Journal ArticleDOI
Thermography techniques for integrated circuits and semiconductor devices
Wenjun Liu,Bozhi Yang +1 more
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TLDR
In this article, the authors provide information on several commonly used thermography techniques in semiconductor and micro-device industry and research today, including thin coating methods, contact mechanical methods, and optical techniques such as infrared microscopy and thermoreflectance.Abstract:
Purpose – The goal of this review paper is to provide information on several commonly used thermography techniques in semiconductor and micro‐device industry and research today.Design/methodology/approach – The temperature imaging or mapping techniques include thin coating methods such as liquid crystal thermography and fluorescence microthermography, contact mechanical methods such as scanning thermal microscopy, and optical techniques such as infrared microscopy and thermoreflectance. Their principles, characteristics and applications are discussed.Findings – Thermal issues play an important part in optimizing the performance and reliability of high‐frequency and high‐packing density electronic circuits. To improve the performance and reliability of microelectronic devices and also to validate thermal models, accurate knowledge of local temperatures and thermal properties is required.Originality/value – The paper provides readers, especially technical engineers in industry, a general knowledge of severa...read more
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Journal ArticleDOI
Thermometry at the nanoscale
Carlos D. S. Brites,Patrícia P. Lima,Nuno Silva,Ángel Millán,Vitor S. Amaral,Fernando Palacio,Luís D. Carlos +6 more
TL;DR: A general overview of recent examples of luminescent and non-luminescent thermometers working at nanometric scale and the challenges and opportunities in the development for highly sensitive ratiometric thermometers operating at the physiological temperature range with submicron spatial resolution is offered.
Journal ArticleDOI
Optical temperature sensing of rare-earth ion doped phosphors
TL;DR: In this paper, the current status of optical thermometry of rare-earth ion doped phosphors is reviewed in detail, based on the mechanisms of optical temperature sensing of different phosphors, temperature dependent luminescence spectra, the fluorescence intensity ratio technique in the data fitting process, and errors of the energy difference between thermally coupled levels.
Book ChapterDOI
Lanthanides in Luminescent Thermometry
TL;DR: Luminescent ratiometric thermometers combining high spatial and temporal resolution at the micro-and nanoscale, where the conventional methods are ineffective, have emerged over the last decade as an effervescent field of research, essentially motivated by their potential applications in nanotechnology, photonics, and biomedicine as discussed by the authors.
Journal ArticleDOI
CCD-based thermoreflectance microscopy: principles and applications
M. Farzaneh,Kerry Maize,D Lüerßen,D Lüerßen,J.A. Summers,P. M. Mayer,Peter E. Raad,Kevin P. Pipe,Ali Shakouri,Rajeev J. Ram,Janice Hudgings +10 more
TL;DR: In this article, the basic physical principle behind thermoreflectance as a thermography tool, discuss the experimental setup, resolutions achieved, signal processing procedures and calibration techniques, and review the current applications of CCD-based thermography in various devices.
References
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Journal ArticleDOI
Atomic force microscope
TL;DR: The atomic force microscope as mentioned in this paper is a combination of the principles of the scanning tunneling microscope and the stylus profilometer, which was proposed as a method to measure forces as small as 10-18 N. As one application for this concept, they introduce a new type of microscope capable of investigating surfaces of insulators on an atomic scale.
Journal ArticleDOI
Infrared detectors: status and trends
TL;DR: In this article, the performance of infrared thermal detectors as compared to photon detectors is investigated and an overview of focal plane array architecture is given with emphasis on monolithic and hybrid structures.
Book
Temperature : its measurement and control in science and industry
TL;DR: In this article, the authors address thermodynamic temperature determinations temperature scales temperature fixed points resistance thermometry thermocouple thermometry radiation thermometry temperature control electronic thermometry calibration methods thermometry for special applications
Journal ArticleDOI
Remote thermometry with thermographic phosphors: Instrumentation and applications
TL;DR: The temperature-dependent characteristics of fluorescence of several rare-earth-doped ceramic phosphors has made these materials the focus of a major effort in the field of noncontact thermometry over the past few decades as mentioned in this paper.
Journal ArticleDOI
Thermo‐optical spectroscopy: Detection by the ’’mirage effect’’
TL;DR: In this paper, a new thermo-optical method based on the sensitive detection of thermal gradients adjacent to heated sample surfaces is described, and room and low-temperature experiments are performed using this technique, and its advantages over different methods are discussed.