Journal ArticleDOI
High-Frequency Thermally Actuated Electromechanical Resonators With Piezoresistive Readout
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TLDR
In this article, the authors present fabrication, characterization, and modeling of micro/nanoelectromechanical high-frequency resonators actuated using thermal forces with piezoresistive readout.Abstract:
This paper presents fabrication, characterization, and modeling of micro/nanoelectromechanical high-frequency resonators actuated using thermal forces with piezoresistive readout. Thermally actuated single-crystalline silicon resonators with frequencies (up to 61 MHz) have been successfully demonstrated. It is shown both theoretically and experimentally that, as opposed to the general perception, thermal actuation can be a viable actuation mechanism for high-frequency resonators, and using appropriate design guidelines, this actuation mechanism could even be more suitable for higher frequency rather than lower frequency applications. It has been shown through comprehensive thermoelectro-mechanical modeling that thermal-piezoresistive nanomechanical resonators with frequencies in the gigahertz range can exhibit motional conductance values as high as 1 mA/V while consuming static power as low as a few microwatts.read more
Citations
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Micromachined Resonators: A Review
TL;DR: A review of the remarkable progress that has been made during the past few decades in design, modeling, and fabrication of micromachined resonators with references to the most influential contributions in the field for those interested in a deeper understanding of the material.
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Effective quality factor tuning mechanisms in micromechanical resonators
James M. L. Miller,Azadeh Ansari,David B. Heinz,Yunhan Chen,Ian B. Flader,Dongsuk D. Shin,L. Guillermo Villanueva,Thomas W. Kenny +7 more
TL;DR: In this article, the effect of parametric pumping and thermal-piezoresistive pumping on the quality factor of a micro-and nano-electromechanical (MEM/NEM) resonator was investigated.
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Thermal-Piezoresistive Energy Pumps in Micromechanical Resonant Structures
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Thermal-Piezoresistive SOI-MEMS Oscillators Based on a Fully Differential Mechanically Coupled Resonator Array for Mass Sensing Applications
TL;DR: In this article, a mechanically coupled array technique to enable a fully differential operation of single-crystal silicon thermal-piezoresistive resonators has been demonstrated to alleviate resistive feedthrough issues often seen in TPRs, therefore, featuring clear resonance behavior with decent signal-to-feedthrough ratio.
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Aerosol mass concentration measurements: Recent advancements of real-time nano/micro systems
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References
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MEMS technology for timing and frequency control
TL;DR: As vibrating RF MEMS devices are perceived more as circuit building blocks than as stand-alone devices, and as the frequency processing circuits they enable become larger and more complex, the makings of an integrated micromechanical circuit technology begin to take shape, perhaps with a functional breadth not unlike that of integrated transistor circuits.
Journal ArticleDOI
Giant piezoresistance effect in silicon nanowires
Rongrui He,Peidong Yang +1 more
TL;DR: It is reported that Si nanowires possess an unusually large piezoresistance effect compared with bulk, which may have significant implications in nanowire-based flexible electronics, as well as in nanoelectromechanical systems.
Journal ArticleDOI
Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators
TL;DR: In this article, the design, fabrication, and characterization of piezoelectrically-transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk acoustic modes to address the need for high-Q microelectronic-integrable frequency-selective components is presented.
Journal ArticleDOI
Super-high-frequency two-port AlN contour-mode resonators for RF applications
TL;DR: The design and experimental verification of a new class of thin-film (250 nm) superhigh- frequency laterally-vibrating piezoelectric microelectromechanical (MEMS) resonators suitable for the fabrication of narrow-band MEMS filters operating at frequencies above 3 GHz are reported.
Journal ArticleDOI
High $Q$ -Factor In-Plane-Mode Resonant Microsensor Platform for Gaseous/Liquid Environment
Jae Hyeong Seo,Oliver Brand +1 more
TL;DR: In this paper, a disk-shaped microstructure is operated in a rotational in-plane mode with typical resonance frequencies between 300 and 1000 kHz, where the surrounding fluid instead of compressing it, damping is reduced, and high quality factors are achieved.
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