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Kestutis Grigoras

Researcher at VTT Technical Research Centre of Finland

Publications -  22
Citations -  346

Kestutis Grigoras is an academic researcher from VTT Technical Research Centre of Finland. The author has contributed to research in topics: Atomic layer deposition & Silicon. The author has an hindex of 7, co-authored 22 publications receiving 250 citations.

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Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors

TL;DR: In this article, the authors demonstrate that excellent wettability and electrochemical properties in aqueous and organic electrolytes can be obtained by coating the porous silicon matrix with an ultra-thin layer of titanium nitride by atomic layer deposition.
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Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

Esko Ahvenniemi, +62 more
TL;DR: The Virtual Project on the history of ALD (VPHA) is a volunteer-based effort with open participation, set up to make the early days of atomic layer deposition more transparent.
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Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors

TL;DR: In this article, high aspect ratio silicon nanorod arrays by cyclic deep reactive ion etching (DRIE) process as a scaffold to enhance the energy density of a Si-based supercapacitor.
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Microelectrode Array With Transparent ALD TiN Electrodes.

TL;DR: Low noise platinum black or sputtered titanium nitride (TiN) microelectrodes are typically used for recording electrical activity of neuronal or cardiac cell cultures and transparent ALD TiN film is a suitable electrode material for producing functional MEAs.