Open AccessJournal Article
Silicon as a mechanical material
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In this article, the advantages of employing silicon as a mechanical material, the relevant mechanical characteristics of silicon, and the processing techniques which are specific to micromechanical structures are discussed.Abstract:
Single-crystal silicon is being increasingly employed in a variety of new commercial products not because of its well-established electronic properties, but rather because of its excellent mechanical properties. In addition, recent trends in the engineering literature indicate a growing interest in the use of silicon as a mechanical material with the ultimate goal of developing a broad range of inexpensive, batch-fabricated, high-performance sensors and transducers which are easily interfaced with the rapidly proliferating microprocessor. This review describes the advantages of employing silicon as a mechanical material, the relevant mechanical characteristics of silicon, and the processing techniques which are specific to micromechanical structures. Finally, the potentials of this new technology are illustrated by numerous detailed examples from the literature. It is clear that silicon will continue to be aggressively exploited in a wide variety of mechanical applications complementary to its traditional role as an electronic material. Furthermore, these multidisciplinary uses of silicon will significantly alter the way we think about all types of miniature mechanical devices and components.read more
Citations
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A micromachined silicon accelerometer with fibre optic interrogation
TL;DR: In this paper, the performance of a miniature accelerometer fabricated using silicon micromechanics, but employing electrically passive techniques to detect the deflection of the inertial mass.
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Development and Experimental Evaluation of a Novel Piezoresistive MEMS Strain Sensor
TL;DR: In this article, a new piezoresistive microelectromechanical system strain sensor is proposed to measure biaxial state of strain/stress using a single crystal silicon aligned along the inplane transverse.
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Silicon micromechanical optical waveguide for sensing and modulation
TL;DR: In this paper, a two-sided micromachining process for the fabrication of a silicon micromechanical optical waveguide has been developed for light modulation/switching and for sensing of diverse force-related environmental parameters such as mechanical stress, pressure, acceleration, etc.
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Photonic devices based on preferential etching
Bob Bellini,J.F. Larchanche,Jean-Pierre Vilcot,Didier Decoster,Romeo Beccherelli,Antonio d'Alessandro +5 more
TL;DR: This design concept of optical waveguides characterized by a practical and reproducible process based on preferential etching of crystalline silicon substrates is introduced and is a suitable platform for soft-matter photonics and heterogeneous integration.
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A micromachined low-power temperature-regulated bandgap voltage reference
TL;DR: In this paper, a temperature regulated bandgap voltage reference is fabricated in a foundry CMOS process using a simple post-processing micromachining step, a small portion of the chip containing the reference circuitry is thermally isolated from the rest of the silicon die.
References
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Journal ArticleDOI
High-performance heat sinking for VLSI
TL;DR: In this paper, a water-cooled integral heat sink for silicon integrated circuits has been designed and tested at a power density of 790 W/cm2, with a maximum substrate temperature rise of 71°C above the input water temperature.
Book
Formulas for Stress and Strain
TL;DR: In this article, the authors propose formulas for stress and strain in the form of formulas for strain and stress, which are derived from the formula for stress-and-stress and strain.
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A gas chromatographic air analyzer fabricated on a silicon wafer
TL;DR: In this article, a miniature gas analysis system based on the principles of gas chromatography (GC) has been built in silicon using photolithography and chemical etching techniques, which allows size reductions of nearly three orders of magnitude compared to conventional laboratory instruments.
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The resonant gate transistor
TL;DR: In this paper, the resonant gate transistor (RGT) is described as an electrostatically excited tuning fork employing field effect transistor readout, which can be batch-fabricated in a manner consistent with silicon technology.
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Electrolytic shaping of germanium and silicon
TL;DR: In this article, the properties of electrolyte-semiconductor barriers are described, with emphasis on germanium, and the use of these barriers in localizing electrolytic etching is discussed.