Veena Misra

Abstract: We propose a novel approach towards building a low-power multi-material gas sensor array for E-nose applications via selective on-chip annealing of atomic layer deposited (ALD) multilayer metal oxide stacks. Thin heater membranes, arranged into crossbar arrays, can be used for selective on-chip annealing to convert ALD multilayer stacks into a variety of sensing surfaces that can empower E-nose machine learning for detection of variety of gases with desired specificity. This paper demonstrates the feasibility of this novel approach and utilizes pattern recognition algorithms to show a pathway to adapt this sensor platform for integration with CMOS/MEMS technologies.

TL;DR: In this article, a low pressure rapid thermal chemical vapor deposition (RTCVD) with silane (SiH[sub 4]), nitrous oxide (N[sub 2]O), and ammonia (NH[sub 3]) as reactive gases was used for thin silicon oxynitride (Si-N-O) films.

TL;DR: In this paper, the authors report that Al 2 O 3 on SiC can have D it levels similar to that of thermally oxidized SiC, thus stimulating the study of alternative dielectrics and processing.

TL;DR: Results indicate an increment in mean heart rate in three out of four test subjects when exposed to ozone and observe that changes inmean heart rate has a positive correlation with changes in lung function and a negative correlation withChanges in neutrophil count.

TL;DR: In this paper, a myriad of contamination interferences were identified and their effects on impactor debris identification mitigated during the course of this study, including pre-, post-and in-flight deposited particulate surface contaminants, as well as indigenous heterogeneous material contaminants.