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Journal ArticleDOI

Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ‘‘ink’’ followed by chemical etching

Amit Kumar, +1 more
- 04 Oct 1993 - 
- Vol. 63, Iss: 14, pp 2002-2004
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TLDR
In this paper, a technique for patterning a self-assembled monolayer (SAM) on a gold substrate using an elastomer stamp was described, followed by selective etching in an aqueous, basic solution of cyanide ion and dissolved dioxygen (1M KOH, 0.1 M KCN).
Abstract
This letter describes a technique that can be used to produce well‐defined features of gold. The technique involves patterning of a self‐assembled monolayer (SAM) on a gold substrate using an elastomer stamp (fabricated either from a phenol‐formaldehyde polymer or polydimethylsiloxane), followed by selective etching in an aqueous, basic solution of cyanide ion and dissolved dioxygen (1M KOH, 0.1 M KCN). Electrically conductive structures of gold with dimensions as small as 1 μm have been produced using this procedure. Once a rubber stamp is fabricated, patterning and etching of gold substrates is straightforward. This method is convenient, does not require routine access to clean rooms and photolithographic equipment, and can be used to produce multiple copies of a pattern.

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Citations
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Patent

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Lithography and Other Patterning Techniques for Future Electronics As integrated circuits continue to go smaller, laying down circuit patterns on semiconductor material becomes more expensive and new techniques are needed.

TL;DR: The benefits of continuing to be able to manufacture electronics at the 22-nm node and beyond appear to justify the investment, and there is no shortage of ideas on how to accomplish this.
References
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Book

Advanced Inorganic Chemistry

TL;DR: Cotton and Wilkinson's Advanced Inorganic Chemistry (AIC) as discussed by the authors is one of the most widely used inorganic chemistry books and has been used for more than a quarter century.
Journal ArticleDOI

The use of self-assembled monolayers and a selective etch to generate patterned gold features

TL;DR: Using a number of techniques, such as micromachining, microwriting, electron-beam lithography, ion-beam, and ion beam, it is possible to form patterns of SAMs on the Au surface.
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