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Veena Misra

Researcher at North Carolina State University

Publications -  251
Citations -  5283

Veena Misra is an academic researcher from North Carolina State University. The author has contributed to research in topics: Gate dielectric & Dielectric. The author has an hindex of 39, co-authored 249 publications receiving 4954 citations. Previous affiliations of Veena Misra include University of North Carolina at Chapel Hill & Motorola.

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Deposition of ultra-thin oxide dielectrics for MOSFETs by a combination of low-temperature plasma-assisted oxidation, and intermediate and high-temperature rapid thermal processing☆

TL;DR: In this paper, the important processing steps required for formation of ultra-thin gate oxides by thin film deposition as contrasted with conventional thermal oxidation, or the emerging technique of rapid thermal oxidation (RTO), are identified.
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Effects of LaSiO x Thickness and Forming Gas Anneal Temperature on Threshold Voltage Instability of 4H-SiC MOSFETs With LaSiO x

TL;DR: In this article, the effects of lanthanum-rich layer thickness and forming gas anneal (FGA) conditions on mobility and threshold voltage instability of high-mobility 4H-SiC MOSFETs using LaSiO x interface engineering were investigated.
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Control of Si-SiO2 Interface Properties in MOS Devices Prepared by Plasma-Assisted and Rapid Thermal Processes

TL;DR: In this paper, the preparation of silicon-based metal oxide semiconductor, MOS, devices, capacitors and field effect transistors, FETs, using deposited oxide dielectrics is described.
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A Systematic Approach of Understanding and Retaining Pmos Compatible Work Function of Metal Electrodes On HfO2 Gate Dielectrics

TL;DR: In this article, the surface work function of Ru and Re on MOS capacitors with Ru metal gates on HfO 2 gate dielectric was investigated and the results indicated that the oxygen content at metal/high-k interface plays an important role in governing the effective work function.