scispace - formally typeset
V

Veena Misra

Researcher at North Carolina State University

Publications -  251
Citations -  5283

Veena Misra is an academic researcher from North Carolina State University. The author has contributed to research in topics: Gate dielectric & Dielectric. The author has an hindex of 39, co-authored 249 publications receiving 4954 citations. Previous affiliations of Veena Misra include University of North Carolina at Chapel Hill & Motorola.

Papers
More filters
Journal ArticleDOI

High Mobility 4H-SiC MOSFETs Using Lanthanum Silicate Interface Engineering and ALD Deposited SiO2

TL;DR: In this article, a gate dielectric consisting of a thin lanthanum silicate layer at SiC/dielectric interface and SiO2 deposited by atomic layer deposition was developed to enhance the mobility of Si face (0001) 4H-SiC lateral MOSFETs.
Journal ArticleDOI

Electrical properties of composite gate oxides formed by rapid thermal processing

TL;DR: In this paper, oxide stacks formed by combinations of rapid thermal chemical vapor deposition and rapid thermal oxidation have been investigated as gate dielectrics, and it was found that preoxidation prior to depositing an oxide results in a composite structure that greatly reduces the defect density by mismatching pores and weak spots in each film.

Elemental Analyses of Hypervelocity Microparticle Impact Sites on Interplanetary Dust Experiment Sensor Surfaces

TL;DR: The Interplanetary Dust Experiment (IDE) had over 450 electrically active ultra-high purity metaloxide-silicon impact detectors located on the six primary sides of the Long Duration Exposure Facility (LDEF) as mentioned in this paper.
Journal ArticleDOI

Electrical and Physical Analysis of MoTa Alloy for Gate Electrode Applications

TL;DR: In this article, the MoTa solid solution can achieve low work function values and is stable up to 900°C on SiO 2 under high-temperature anneals and no metal diffusion into substrate Si channel was detected.