T
Tsunenobu Kimoto
Researcher at Kyoto University
Publications - 635
Citations - 15807
Tsunenobu Kimoto is an academic researcher from Kyoto University. The author has contributed to research in topics: Silicon carbide & Diode. The author has an hindex of 58, co-authored 622 publications receiving 13668 citations. Previous affiliations of Tsunenobu Kimoto include Eötvös Loránd University & Sumitomo Electric Industries.
Papers
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Journal ArticleDOI
Sources of Epitaxial Growth-Induced Stacking Faults in 4H-SiC
TL;DR: In this article, the sources of epitaxial growth-induced stacking faults (SFs) in thick 4H-SiC epilayers have been identified in the samples.
Journal ArticleDOI
TaC-coated graphite prepared via a wet ceramic process: Application to CVD susceptors for epitaxial growth of wide-bandgap semiconductors
Daisuke Nakamura,Taishi Kimura,Tetsuo Narita,Akitoshi Suzumura,Tsunenobu Kimoto,Kenji Nakashima +5 more
TL;DR: In this article, a sintered tantalum carbide coating (SinTaC) was proposed as an approach to reduce the production cost and improving the crystal quality of bulk-grown crystals and epitaxially grown films of widebandgap semiconductors.
Book ChapterDOI
Device Processing of Silicon Carbide
Tsunenobu Kimoto,James A. Cooper +1 more
TL;DR: In this article, the fundamental aspects and technological development of ion implantation, etching, oxidation, interface passivation, and Schottky and ohmic contacts in SiC are discussed.
Journal ArticleDOI
Implantation of Al and B Acceptors into Alpha-SiC and pn Junction Diodes
Journal ArticleDOI
SiC epitaxy on non-standard surfaces
TL;DR: In this paper, an epitaxial growth of high-quality 4H-SiC layers on non-standar (1120) and (03 38) faces has been investigated.