Journal ArticleDOI
Effect of chamber pressure and atmosphere on the microstructure and nanomechanical properties of amorphous carbon films prepared by pulsed laser deposition
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In this paper, the effect of chamber pressure and atmosphere on the microstructure and nanomechanical properties of amorphous carbon thin films prepared by pulsed laser deposition was investigated.Abstract:
We have investigated the effect of chamber pressure and atmosphere on the microstructure and nanomechanical properties of amorphous carbon thin films prepared by pulsed laser deposition. The amorphous carbon films were deposited in various atmospheres such as nitrogen and argon at different chamber pressures. We used Raman spectroscopy to study the bonding characteristics of the deposited amorphous carbon films. Atomic force microscopy and optical microscopy were utilized to observe the surface conditions and the microstructures of the deposited films. Nanoindentation measurements were carried out on various samples prepared under different conditions to study the effect of chamber pressure and atmosphere on the elastic modulus and nanohardness of the films. It was found that reduced vacuum leads to formation of amorphous carbon films with reduced elastic modulus and nanohardness. Amorphous carbon films prepared under higher chamber pressures exhibit an increased density of particulates and significantly ...read more
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Correlation between the sp2-phase nanostructure and the physical properties of unhydrogenated carbon nitride
Malek Tabbal,T. Christidis,Samih Isber,P. Mérel,M. A. El Khakani,Mohamed Chaker,A. Amassian,Ludvik Martinu +7 more
TL;DR: In this paper, the structural arrangement of the sp2 phase in amorphous unhydrogenated carbon nitride (a•CNx) films and its effect on their physical properties are investigated.
Journal ArticleDOI
Growth and structure of fullerene-like CNx thin films produced by pulsed laser ablation of graphite in nitrogen
TL;DR: In this article, the growth and structure of fullerene-like CNx films produced by laser ablation of graphite in low pressure nitrogen were investigated and the deposition conditions were selected based on investigations o...
Journal ArticleDOI
E-beam lithography and electrodeposition fabrication of thick nanostructured devices
T. N. Lo,Yu-Tung Chen,Yu-Tung Chen,C. W. Chiu,Chi-Jen Liu,Syue-Ren Wu,Syue-Ren Wu,I-Kuan Lin,C. I. Su,C. I. Su,W. D. Chang,W. D. Chang,Yeukuang Hwu,Yeukuang Hwu,Yeukuang Hwu,B. Y. Shew,C C Chiang,Jung Ho Je,Giorgio Margaritondo +18 more
TL;DR: A nanofabrication approach based on advanced e-beam lithography and electrodeposition successfully produced high-resolution (≈40nm line width) metal structures with high aspect ratio (>12) and high density as mentioned in this paper.
Journal ArticleDOI
Microstructure evolution of Al-Mg-B thin films by thermal annealing
Yun Tian,Alan P. Constant,Chester C.H. Lo,James W. Anderegg,Alan M. Russell,John Evan Snyder,Palaniappa A. Molian +6 more
TL;DR: In this article, the growth of Al-Mg-B thin films on SiO2/Si(100) substrates was performed by nanosecond pulsed laser deposition at three different substrate temperatures (300 K, 573 K, and 873 K).
Journal ArticleDOI
Effect of nitrogen content on mechanical properties and tribological behaviors of hydrogenated amorphous carbon films prepared by ion beam assisted chemical vapor deposition
TL;DR: In this paper, the authors examined the effect of the nitrogen content in the coating films and found that the addition of nitrogen to the coating film lowers the nanohardness, irrespective of the content.
References
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Fast intensified‐CCD photography of YBa2Cu3O7−x laser ablation in vacuum and ambient oxygen
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