Showing papers on "Secondary electrons published in 2018"

Cosmic-ray ionisation in circumstellar discs

Abstract: Context. Galactic cosmic rays (CRs) are a ubiquitous source of ionisation of the interstellar gas, competing with UV and X-ray photons as well as natural radioactivity in determining the fractional abundance of electrons, ions, and charged dust grains in molecular clouds and circumstellar discs.Aims. We model the propagation of various components of Galactic CRs versus the column density of the gas. Our study is focussed on the propagation at high densities, above a few g cm−2 , especially relevant for the inner regions of collapsing clouds and circumstellar discs.Methods. The propagation of primary and secondary CR particles (protons and heavier nuclei, electrons, positrons, and photons) is computed in the continuous slowing down approximation, diffusion approximation, or catastrophic approximation by adopting a matching procedure for the various transport regimes. A choice of the proper regime depends on the nature of the dominant loss process modelled as continuous or catastrophic.Results. The CR ionisation rate is determined by CR protons and their secondary electrons below ≈130 g cm−2 and by electron-positron pairs created by photon decay above ≈600 g cm−2 . We show that a proper description of the particle transport is essential to compute the ionisation rate in the latter case, since the electron and positron differential fluxes depend sensitively on the fluxes of both protons and photons.Conclusions. Our results show that the CR ionisation rate in high-density environments, such as the inner parts of collapsing molecular clouds or the mid-plane of circumstellar discs, is higher than previously assumed. It does not decline exponentially with increasing column density, but follows a more complex behaviour because of the interplay of the different processes governing the generation and propagation of secondary particles.

Experimental evidence for ultrafast intermolecular relaxation processes in hydrated biomolecules

Abstract: Cell and gene damage caused by ionizing radiation has been studied for many years. It is accepted that DNA lesions (single- and double-strand breaks, for example) are induced by secondary species such as radicals, ions and the abundant low-energy secondary electrons generated by the primary radiation. Particularly harmful are dense ionization clusters of several ionization processes within a volume typical for the biomolecular system. Here we report the observation of a damage mechanism in the form of a non-local autoionizing process called intermolecular Coulombic decay (ICD). It directly involves DNA constituents or other organic molecules in an aqueous environment. The products are two energetic ions and three reactive secondary electrons that can cause further damage in their vicinity. Hydrogen-bonded complexes that consist of one tetrahydrofuran (THF) molecule—a surrogate of deoxyribose in the DNA backbone—and one water molecule are used as a model system. After electron impact ionization of the water molecule in the inner-valence shell the vacancy is filled by an outer-valence electron. The released energy is transferred across the hydrogen bridge and leads to ionization of the neighbouring THF molecule. This energy transfer from water to THF is faster than the otherwise occurring intermolecular proton transfer. The signature of the ICD reaction is identified in triple-coincidence measurements of both ions and one of the final state electrons. These results could improve the understanding of radiation damage in biological tissue. The authors study intermolecular Coulomb decay that occurs in a sample of THF and water in a reaction microscope employing triple-coincidence measurements of two ions and one electron. They find that ICD is a previously unconsidered effect between water and other organic molecules that are hydrogen-bonded, with ICD outpacing proton transfer.

The effect of electron induced secondary electrons on the characteristics of low-pressure capacitively coupled radio frequency plasmas

Abstract: We investigate the effects of secondary electrons (SEs), induced by electrons impinging on the electrodes, on the characteristics of low-pressure single-frequency capacitively coupled plasmas (CCPs) by particle-in-cell/Monte Carlo collisions (PIC/MCC) simulations. In a recent PIC/MCC simulation study, that incorporated a realistic description of the electron-surface interaction, such electron-induced SEs (δ-electrons) were found to have a remarkable impact on the ionization dynamics and the plasma parameters in argon at 0.5 Pa and 6.7 cm gap between SiO2 electrodes (Horváth et al 2017 Plasma Sources Sci. Technol. 26 124001). At such low pressure and at high voltage amplitudes, the ion-induced SEs (γ-electrons) emitted at one electrode can reach the opposite electrode with high energies, where, depending on the surface material and surface conditions, they can induce the emission of a high number of δ-electrons, which can cause significant ionization and a higher plasma density. Here, we study the influence of δ-electrons on the ionization dynamics and plasma parameters at various pressures and voltage amplitudes, assuming different SE yields for ions (γ-coefficient) in single-frequency 13.56 MHz argon discharges. The emission of SEs by electron impact is found to be an important plasma-surface process at low pressures, between 0.5 Pa and 3 Pa. Both the gas pressure and the value of the γ-coefficient are found to affect the role of δ-electrons in shaping the discharge characteristics at different voltage amplitudes. While their effect on the ionization dynamics is most striking at low pressures, high voltage amplitudes and high values of the γ-coefficient in the whole parameter regime were investigated here. The realistic description of the electron-surface interaction significantly alters the computed plasma parameters, compared to results obtained based on a simple model for the description of the electron-surface interaction, widely used in PIC/MCC simulations of low-pressure CCPs.

Experimental and computational investigations of electron dynamics in micro atmospheric pressure radio-frequency plasma jets operated in He/N2 mixtures

Abstract: The electron power absorption dynamics in radio frequency driven micro atmospheric pressure capacitive plasma jets are studied based on experimental phase resolved optical emission spectroscopy and the computational particle in cell simulations with Monte Carlo treatment of collisions. The jet is operated at 13.56 MHz in He with different admixture concentrations of N2 and at several driving voltage amplitudes. We find the spatio-temporal dynamics of the light emission of the plasma at various wavelengths to be markedly different. This is understood by revealing the population dynamics of the upper levels of selected emission lines/bands based on comparisons between experimental and simulation results. The populations of these excited states are sensitive to different parts of the electron energy distribution function and to contributions from other excited states. Mode transitions of the electron power absorption dynamics from the Ω- to the Penning-mode are found to be induced by changing the N2 admixture concentration and the driving voltage amplitude. Our numerical simulations reveal details of this mode transition and provide novel insights into the operation details of the Penning-mode. The characteristic excitation/emission maximum at the time of maximum sheath voltage at each electrode is found to be based on two mechanisms: (i) a direct channel, i.e. excitation/emission caused by electrons generated by Penning ionization inside the sheaths and (ii) an indirect channel, i.e. secondary electrons emitted from the electrode due to the impact of positive ions generated by Penning ionization at the electrodes.

Cosmic-ray ionisation in circumstellar discs

Abstract: Galactic cosmic rays are a ubiquitous source of ionisation of the interstellar gas, competing with UV and X-ray photons as well as natural radioactivity in determining the fractional abundance of electrons, ions and charged dust grains in molecular clouds and circumstellar discs. We model the propagation of different components of Galactic cosmic rays versus the column density of the gas. Our study is focussed on the propagation at high densities, above a few g cm$^{-2}$, especially relevant for the inner regions of collapsing clouds and circumstellar discs. The propagation of primary and secondary CR particles (protons and heavier nuclei, electrons, positrons, and photons) is computed in the continuous slowing down approximation, diffusion approximation, or catastrophic approximation, by adopting a matching procedure for the different transport regimes. A choice of the proper regime depends on the nature of the dominant loss process, modelled as continuous or catastrophic. The CR ionisation rate is determined by CR protons and their secondary electrons below $\approx 130$ g cm$^{-2}$ and by electron/positron pairs created by photon decay above $\approx600$ g cm$^{-2}$. We show that a proper description of the particle transport is essential to compute the ionisation rate in the latter case, since the electron/positron differential fluxes depend sensitively on the fluxes of both protons and photons. Our results show that the CR ionisation rate in high-density environments, like, e.g., the inner parts of collapsing molecular clouds or the mid-plane of circumstellar discs, is larger than previously assumed. It does not decline exponentially with increasing column density, but follows a more complex behaviour due to the interplay of different processes governing the generation and propagation of secondary particles.

STEM Imaging with Beam-Induced Hole and Secondary Electron Currents

Abstract: Transmission electron microscopy excels at determining a sample's physical structure---the locations and identities of its constituent atoms---, but is typically blind to electronic structure. A combination of electron-beam-induced current (EBIC) imaging with scanning transmission electron microscopy (STEM), however, does reveal electronic properties by detecting the emission of both secondary electrons and the corresponding holes, for differential contrast that is otherwise inaccessible. Thus STEM EBIC can provide high-resolution images of the properties that govern the function of nanoelectronic devices.

Untangling the methane chemistry in interstellar and solar system ices toward ionizing radiation: a combined infrared and reflectron time-of-flight analysis

Abstract: Pure methane (CH4/CD4) ices were exposed to three ionizing radiation sources at 5.5 K under ultrahigh vacuum conditions to compare the complex hydrocarbon spectrum produced across several interstellar environments. These irradiation sources consisted of energetic electrons to simulate secondary electrons formed in the track of galactic cosmic rays (GCRs), Lyman α (10.2 eV; 121.6 nm) photons simulated the internal VUV field in a dense cloud, and broadband (112.7-169.8 nm; 11.0-7.3 eV) photons which mimic the interstellar ultra-violet field. The in situ chemical evolution of the ices was monitored via Fourier transform infrared spectroscopy (FTIR) and during heating via mass spectrometry utilizing a quadrupole mass spectrometer with an electron impact ionization source (EI-QMS) and a reflectron time-of-flight mass spectrometer with a photoionization source (PI-ReTOF-MS). The FTIR analysis detected six small hydrocarbon products from the three different irradiation sources: propane [C3H8(C3D8)], ethane [C2H6(C2D6)], the ethyl radical [C2H5(C2D5)], ethylene [C2H4(C2D4)], acetylene [C2H2(C2D2)], and the methyl radical [CH3(CD3)]. The sensitive PI-ReTOF-MS analysis identified a complex array of products with different products being detected between experiments with general formulae: CnH2n+2 (n = 4-8), CnH2n (n = 3-9), CnH2n-2 (n = 3-9), CnH2n-4 (n = 4-9), and CnH2n-6 (n = 6-7) from electron irradiation and CnH2n+2 (n = 4-8), CnH2n (n = 3-10), CnH2n-2 (n = 3-11), CnH2n-4 (n = 4-11), CnH2n-6 (n = 5-11), and CnH2n-8 (n = 6-11) from broadband photolysis and Lyman α photolysis. These experiments show that even the simplest hydrocarbon can produce important complex hydrocarbons such as C3H4 and C4H6 isomers. Distinct isomers from these groups have been shown to be important reactants in the synthesis of polycyclic aromatic hydrocarbons like indene (C9H8) and naphthalene (C10H8) under interstellar conditions.

Modeling of reduced secondary electron emission yield from a foam or fuzz surface

Abstract: Complex structures on a material surface can significantly reduce the total secondary electron emission yield from that surface. A foam or fuzz is a solid surface above which is placed a layer of isotropically aligned whiskers. Primary electrons that penetrate into this layer produce secondary electrons that become trapped and do not escape into the bulk plasma. In this manner the secondary electron yield (SEY) may be reduced. We developed an analytic model and conducted numerical simulations of secondary electron emission from a foam to determine the extent of SEY reduction. We find that the relevant condition for SEY minimization is u¯≡AD/2≫1 while D ≪ 1, where D is the volume fill fraction and A is the aspect ratio of the whisker layer, the ratio of the thickness of the layer to the radius of the fibers. We find that foam cannot reduce the SEY from a surface to less than 0.3 of its flat value.

Simulation on the dynamic charge behavior of vacuum flashover developing across insulator involving outgassing

Abstract: A 2D simulation based on particle-in-cell and Monte Carlo collision algorithm is implemented to investigate the accumulation and dissipation of surface charges on an insulator during flashover with outgassing in vacuum. A layer of positive charges is formed on the insulator after the secondary electrons emission (SEE) reaches saturation. With the build-up of local pressure resulting from gas desorption, the incident energy of electrons is affected by electron-neutral collisions and field distortion, remarkably decreasing the charge density on the insulator. Gas desorption ionization initiates near the anode, culminating, and then abates, followed by a steady and gradual augmentation as the negatively charged surface spreads towards the cathode and halts the SEE nearby. The initiation of flashover development is discussed in detail, and a subdivision of flashover development is proposed, including an anode-initiated desorption ionization avalanche, establishment of a plasma sheath, and plasma expansion. The transform from saturation to explosion of space charges and dissipation of the surface charge are revealed, which can be explained by the competition between multipactor electrons and ionized electrons.A 2D simulation based on particle-in-cell and Monte Carlo collision algorithm is implemented to investigate the accumulation and dissipation of surface charges on an insulator during flashover with outgassing in vacuum. A layer of positive charges is formed on the insulator after the secondary electrons emission (SEE) reaches saturation. With the build-up of local pressure resulting from gas desorption, the incident energy of electrons is affected by electron-neutral collisions and field distortion, remarkably decreasing the charge density on the insulator. Gas desorption ionization initiates near the anode, culminating, and then abates, followed by a steady and gradual augmentation as the negatively charged surface spreads towards the cathode and halts the SEE nearby. The initiation of flashover development is discussed in detail, and a subdivision of flashover development is proposed, including an anode-initiated desorption ionization avalanche, establishment of a plasma sheath, and plasma expansion. Th...

Measurement of the energy distribution of electrons escaping minimum-B ECR plasmas

Abstract: The measurement of the electron energy distribution (EED) of electrons escaping axially from a minimum-B electron cyclotron resonance ion source (ECRIS) is reported. The experimental data were recorded with a room-temperature 14 GHz ECRIS at the JYFL accelerator laboratory. The electrons escaping through the extraction mirror of the ion source were detected with a secondary electron amplifier placed downstream from a dipole magnet serving as an electron spectrometer with 500 eV resolution. It was discovered that the EED in the range of 5–250 keV is strongly non-Maxwellian and exhibits several local maxima below 20 keV energy. It was observed that the most influential ion source operating parameter on the EED is the magnetic field strength, which affected the EED predominantly at energies less than 100 keV. The effects of the microwave power and frequency, ranging from 100 to 600 W and 11 to 14 GHz, respectively, on the EED were found to be less significant. The presented technique and experiments enable the comparison between direct measurement of the EED and results derived from Bremsstrahlung diagnostics, the latter being severely complicated by the non-Maxwellian nature of the EED reported here. The role of RF pitch angle scattering on electron losses and the relation between the EED of the axially escaping electrons and the EED of the confined electrons are discussed.

Micro-thermocouple on nano-membrane: thermometer for nanoscale measurements.

Abstract: A thermocouple of Au-Ni with only 2.5-μm-wide electrodes on a 30-nm-thick Si3N4 membrane was fabricated by a simple low-resolution electron beam lithography and lift off procedure. The thermocouple is shown to be sensitive to heat generated by laser as well as an electron beam. Nano-thin membrane was used to reach a high spatial resolution of energy deposition and to realise a heat source of sub-1 μm diameter. This was achieved due to a limited generation of secondary electrons, which increase a lateral energy deposition. A low thermal capacitance of the fabricated devices is useful for the real time monitoring of small and fast temperature changes, e.g., due to convection, and can be detected through an optical and mechanical barrier of the nano-thin membrane. Temperature changes up to ~2 × 105 K/s can be measured at 10 kHz rate. A simultaneous down-sizing of both, the heat detector and heat source strongly required for creation of thermal microscopy is demonstrated. Peculiarities of Seebeck constant (thermopower) dependence on electron injection into thermocouple are discussed. Modeling of thermal flows on a nano-membrane with presence of a micro-thermocouple was carried out to compare with experimentally measured temporal response.

Particle modeling of radial electron dynamics in a controlled discharge of a Hall thruster

Abstract: An improved radial particle-in-cell model of an annular Hall effect thruster discharge with secondary-electron emission from the walls and a radial magnetic field is presented. New algorithms are implemented: first, to adjust the mean neutral density to the desired mean plasma density; second, to avoid the refreshing of axially accelerated particles; and third, to correctly weigh low-density populations (such as secondary electrons). The high-energy tails of the velocity distribution functions of primary and secondary electrons from each wall are largely depleted, leading to temperature anisotropies for each species. The secondary-electron populations are found to be partially recollected by the walls and partially transferred to the primary population. The replenishment ratio of the primary high-energy tail is determined based on the sheath potential fall. Significant asymmetries at the inner and outer walls are found for the collected currents, the mean impact energy, and the wall and sheath potentials. Radial profiles in the plasma bulk are asymmetric too, due to a combination of the geometric expansion, the magnetic mirror effect, and the centrifugal force (emanating from the E × B drift). The temperature anisotropy and non-uniformity, and the centrifugal force modify the classical Boltzmann relation on electrons along the magnetic lines.

A significant role of non-thermal equilibrated electrons in the formation of deleterious complex DNA damage

Abstract: Although most of the radiation damage to genomic DNA could be rendered harmless using repair enzymes in a living cell, a certain fraction of the damage is persistent resulting in serious genetic effects, such as mutation induction. In order to understand the mechanisms of the deleterious DNA damage formation in terms of its earliest physical stage at the radiation track end, dynamics of low energy electrons and their thermalization processes around DNA molecules were investigated using a dynamic Monte Carlo code. The primary incident (1 keV) electrons multiply collide within 1 nm (equivalent to three DNA-base-pairs, 3bp) and generate secondary electrons which show non-Gaussian and non-thermal equilibrium distributions within 300 fs. On the other hand, the secondary electrons are mainly distributed within approximately 10 nm from their parent cations although approximately 5% of the electrons are localized within 1 nm of the cations owing to the interaction of their Coulombic fields. The mean electron energy is 0.7 eV; however, more than 10% of the electrons fall into a much lower-energy region than 0.1 eV at 300 fs. These results indicate that pre-hydrated electrons are formed from the extremely decelerated electrons over a few nm from the cations. DNA damage sites comprising multiple nucleobase lesions or single strand breaks can therefore be formed by multiple collisions of these electrons within 3bp. This multiple damage site is hardly processed by base excision repair enzymes. However, pre-hydrated electrons can also be produced resulting in an additional base lesion (or a strand break) more than 3bp away from the multi-damage site. These damage sites may be finally converted into a double strand break (DSB) when base excision enzymes process the additional base lesions. This DSB includes another base lesion(s) at their termini, and may introduce miss-rejoining by DSB repair enzymes, and hence may result in biological effects such as mutation in surviving cells.

Evaluation of Monte Carlo tools for high-energy atmospheric physics II: relativistic runaway electron avalanches

Abstract: . The emerging field of high-energy atmospheric physics studies how high-energy particles are produced in thunderstorms, in the form of terrestrial γ -ray flashes and γ -ray glows (also referred to as thunderstorm ground enhancements). Understanding these phenomena requires appropriate models of the interaction of electrons, positrons and photons with air molecules and electric fields. We investigated the results of three codes used in the community – Geant4, GRanada Relativistic Runaway simulator (GRRR) and Runaway Electron Avalanche Model (REAM) – to simulate relativistic runaway electron avalanches (RREAs). This work continues the study of Rutjes et al. ( 2016 ) , now also including the effects of uniform electric fields, up to the classical breakdown field, which is about 3.0 MV m −1 at standard temperature and pressure. We first present our theoretical description of the RREA process, which is based on and incremented over previous published works. This analysis confirmed that the avalanche is mainly driven by electric fields and the ionisation and scattering processes determining the minimum energy of electrons that can run away, which was found to be above ≈10 keV for any fields up to the classical breakdown field. To investigate this point further, we then evaluated the probability to produce a RREA as a function of the initial electron energy and of the magnitude of the electric field. We found that the stepping methodology in the particle simulation has to be set up very carefully in Geant4. For example, a too-large step size can lead to an avalanche probability reduced by a factor of 10 or to a 40 % overestimation of the average electron energy. When properly set up, both Geant4 models show an overall good agreement (within ≈10 %) with REAM and GRRR. Furthermore, the probability that particles below 10 keV accelerate and participate in the high-energy radiation is found to be negligible for electric fields below the classical breakdown value. The added value of accurately tracking low-energy particles ( keV) is minor and mainly visible for fields above 2 MV m −1 . In a second simulation set-up, we compared the physical characteristics of the avalanches produced by the four models: avalanche (time and length) scales, convergence time to a self-similar state and energy spectra of photons and electrons. The two Geant4 models and REAM showed good agreement on all parameters we tested. GRRR was also found to be consistent with the other codes, except for the electron energy spectra. That is probably because GRRR does not include straggling for the radiative and ionisation energy losses; hence, implementing these two processes is of primary importance to produce accurate RREA spectra. Including precise modelling of the interactions of particles below 10 keV (e.g. by taking into account molecular binding energy of secondary electrons for impact ionisation) also produced only small differences in the recorded spectra.

High-voltage microdischarge as a source of extreme density plasma

Abstract: The generation of non-equilibrium (cold) plasmas with the densities ∼1019–1020 cm−3 in a fully ionized state has been reported in several recent experimental studies. In this work, we simulate a high-voltage high-pressure nanosecond xenon microdischarge that provides an easily accessible source of such a fully ionized cold plasma. In our studies, we use self-consistent one-dimensional Particle-in-Cell Monte Carlo collisions model. We observe that the generation of a fully ionized plasma can be driven by the secondary electron emission from the cathode. Initially, secondary electrons propagate through the collisional sheath and generate the plasma with a density ∼1018 cm−3. Such a dense plasma generated in the vicinity of the cathode sheath makes sheath collisionless, which allows the acceleration of secondary electrons to keV energies. These energetic electrons are responsible for the generation of fully ionized plasma. We also obtain that accounting for the electron field emission allows faster generatio...

Transport of secondary electrons through coatings of ion-irradiated metallic nanoparticles

Abstract: The transport of low-energy electrons through the coating of a radiosensitizing metallic nanoparticle under fast ion irradiation is analyzed theoretically and numerically. As a case study, we consider a poly(ethylene glycol)-coated gold nanoparticle of diameter 1.6 nm excited by a carbon ion in the Bragg peak region in water as well as by more energetic carbon ions. The diffusion equation for low-energy electrons emitted from a finite-size spherical source representing the surface of the metal core is solved to obtain the electron number density as a function of radial distance and time. Information on the atomistic structure and composition of the coating is obtained from molecular dynamics simulations performed with the MBN Explorer software package. Two mechanisms of low-energy electron production by the metallic core are considered: the relaxation of plasmon excitations and collective excitations of valence d electrons in individual atoms of gold. Diffusion coefficients and characteristic lifetimes of electrons propagating in gold, water, and poly(ethylene glycol) are obtained from relativistic partial wave analysis and the dielectric formalism, respectively. On this basis, the number of electrons released through the organic coating into the surrounding aqueous medium and the number of hydroxyl radicals produced are evaluated. The largest increase of the radical yield due to low-energy electrons is observed when the nanoparticle is excited by an ion with energy significantly exceeding that in the Bragg peak region. It is also shown that the water content of the coating, especially near the surface of the metal core, is crucial for the production of hydroxyl radicals.

Electron trapping: a mechanism for acid production in extreme ultraviolet photoresists

Abstract: The photomechanism of extreme ultraviolet (EUV) exposures in chemically amplified photoresists is much different than that of previous lithographic wavelengths. Electrons generated during EUV exposure are demonstrated to be a source of acid production through a process referred to as electron trapping. Density functional theory modeling indicates that it is energetically favorable for the photoacid generator (PAG) molecule to decompose if an electron is trapped. Low-energy electrons (<10 eV) that are unlikely to produce holes and secondary electrons generate acid-indicating electron–PAG interactions that are capable of inducing decomposition. Additionally, solution phase reduction in PAGs via electrolysis is shown to produce acid. Furthermore, a more easily reduced PAG (i.e., higher likelihood of trapping an electron) produces a higher acid yield, further supporting electron trapping as a process of acid production regardless of the polymer matrix. An acid indicator, Coumarin 6, was used to determine the number of acids generated per absorbed EUV photon. The results of these measurements indicate that electron–PAG interactions are a source of acid production through electron trapping; thus, an increase in the number of electron-hole pairs available to induce chemical reactions would improve sensitivity.

On the shape of the gamma-ray spectrum around the "$\pi^0$-bump"

Abstract: The "pion-decay" bump is a distinct signature of the differential energy spectrum of $\gamma$-rays between 100 MeV and 1 GeV produced in hadronic interactions of accelerated particles (cosmic rays) with the ambient gas. We use the recent parametrisations of relevant cross-sections to study the formation of the "pion-decay" bump. The $\gamma$-ray spectrum below the maximum of this spectral feature can be distorted because of contributions of additional radiation components, in particular, due to the bremsstrahlung of secondary electrons and positrons, the products of decays of $\pi^\pm$-mesons, accompanying the $\pi^0$-production. At energies below 100 MeV, a non-negligible fraction of $\gamma$-ray flux could originate from interactions of sub-relativistic heavy ions. We study the impact of these radiation channels on the formation of the overall $\gamma$-ray spectrum based on a time-dependent treatment of evolution of energy distributions of the primary and secondary particles in the $\gamma$-ray production region.

Polymer effects on PAG acid yield in EUV resists

Abstract: The photo-mechanism of EUV exposures in chemically amplified photoresists are much different than that of previous lithographic wavelengths. Electrons generated during EUV exposure are demonstrated to be a source of acid production through a process referred to as electron trapping. Density functional theory modeling indicates that it is energetically favorable for the PAG molecule to decompose if an electron is trapped. Low-energy electrons unlikely to produce holes and secondary electrons generate acid indicating electron-PAG interactions are capable to induce decomposition. Additionally, a more easily reduced PAG (i.e. higher likelihood of trapping an electron) produces a higher acid yield supporting electron trapping as a process of acid production. An acid indicator, Coumarin 6, was used to determine the number of acids generated per absorbed EUV photon. The results of these measurements indicate that electron-PAG interactions are a source of acid production through electron trapping; thus, increasing the number of electron-hole pairs available to induce chemical reactions would improve sensitivity. It is expected that lower band gap materials produce more electron-hole pairs after an absorption event. Subsequently, these measurements show that lower band gap polymers generate higher acid yields.

Elucidation of the Two-Step Damage Formation Process of Latent Tracks in Poly(allyl diglycol carbonate), PADC: Role of Secondary Low-Energy Electrons

Abstract: The aim of the present study is to evaluate the mechanisms by which secondary electrons of low energy degrade poly(allyl diglycol carbonate) (PADC) when it is used as a Solid State Nuclear Track De...

Energy Spectra of Protons and Generated Secondary Electrons around the Bragg Peak in Materials of Interest in Proton Therapy.

Abstract: The number and energy of secondary electrons generated around the trajectories of swift protons interacting with biological materials are highly relevant in proton therapy, due to the prominent role of low-energy electrons in the production of biodamage. For a given material, electron energy distributions are determined by the proton energy; and it is imperative that the distribution of proton energy at depths around the Bragg peak region be described as accurately as possible. With this objective, we simulated the energy distributions of proton beams of clinically relevant energies (50–300 MeV) at depths around the Bragg peak in liquid water and the water-equivalent polymer poly(methyl methacrylate) (PMMA). By using a simple model, this simulation has been conveniently extended to account for nuclear fragmentation reactions, providing depth-dose curves in excellent agreement with available experimental data. Special care has been taken to describe the electronic excitation spectrum of the target, taking ...

Effect of thermal annealing and chemical treatments on secondary electron emission properties of atomic layer deposited MgO

Abstract: This study reports on the secondary electron emission (SEE) performance of atomic layer deposited MgO films, with thicknesses in the range from 5 to 25 nm, for the application in the Timed Photon Counter. In this novel, photodetector MgO is utilized as a material for the fabrication of ultrathin transmission dynodes (tynodes). Two different types of PECVD silicon oxide films are applied on top of MgO, in order to protect it against etching steps in the fabrication of tynodes and also as a prevention against aging. Applicability of these two materials as capping films is evaluated in terms of achieved secondary electron yield (SEY) of MgO after their removal. Emission of secondary electrons is known to depend on numerous physical and chemical properties of the material, such as surface roughness and chemical composition. On that account, morphological and structural properties of modified MgO are determined by atomic force microscope and x-ray photoelectron spectrometer and linked to the changes in SEE behavior. The authors demonstrate that the application of a suitable capping layer followed by its removal provides an SEY of 6.6, as opposed to the value of 4.8 recorded from the as-deposited MgO film. Furthermore, in a following experiment, they showed that annealing of MgO films at high temperatures (up to 1100 °C) significantly improved the secondary electron emission, elevating the SEY to 7.2.This study reports on the secondary electron emission (SEE) performance of atomic layer deposited MgO films, with thicknesses in the range from 5 to 25 nm, for the application in the Timed Photon Counter. In this novel, photodetector MgO is utilized as a material for the fabrication of ultrathin transmission dynodes (tynodes). Two different types of PECVD silicon oxide films are applied on top of MgO, in order to protect it against etching steps in the fabrication of tynodes and also as a prevention against aging. Applicability of these two materials as capping films is evaluated in terms of achieved secondary electron yield (SEY) of MgO after their removal. Emission of secondary electrons is known to depend on numerous physical and chemical properties of the material, such as surface roughness and chemical composition. On that account, morphological and structural properties of modified MgO are determined by atomic force microscope and x-ray photoelectron spectrometer and linked to the changes in SEE beh...

Imaging Localized Energy States in Silicon-Doped InGaN Nanowires Using 4D Electron Microscopy

Abstract: Introducing dopants into InGaN NWs is known to significantly improve their device performances through a variety of mechanisms. However, to further optimize device operation under the influence of large specific surfaces, thorough knowledge of ultrafast dynamical processes at the surface and interface of these NWs is imperative. Here, we describe the development of four-dimensional scanning ultrafast electron microscopy (4D S-UEM) as an extremely surface-sensitive method to directly visualize in space and time the enormous impact of silicon doping on the surface-carrier dynamics of InGaN NWs. Two time regimes of surface dynamics are identified for the first time in a 4D S-UEM experiment: an early time behavior (within 200 ps) associated with the deferred evolution of secondary electrons due to the presence of localized trap states that decrease the electron escape rate and a longer time scale behavior (several ns) marked by accelerated charge carrier recombination. The results are further corroborated by ...

Secondary electron emission and yield spectra of metals from Monte Carlo simulations and experiments

Abstract: In this work, we present a computational method, based on the Monte Carlo statistical approach, for calculating electron energy emission and yield spectra of metals, such as copper, silver and gold The calculation of these observables proceeds via the Mott theory to deal with the elastic scattering processes, and by using the Ritchie dielectric approach to model the electron inelastic scattering events In the latter case, the dielectric function, which represents the starting point for the evaluation of the energy loss, is obtained from experimental reflection electron energy loss spectra The generation of secondary electrons upon ionization of the samples is also implemented in the calculation A remarkable agreement is obtained between both theoretical and experimental electron emission spectra and yield curves

Temperature dependence of secondary electron emission: A new route to nanoscale temperature measurement using scanning electron microscopy

Abstract: Scanning electron microscopy (SEM) is ubiquitous for imaging but is not generally regarded as a tool for thermal measurements. Here, the temperature dependence of secondary electron (SE) emission from a sample's surface is investigated. Spatially uniform SEM images and the net charge flowing through a sample were recorded at different temperatures to quantify the temperature dependence of SE emission and electron absorption. The measurements also demonstrated charge conservation during thermal cycling by placing the sample inside a Faraday cup to capture the emitted SEs and back-scattered electrons from the sample. The temperature dependence of SE emission was measured for four semiconducting materials (Si, GaP, InP, and GaAs) with response coefficients found to be of magnitudes ∼100−1000 ppm/K. The detection limits for temperature changes were no more than ±8 °C for 60 s acquisition time.