T
Tsunenobu Kimoto
Researcher at Kyoto University
Publications - 635
Citations - 15807
Tsunenobu Kimoto is an academic researcher from Kyoto University. The author has contributed to research in topics: Silicon carbide & Diode. The author has an hindex of 58, co-authored 622 publications receiving 13668 citations. Previous affiliations of Tsunenobu Kimoto include Eötvös Loránd University & Sumitomo Electric Industries.
Papers
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Journal ArticleDOI
Control of carbon vacancy in SiC toward ultrahigh-voltage power devices
TL;DR: In this paper, the carbon vacancy defect is one of the most abundant point defects in SiC (as-grown, irradiated, annealed) and of technological importance because the acceptor-like level of a carbon monovacancy (Z1/2 center: EC − 0.63 eV) works as the primary carrier-lifetime killer in 4H-SiC.
Journal ArticleDOI
Control of the flatband voltage of 4H-SiC Metal-Oxide-Semiconductor (MOS) capacitors by co-implantation of nitrogen and aluminum
TL;DR: In this paper, secondary ion mass spectrometry analyses reveal that the implanted N and Al atoms are mobile in the oxide layer during the oxidation process and are partly accumulated at the SiC/SiO2 interface.
Journal ArticleDOI
Interface States of SiO2/SiC on (11-20) and (0001) Si Faces
Journal ArticleDOI
Defect Control in Growth and Processing of 4H-SiC for Power Device Applications
TL;DR: Extended defects and deep levels generated during epitaxial growth of 4H-SiC and device processing have been reviewed in this paper, where three types in-grown stacking faults, (6,2), (5,3), and (4,4) structures, have been identified in epilayers with a density of 1-10 cm-2.
Book ChapterDOI
Silicon Carbide Epitaxy
TL;DR: In this article, the fundamental aspects and technological developments involved in hexagonal SiC homoepitaxial growth are described, and the basic phenomena of defect generation and reduction during SiC epitaxy have been clarified.