Proceedings ArticleDOI
A 828μW 1.8V 80dB dynamic-range readout interface for a MEMS capacitive microphone
Syed Arsalan Jawed,D. Cattin,Massimo Gottardi,Nicola Massari,Andrea Baschirotto,A. Simoni +5 more
- pp 442-445
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TLDR
A CMOS interface for a piston-type MEMS capacitive microphone performs a capacitance-to-voltage conversion by bootstrapping the sensor through a voltage pre-amplifier, feeding a third-order sigma-delta modulator.Abstract:
A CMOS interface for a piston-type MEMS capacitive microphone is presented. It performs a capacitance-to-voltage conversion by bootstrapping the sensor through a voltage pre-amplifier, feeding a third-order sigma-delta modulator. The bootstrapping performs active parasitic compensation, improving the readout sensitivity by ~12 dB. The total current consumption is 460 uA at 1.8 V-supply. The digital output achieves 80 dBA-DR, with 63 dBA peak-SNR, using 0.35 um 2P/4M CMOS technology. The paper includes electrical and acoustic measurement results for the interface.read more
Citations
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Journal ArticleDOI
An Energy-Efficient 15-Bit Capacitive-Sensor Interface Based on Period Modulation
TL;DR: An energy-efficient capacitive-sensor interface with a period-modulated output signal that converts the sensor capacitance to a time interval, which can be easily digitized by a simple digital counter, based on a relaxation oscillator consisting of an integrator and a comparator.
Journal ArticleDOI
A 1.2-V 8.3-nJ CMOS Humidity Sensor for RFID Applications
Zhichao Tan,Roel Daamen,Aurelie Humbert,Youri Victorovitch Ponomarev,Youngcheol Chae,Michiel A. P. Pertijs +5 more
TL;DR: A fully integrated CMOS humidity sensor for a smart RFID sensor platform that provides a resolution of 0.05% RH in the range from 30% RH to 100% RH while consuming only 8.3 nJ per measurement, which is an order- of-magnitude less energy than the state-of-the-art.
Proceedings ArticleDOI
A capacitance-to-digital converter for displacement sensing with 17b resolution and 20μs conversion time
TL;DR: In precision mechatronic systems, such as wafer steppers, the position of critical mechanical components must be dynamically stabilized with sub-nanometer precision by a servo loop consisting of a displacement sensor and an actuator.
Journal ArticleDOI
A 15-bit 140- $\mu$ W Scalable-Bandwidth Inverter-Based $\Delta \Sigma $ Modulator for a MEMS Microphone With Digital Output
TL;DR: A discrete-time audio ΔΣ modulator for a MEMS microphone with digital output is presented that features a scalable signal bandwidth to also support ultrasonic frequencies for proximity sensing applications such as gesture recognition.
Journal ArticleDOI
A Dual-Slope Capacitance-to-Digital Converter Integrated in an Implantable Pressure-Sensing System
Sechang Oh,Yoonmyung Lee,Jingcheng Wang,Zhiyoong Foo,Yejoong Kim,Wanyeong Jung,Ziyun Li,David Blaauw,Dennis Sylvester +8 more
TL;DR: The design uses base capacitance subtraction with a configurable capacitor bank and dual precision comparators to improve energy efficiency, consuming 110nW with 9.7b ENOB and 0.85pJ/conv·step FoM.
References
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Journal ArticleDOI
A low-noise low-offset capacitive sensing amplifier for a 50-/spl mu/g//spl radic/Hz monolithic CMOS MEMS accelerometer
TL;DR: In this article, a CMOS capacitive sensing amplifier for a monolithic MEMS accelerometer fabricated by post-CMOS surface micromachining is described, which employs capacitance matching with optimal transistor sizing to minimize sensor noise floor.
Journal ArticleDOI
A 1.8-V digital-audio sigma-delta modulator in 0.8-/spl mu/m CMOS
Shahriar Rabii,Bruce A. Wooley +1 more
TL;DR: In this article, the design and implementation of a CMOS /spl Sigma/spl Delta/ modulator for digital-audio A/D conversion that operates from a single 1.8-V power supply is examined.
Journal ArticleDOI
A 1-V 140-/spl mu/W 88-dB audio sigma-delta modulator in 90-nm CMOS
TL;DR: In this paper, a single-loop third-order switched-capacitor /spl Sigma/-/spl Delta/ modulator in 90-nm standard digital CMOS technology is presented, which is intended to minimize the power consumption in a lowvoltage environment.
Proceedings ArticleDOI
Modeling sigma-delta modulator non-idealities in SIMULINK(R)
S. Brigati,F. Francesconi,Piero Malcovati,Davide Tonietto,Andrea Baschirotto,Franco Maloberti +5 more
TL;DR: This paper presents a complete set of SIMULINK(R) models, which allow exhaustive behavioral simulations of any sigma-delta modulator to be performed and results demonstrate the validity of the models proposed.
Modeling sigma-delta modulator non-idealities in simulink ®
S. Brigati,F. Francesconi,Piero Malcovati,Davide Tonietto,A Baschirotto,Franco Maloberti,Piazza G. Marconi,Clock Jitter +7 more
TL;DR: In this article, a complete set of SIMULINK ® models, which allow exhaustive behavioral simulations of any sigma-delta modulator to be performed, is presented, and the simulation results on a second-order switched-capacitor sigmoid modulator demonstrate the validity of the models proposed.