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Journal ArticleDOI

Bimorph‐driven x–y–z translation stage for scanned image microscopy

James R. Matey, +3 more
- 01 Apr 1987 - 
- Vol. 58, Iss: 4, pp 567-570
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TLDR
In this paper, an x-y-z scanning stage for mechanically scanned microscopy is presented, which has a deflection sensitivity of 0.3 μm/V and travel in each of the three axes of ±60 μm.
Abstract
We have developed an x–y–z scanning stage for mechanically scanned microscopy. The stage is constructed of ‘‘double‐S’’ mode piezoelectric bimorphs. The prototype unit has a deflection sensitivity of 0.3 μm/V and a travel in each of the three axes of ±60 μm. The lowest mechanical resonances of the stage are at 190, 220, and 360 Hz, corresponding to the x, y, and z axes of the stage, respectively. The noise level of the stage, when mounted on an isolation table, is ∼0.1 nm. The performance of the stage can be understood in terms of a simple lumped element model which can be used to optimize such stages for particular applications.

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Citations
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Journal ArticleDOI

Scanning tunnelling microscopy

TL;DR: The scanning tunnelling microscopy (STM) is a very versatile instrument that can operate in ultra high vacuum, in air, in reactive gases, in corrosive solutions or at cryogenic temperatures as discussed by the authors.
PatentDOI

Photon scanning tunneling microscopy.

TL;DR: In this article, a method and apparatus for photon scanning tunneling microscopy for examining a sample (20) in a sample area (21) on a surface (16) at subwavelength resolution is disclosed.
Patent

Integrated scanning tunneling microscope

TL;DR: In this paper, an integrated scanning tunneling microscope and an integrated piezoelectric transducer are presented, where the bimorph cantilevers have tips with sharp points formed thereon which are moved by the action of the control circuit (88) and the Bimorphs so to stay within a very small distance of a conducting surface.
Journal ArticleDOI

Recurve piezoelectric-strain-amplifying actuator architecture

TL;DR: A Recurve actuator architecture is described and a quasi-static model relating voltage, force, and deflection along with experimental results for fundamental RecurVE actuator elements are presented.
Journal ArticleDOI

Design and control of a long-traveling nano-positioning stage

TL;DR: In this paper, a dual-axis long-traveling nano-positioning stage (DALTNPS) is presented, which consists of a traditional ball-screw stage and a three-degrees-of-freedom (3-DOF) piezo-stage.
References
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Book

Theory of elasticity

TL;DR: The theory of the slipline field is used in this article to solve the problem of stable and non-stressed problems in plane strains in a plane-strain scenario.
Journal ArticleDOI

Near‐field optical‐scanning microscopy

TL;DR: In this paper, an NFOS microscope with tunnel distance regulation, its theoretical background, application potential, and limitations are discussed, as well as the application potential and limitations of NFOS microscopy.
Journal ArticleDOI

Scanning tunneling microscopy

TL;DR: In this article, the surface topographies in real space and work function profiles on an atomic sale were obtained using scanning tunneling microscopy, a novel technique based on vacuum tunneling.
Journal ArticleDOI

Near Field Scanning Optical Microscopy (NSOM): Development and Biophysical Applications.

TL;DR: In this paper, two distinct methods are presented for the fabrication of well-characterized, highly reproducible, subwavelength apertures for near-field scanning optical microscopy (NSOM).
PatentDOI

Scanning capacitance microscope

TL;DR: In this article, a scanning capacitance probe is used to identify the topography and material properties of the surface layer of a human body in microscopic imaging using a single image of the body.
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