Journal ArticleDOI
Electrothermally activated SU-8 microgripper for single cell manipulation in solution
Nikos Chronis,Luke P. Lee +1 more
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In this paper, the SU-8-based micro gripper that can operate in physiological ionic solutions is presented, which consists of two "hot-and-cold" arm actuators that are fabricated in a two-mask surface micromachining process.Abstract:
The development of a SU-8-based microgripper that can operate in physiological ionic solutions is presented The electrothermally activated polymer gripper consists of two "hot-and-cold-arm" actuators that are fabricated in a two-mask surface micromachining process The high thermal expansion coefficient of SU-8 (52 ppm//spl deg/C) compared to silicon and metals, allows the actuation of the microgripper with small average temperature elevations (10 - 32/spl deg/C) at low voltages (1-2 V) The polymer microgripper can be used for the manipulation of single cells and other biological species in solution with minimal undesired interactionsread more
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A survey of robotic caging and its applications
Satoshi Makita,Weiwei Wan +1 more
TL;DR: This paper reviews the robotic literature related to caging ranging from its historical background, state-of-the-art developments, to practical applications, and provides insights on some open problems and promising research and application directions.
Journal ArticleDOI
Force-Controlled MEMS Rotary Microgripper
TL;DR: In this paper, a force-controlled microelectromechanical system rotary micro gripper with integrated electrothermal sensors is presented, where the controller counteracts the input disturbance (contact force) and an integrated EH sensor provides a feedback signal to close the control loop.
Journal ArticleDOI
State of the art: micro-nanorobotic manipulation in single cell analysis
Yajing Shen,Toshio Fukuda +1 more
TL;DR: In this paper, the state of the art of micro-nanorobotic manipulation in single cell analysis is reviewed from the aspects of actuating, sensing, controlling, system integration, and commercialization.
Journal ArticleDOI
Microactuators of free-standing TiNiCu films
TL;DR: In this paper, a two-way shape memory effect is attributed to a composition gradient through the film thickness, and different types of TiNiCu microactuators, including microtweezers and microcages, have been successfully fabricated.
Journal ArticleDOI
Compliant, Heterogeneously Integrated GaAs Micro‐VCSELs towards Wearable and Implantable Integrated Optoelectronics Platforms
Dongseok Kang,Sung-Min Lee,Zhengwei Li,Ashkan Seyedi,John D. O'Brien,Jianliang Xiao,Jongseung Yoon +6 more
TL;DR: In this article, materials design and fabrication strategies are presented to overcome the limitations of conventional VCSELs and create new application opportunities that are unavailable with existing technologies, including large-scale, programmable assemblies on unusual substrates, hybrid integration with dissimilar materials and devices, or mechanically compliant constructions.
References
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Journal ArticleDOI
Optical trapping and manipulation of neutral particles using lasers
TL;DR: Early developments in the field leading to the demonstration of cooling and trapping of neutral atoms in atomic physics and to the first use of optical tweezers traps in biology are reviewed.
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SU-8: a low-cost negative resist for MEMS
TL;DR: In this paper, the characterization of a home-made negative photoresist developed by IBM is described, called SU-8, which can be produced with commercially available materials and has an outstanding aspect ratio near 15 for lines and 10 for trenches, combined with the electroplating of copper allow the fabrication of highly integrated electromagnetic coils.
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Microfabricating Conjugated Polymer Actuators
TL;DR: The current status of polypyrrole-gold bilayer actuators that bend out of the plane of the wafer have been microfabricated in the laboratory, outlining the methods used to fabricate them.
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Biocompatibility and biofouling of MEMS drug delivery devices
Gabriela Voskerician,Matthew S. Shive,Rebecca S. Shawgo,Horst A. von Recum,James M. Anderson,Michael J. Cima,Robert Langer +6 more
TL;DR: These analyses identified the MEMS component materials, gold, silicon nitride, silicon dioxide, SU-8(TM), and silicon as biocompatible, with gold and silicon showing reduced biofouling.
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Microrobots for micrometer-size objects in aqueous media: potential tools for single-cell manipulation
TL;DR: A fabrication method for creating individually addressable and controllable polypyrrole-gold microactuators was developed, and a micrometer-size manipulator, or microrobotic arm, was fabricated, making the micRORobot an excellent tool for single-cell manipulation.