scispace - formally typeset
Journal ArticleDOI

Analysis of the accuracy of the bulge test in determining the mechanical properties of thin films

Martha K. Small, +1 more
- 01 Jun 1992 - 
- Vol. 7, Iss: 6, pp 1553-1563
TLDR
In this article, the authors review several existing models for describing the deformation behavior of a circular thin film in a bulge test, and then analyze these models in light of the finite element results.
Abstract
Since its first application to thin films in the 1950's the bulge test has become a standard technique for measuring thin film mechanical properties. While the apparatus required for the test is simple, interpretation of the data is not. Failure to recognize this fact has led to inconsistencies in the reported values of properties obtained using the bulge test. For this reason we have used the finite element method to model the deformation behavior of a thin film in a bulge test for a variety of initial conditions and material properties. In this paper we will review several of the existing models for describing the deformation behavior of a circular thin film in a bulge test, and then analyze these models in light of the finite element results. The product of this work is a set of equations and procedures for analyzing bulge test data that will improve the accuracy and reliability of this technique.

read more

Citations
More filters
Book

Thin Film Materials: Stress, Defect Formation and Surface Evolution

TL;DR: The role of stress in mass transport is discussed in this article, where the authors consider anisotropic and patterned films, buckling, bulging, peeling and fracture.
Journal ArticleDOI

Recent development in 2D materials beyond graphene

TL;DR: In this article, a review highlights the recent progress of the state-of-the-art research on synthesis, characterization and isolation of single and few layer nanosheets and their assembly.
Journal ArticleDOI

Ultimate permeation across atomically thin porous graphene.

TL;DR: Highly efficient mass transfer across physically perforated double-layer graphene is reported, having up to a few million pores with narrowly distributed diameters between less than 10 nanometers and 1 micrometer, in agreement with predictions of 2D transport theories.
Journal ArticleDOI

A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films

TL;DR: In this paper, a new analysis of the deflection of square and rectangular membranes of varying aspect ratio under the influence of a uniform pressure is presented, and the influence on the residual stresses on the deformation of membranes is examined.
Journal ArticleDOI

Interfacial toughness measurements for thin films on substrates

TL;DR: There are more than 200 different methods for measuring thin film adhesion, suggesting it to be material, geometry and even industry specific as discussed by the authors, suggesting that the major extrinsic variables are film stress, extent of delamination, thickness and temperature while the major intrinsic ones are modulus, yield strength, the thermodynamic work of adhesion and one or more length scales.
References
More filters
Book

Theory of plates and shells

TL;DR: In this article, the authors describe the bending of long RECTANGULAR PLATES to a cycloidal surface, and the resulting deformation of shels without bending the plates.
Journal ArticleDOI

Enhanced elastic modulus in composition‐modulated gold‐nickel and copper‐palladium foils

TL;DR: In this article, the authors measured the biaxial elastic modulus of Au•Ni and Cu•Pd foils containing short-wavelength one-dimensional composition modulations produced by vapor deposition.
Journal ArticleDOI

Microfabricated structures for the in situ measurement of residual stress, Young’s modulus, and ultimate strain of thin films

TL;DR: In this paper, two microfabricated structures for the in situ measurement of mechanical properties of thin films, a suspended membrane, and an asymmetric released structure, were reported, and they yielded a residual tensile stress of 30 MPa and a Young's modulus of 3 GPa.
Related Papers (5)