Journal ArticleDOI
Ion‐beam deposition of thin films of ferroelectric lead zirconate titanate (PZT)
R. N. Castellano,L. G. Feinstein +1 more
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In this article, a focused ion-beam sputtering technique was used to sample lead zirconate titanate (ZrxTi1−x)O3 in an O2 atmosphere.Abstract:
Lead zirconate titanate is a solid solution with nominal composition Pb(ZrxTi1−x)O3. Ferroelectric thin films of this material have been successfully deposited by a focused ion‐beam sputtering technique in an O2 atmosphere. These films were characterized according to composition, crystal structure, and dielectric and ferroelectric properties. The effects of deposition temperature, heat treatment after deposition, and substrate and target material were investigated. The composition of the films was within 1 at.% of the composition of the multicomponent PZT target for substrate temperatures up to 200 °C. The Pb concentration decreased for substrate temperatures above 200 °C. Films deposited at substrate temperatures below 250 °C were microcrystalline. At 300 °C, the pyrochlore phase was obtained. Films with the ferroelectric perovskite structure were deposited above 400 °C, which is the lowest deposition temperature ever reported for this phase. O2 losses during postdeposition annealing resulted in a collap...read more
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Ferroelectric thin films for micro-sensors and actuators: a review
TL;DR: In this article, the authors present a review of the deposition, integration, and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems.
Journal ArticleDOI
Preparation of Pb(Zr,Ti)O3 thin films by sol gel processing: Electrical, optical, and electro‐optic properties
Guanghua Yi,Z. Wu,Michael Sayer +2 more
TL;DR: In this article, a crack-free transparent ferroelectric polycrystalline Pb(Zr,Ti)O3 thin films were prepared by spin-coating solutions of complex alkoxides.
Journal ArticleDOI
New materials for micro-scale sensors and actuators An engineering review
Stephen A. Wilson,Renaud Jourdain,Qi Zhang,Robert A. Dorey,Christopher R. Bowen,Magnus Willander,Qamar Ul Wahab,Safaa Al-Hilli,Omer Nur,Eckhard Quandt,Christer Johansson,E. Pagounis,Manfred Kohl,Jovan Matovic,Björn Samel,Wouter van der Wijngaart,Edwin Jager,Daniel O Carlsson,Zoran Djinovic,Michael Wegener,Carmen Moldovan,Rodica Iosub,E. Abad,Michael Wendlandt,Cristina Rusu,Katrin Persson +25 more
TL;DR: In this paper, a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices is provided. And a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology is presented.
Journal ArticleDOI
Room Temperature Impact Consolidation (RTIC) of Fine Ceramic Powder by Aerosol Deposition Method and Applications to Microdevices
TL;DR: In this article, the advantages of the aerosol deposition (AD) method are highlighted by realizing a comparison with conventional thin-film methods and thermal spray technology, and examples of integration of AD method in the fabrication of electronic components are also given to show the easiness in usage and in integration of this method in device process flow.
Journal ArticleDOI
PZT thin films for microsensors and actuators: Where do we stand?
TL;DR: This paper reviews deposition, integration, and device fabrication of PbZr/sub x/Ti/sub 1-x/O/sub 3/ (PZT) films for applications in micro-electromechanical systems and some preliminary conclusions are presented.
References
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Journal ArticleDOI
Rochelle Salt as a Dielectric
C. B. Sawyer,C. H. Tower +1 more
TL;DR: In this paper, the dielectric constant of Rochelle salt half-crystals was shown to reach a value of 18,000 and curves were given to show the variation in mechanical and electrical saturation with temperature.
Journal ArticleDOI
Effects of Grain Size and Porosity on Electrical and Optical Properties of PLZT Ceramics
Kiyoshi Okazaki,Kunihiro Nagata +1 more
TL;DR: In this article, a group of transparent ferroelectric hot-pressed (Pb0.92La0.08)-(Zr0.65Ti0.35)0.98O3 specimens with controlled grain size and constant porosity were prepared.
Journal ArticleDOI
Grain-size effects on properties of some ferroelectric ceramics
H T Martirena,J C Burfoot +1 more
TL;DR: In this paper, a model is developed which proposes that each grain has a different transition temperature Tc. The Tc values are taken as following a Gaussian distribution and the behaviour of the dielectric constant against temperature is computed and checked with experimental results.
Journal ArticleDOI
Preparation of Pb(Zr,Ti)O3 thin films by an electron beam evaporation technique
Masaru Oikawa,Kohji Toda +1 more
TL;DR: In this paper, thin films of Pb(Zr,Ti)O3 have been fabricated on fused quartz or stainless steel substrates by an electron beam evaporation technique.
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