Journal ArticleDOI
Damping characteristics of beam-shaped micro-oscillators
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TLDR
In this article, the damping characteristics of beam-shaped microactuators that oscillate in the transverse direction are analyzed to establish a design method that minimizes energy consumption and increases dynamic performance.Abstract:
The damping characteristics of beam-shaped microactuators that oscillate in the transverse direction are analytically evaluated to establish a design method that minimizes energy consumption and increases dynamic performance. The damping force due to airflow is calculated using the Navier-Stokes equation, the accuracy of which is verified by comparing the calculated damping with experimental results. The contributions to the damping due to squeeze force, internal friction, and support loss are calculated by using the Reynolds equation, structural damping theory, and a two-dimensional theory of elasticity, respectively. The final formulae, obtained in simple and closed forms for easy use in the actual design process, are then used to evaluate the relationships between the beam size and the damping ratio of silicon cantilevers, Permalloy cantilevers, and Permalloy spiral springs. Finally, the step response of a Permalloy cantilever is calculated and the relationship between beam size and settling time is determined.read more
Citations
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Raman spectroscopy of graphene-based materials and its applications in related devices.
TL;DR: The essential Raman scattering processes of the entire first- and second-order modes in intrinsic graphene are described and the extensive capabilities of Raman spectroscopy for the investigation of the fundamental properties of graphene under external perturbations are described.
Journal ArticleDOI
Quality factors in micron- and submicron-thick cantilevers
TL;DR: In this article, measurements of the mechanical quality factor Q for arrays of silicon-nitride, polysilicon, and single-crystal silicon cantilevers have been obtained by studying the dependence of Q on cantilever material, geometry, and surface treatments.
Journal ArticleDOI
Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications
TL;DR: In this article, the basic operation principle for MEMS with wide band gap semiconductors is described, and the first applications of SiC based MEMS are demonstrated, and innovative MEMS and NEMS devices are reviewed.
Journal ArticleDOI
Energy dissipation in submicrometer thick single-crystal silicon cantilevers
TL;DR: In this article, four kinds of mechanical energy losses in ultrathin micro-cantilevers of 60 nm, 170 nm, and 500 nm in thickness were discussed: thermoelastic loss, air damping, support loss and surface loss.
Journal ArticleDOI
Hydrodynamics of oscillating atomic force microscopy cantilevers in viscous fluids
Abdelhamid Maali,Cedric Hurth,Rodolphe Boisgard,Cédric Jai,Touria Cohen-Bouhacina,Jean-Pierre Aimé +5 more
TL;DR: In this article, a study of thermal noise of commercially available atomic force microscopy (AFM) cantilevers in air and in water is presented, where the experimental results are compared to theoretical predictions from the hydrodynamic functions corresponding to rigid transverse oscillations of an infinitely long rectangular beam.
References
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Journal ArticleDOI
Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry
TL;DR: In this article, an experimental study of damping and frequency of vibrating small cantilever beams in their lowest eigenstate is presented, where the authors obtain design rules for sensors employing vibrating beams.
Proceedings ArticleDOI
Squeeze-film damping in solid-state accelerometers
TL;DR: In this paper, a finite-element technique is presented that essentially solves Reynold's equation for small displacements and squeeze numbers by analogy with heat conduction in a solid with internal heat generation.
Journal ArticleDOI
Viscous damping model for laterally oscillating microstructures
TL;DR: In this paper, the authors investigated the viscous energy loss in oscillating fluid-film dampers that provide frictional shear for laterally-driven planar microstructures.
Journal ArticleDOI
Electromagnetic microrelays: Concepts and fundamental characteristics
TL;DR: In this article, an electromagnetic microrelay is proposed as a practical application of microelectrochemical system (MEMS) technology and the basic performance of its key components is evaluated.
Journal ArticleDOI
A bending and stretching mode crystal oscillator as a friction vacuum gauge
TL;DR: In this paper, a simple model of the quartz oscillator is proposed and the equations of fluid mechanics are analytically solved based on this model, the results calculated show good agreement with the experimental data.