Journal ArticleDOI
Determination of Young's Modulus of Porous Low-k Films by Ellipsometric Porosimetry
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TLDR
In this article, a method for determination of Young's modulus (E) of thin porous films using data obtained by ellipsometric porosimetry (EP) is reported.Abstract:
A method for determination of Young's modulus (E) of thin porous films using data obtained by ellipsometric porosimetry (EP) is reported. The calculated E values are in good agreement with data obtained by nondestructive methods like surface acoustic wave spectroscopy (SAWS) and Brillouin light scattering (BLS). These three methods (SAWS, BLS, and EP) use different physical ideas for determination of Young's modulus. Good agreement among these data suggests that the obtained data are more realistic than data obtained by nanoindentation that gives remarkably larger E values. © 2002 The Electrochemical Society. All rights reserved.read more
Citations
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Low dielectric constant materials for microelectronics
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Porosity and Mechanical Properties of Mesoporous Thin Films Assessed by Environmental Ellipsometric Porosimetry
Cédric Boissière,David Grosso,Sophie Lepoutre,Lionel Nicole,and Aline Brunet Bruneau,Clément Sanchez +5 more
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Density functional theory model of adsorption on amorphous and microporous silica materials.
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The Behavior of Flexible MIL-53(Al) upon CH4 and CO2 Adsorption
Anne Boutin,François-Xavier Coudert,Marie Anne Springuel-Huet,Alexander V. Neimark,Gérard Férey,Alain H. Fuchs +5 more
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Adsorption-induced deformation of nanoporous materials—A review
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References
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Nanoindentation of polymers: an overview
TL;DR: A review of the application of instrumented indentation devices to the measurement of the elastic modulus of polymeric materials is reviewed in this paper, which includes a summary of traditional analyses of load-penetration data and a discussion of associated uncertainties.
Journal ArticleDOI
Influence of Cement Particle-Size Distribution on Early Age Autogenous Strains and Stresses in Cement-Based Materials
Dale P. Bentz,Ole Mejlhede Jensen,Kurt Kielsgaard Hansen,John Forbes Olesen,Henrik Stang,Claus J. Haecker +5 more
TL;DR: In this article, the influence of the size distribution of the cement particles on the induced autogenous deformation and stresses in cement pastes of identical water-to-cement ratios is examined for four different finenesses.
Journal ArticleDOI
Influence of water saturation on the nonlinear elastic mesoscopic response in Earth materials and the implications to the mechanism of nonlinearity
TL;DR: In this article, the authors illustrate evidence from several types of experiments indicating that fluid plays an important role in the nonlinear response of rocks, especially in rocks containing small pore systems.
Journal ArticleDOI
Nondestructive Determination of Pore Size Distribution in Thin Films Deposited on Solid Substrates
F. N. Dultsev,M. R. Baklanov +1 more
Journal ArticleDOI
Critical properties of nanoporous low dielectric constant films revealed by Brillouin light scattering and surface acoustic wave spectroscopy
TL;DR: In this article, Brillouin light scattering and surface acoustic wave spectroscopy are used to measure density, porosity and stiffness properties of nanoporous methylsilsesquioxane films of low-k value.