S
Samuel Suhard
Researcher at Katholieke Universiteit Leuven
Publications - 44
Citations - 293
Samuel Suhard is an academic researcher from Katholieke Universiteit Leuven. The author has contributed to research in topics: Wafer & Wafer bonding. The author has an hindex of 7, co-authored 43 publications receiving 218 citations. Previous affiliations of Samuel Suhard include IMEC.
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Proceedings Article
Gate-last vs. gate-first technology for aggressively scaled EOT logic/RF CMOS
Anabela Veloso,Lars-Ake Ragnarsson,Moon Ju Cho,Katia Devriendt,Kristof Kellens,Farid Sebaai,Samuel Suhard,Stephan Brus,Y. Crabbe,Tom Schram,E. Rohr,Vasile Paraschiv,Geert Eneman,Thomas Kauerauf,Morin Dehan,Soo-jin Hong,S. Yamaguchi,Shinji Takeoka,Higuchi Yuichi,Hilde Tielens,A. Van Ammel,Paola Favia,Hugo Bender,Alexis Franquet,Thierry Conard,Xiang Li,K.-L. Pey,Herbert Struyf,Paul W. Mertens,Philippe Absil,Naoto Horiguchi,T. Y. Hoffmann +31 more
TL;DR: In this paper, gate-last technology for improved effective work function tuning with ∼200meV higher p-EWF at 7A EOT, ∼2x higher f max performance, and further options for channel stress enhancement than with gate-first by taking advantage of the intrinsic stress of metals and gate height dependence.
Proceedings ArticleDOI
Junctionless gate-all-around lateral and vertical nanowire FETs with simplified processing for advanced logic and analog/RF applications and scaled SRAM cells
Anabela Veloso,Bertrand Parvais,Philippe Matagne,Eddy Simoen,T. Huynh-Bao,Vasile Paraschiv,E. Vecchio,Katia Devriendt,Erik Rosseel,M. Ercken,Boon Teik Chan,C. Delvaux,Efrain Altamirano-Sanchez,J. Versluijs,Z. Tao,Samuel Suhard,Stephan Brus,A. Sibaja-Hernandez,Niamh Waldron,P. Lagrain,O. Richard,Hugo Bender,Adrian Chasin,B. Kaczer,Tsvetan Ivanov,S. Ramesh,K. De Meyer,Julien Ryckaert,Nadine Collaert,Aaron Thean +29 more
TL;DR: In this article, the junctionless gate-all-around (GAA) nanowire FETs (NWFETs) with the same lateral configuration were compared to the conventional gate-and-allow mode (IM) GAA-NPNs, showing similar speed and voltage gain, and reduced LF noise.
Journal ArticleDOI
Invited) Vertical Nanowire FET Integration and Device Aspects
Anabela Veloso,Efrain Altamirano-Sanchez,Stephan Brus,Boon Teik Chan,Miroslav Cupak,Morin Dehan,Christie Delvaux,Katia Devriendt,Geert Eneman,M. Ercken,Trong Huynh-Bao,Tsvetan Ivanov,Philippe Matagne,C Merckling,Vasile Paraschiv,Siva Ramesh,Erik Rosseel,Luc Rynders,Arturo Sibaja-Hernandez,Samuel Suhard,Zheng Tao,E. Vecchio,Niamh Waldron,D. Yakimets,Kristin De Meyer,Dan Mocuta,Nadine Collaert,Aaron Thean +27 more
TL;DR: This work reports on vertical nanowire FET devices (VNWFETs) with a gate-all-around (GAA) configuration, which offer new, promising opportunities to enable further CMOS scaling and increased layout efficiency.
Proceedings ArticleDOI
3D Stacking Using Bump-Less Process for Sub 10um Pitch Interconnects
Jaber Derakhshandeh,Inge De Preter,Carine Gerets,Lin Hou,Nancy Heylen,Eric Beyne,G. Beyer,John Slabbekoorn,Vikas Dubey,Anne Jourdain,Goedele Potoms,Fumihiro Inoue,Geraldine Jamieson,Kevin Vandersmissen,Samuel Suhard,Tomas Webers,Giovanni Capuz,Teng Wang,Kenneth June Rebibis,Andy Miller +19 more
TL;DR: In this paper, a bumpless process is introduced in order to further scale down the pitch of microbumps, and electrical resistance measurement, cross section SEM and mechanical characterizations show successful 3D stacking using proposed method.
Vertical nanowire FET integration and device aspects
Anabela Veloso,Efrain Altamirano Sanchez,Stephan Brus,Boon Teik Chan,Miroslav Cupak,Morin Dehan,Christie Delvaux,Katia Devriendt,Geert Eneman,M. Ercken,Trong Huynh Bao,Tsvetan Ivanov,Philippe Matagne,Clement Merckling,Vasile Paraschiv,Siva Ramesh,Erik Rosseel,Luc Rynders,Arturo Sibaja-Hernandez,Samuel Suhard,Zheng Tao,E. Vecchio,Niamh Waldron,D. Yakimets,Kristin De Meyer,Dan Mocuta,Nadine Collaert,Aaron Thean +27 more