V
Veena Misra
Researcher at North Carolina State University
Publications - 251
Citations - 5283
Veena Misra is an academic researcher from North Carolina State University. The author has contributed to research in topics: Gate dielectric & Dielectric. The author has an hindex of 39, co-authored 249 publications receiving 4954 citations. Previous affiliations of Veena Misra include University of North Carolina at Chapel Hill & Motorola.
Papers
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Proceedings ArticleDOI
Investigation of Thermal Stability of High-kappa Interpoly Dielectrics in TaN Metal Floating Gate Memory Structures
TL;DR: In this article, the thermal stability of TaN metal as floating gate (FG) in combination with high-k interpoly dielectrics (IPD) is investigated, and it is shown that IPD leakage is worse with high temperature anneal and causing degraded memory behavior.
Journal ArticleDOI
N and P metal oxide semiconductor field effect transistor characteristics of hafnium-doped SiO2 gate dielectrics
TL;DR: In this article, the interfacial properties of hafnium-doped SiO2 films via N and P metal oxide semiconductor (MOS) materials, MOS-capacitor, and N andP metal oxide field effect transistor (MosFET) characterization are presented.
Journal ArticleDOI
Effects of oxygen doping on properties of microcrystalline silicon film grown using rapid thermal chemical vapor deposition
X.-L. Xu,Veena Misra,Mehmet C. Öztürk,Jim J. Wortman,G. Harris,Dennis M. Maher,L. Spanos,Eugene A. Irene +7 more
TL;DR: In this paper, an oxygen doped microcrystalline silicon (μc-Si) deposition process is developed by mixing small amounts of nitrous oxide (N2O) with silane (SiH4) in a rapid thermal chemical vapor deposition (RTCVD) reactor.
Proceedings ArticleDOI
Room temperature ozone and humidity response evolution of atomic layer deposited SnO 2 sensors
TL;DR: In this article, the changes in response to ozone and humidity of ALD tin dioxide (SnO 2 ) sensors operated at room temperature and integrated into a portable platform over several weeks were investigated.
Book ChapterDOI
3 – Field Effect Transistors
Veena Misra,Mehmet C. Öztürk +1 more
TL;DR: In this paper, the authors discuss the basic theory of the MOSFET and present an overview of less common field effect devices used only in specific applications, but their coverage is limited to a qualitative explanation of the operating principles and basic equations.