J. Ruud van Ommen,Claudia Wiemer,Oili Ylivaara,Oksana Yurkevich +62 more
TL;DR: The Virtual Project on the history of ALD (VPHA) is a volunteer-based effort with open participation, set up to make the early days of atomic layer deposition more transparent.
Journal ArticleDOI
Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors
Pai Lu,Per Ohlckers,Lutz Müller,Steffen Leopold,Martin Hoffmann,Kestutis Grigoras,Jouni Ahopelto,Mika Prunnila,Xuyuan Chen +8 more
TL;DR: In this article, high aspect ratio silicon nanorod arrays by cyclic deep reactive ion etching (DRIE) process as a scaffold to enhance the energy density of a Si-based supercapacitor.
Journal ArticleDOI
Ternary composite Si/TiN/MnO2 taper nanorod array for on-chip supercapacitor
Pai Lu,Einar Halvorsen,Per Ohlckers,Lutz Müller,Steffen Leopold,Martin Hoffmann,Kestutis Grigoras,Jouni Ahopelto,Mika Prunnila,Xuyuan Chen +9 more
TL;DR: A ternary composite Si/TiN/MnO 2 taper nanorod array electrode for large specific capacitance on-chip supercapacitor is presented in this article.
Journal ArticleDOI
Microelectrode Array With Transparent ALD TiN Electrodes.
Tomi Ryynänen,Anssi Pelkonen,Kestutis Grigoras,Oili Ylivaara,Tanja Hyvärinen,Jouni Ahopelto,Mika Prunnila,Susanna Narkilahti,Jukka Lekkala +8 more
TL;DR: Low noise platinum black or sputtered titanium nitride (TiN) microelectrodes are typically used for recording electrical activity of neuronal or cardiac cell cultures and transparent ALD TiN film is a suitable electrode material for producing functional MEAs.