Journal ArticleDOI
Enhanced mechanical performance of AlN/nanodiamond micro-resonators
N. Heidrich,D. Iankov,Jakob Hees,Wilfried Pletschen,R. E. Sah,Lutz Kirste,Verena Zuerbig,Christoph E. Nebel,Oliver Ambacher,Oliver Ambacher,Vadim Lebedev +10 more
TLDR
In this article, single and doubly clamped unimorph NCD-on-AlN micro-resonators were fabricated and then characterized by laser vibrometry towards their flexural resonant frequencies in the range of 0.1-20 MHz to deduce their mechanical properties.Abstract:
Micro electromechanical systems are a matter of intense research pursuing to replace silicon and III–V semiconductor-based components in prospective radio frequency communication devices. Due to their unique material properties, microstructures combining doped nano-crystalline diamond (NCD) and AlN thin films are promising for piezo-actuated microsystems in order to increase operating frequencies. In this work, single and doubly clamped unimorph NCD-on-AlN micro-resonators were fabricated and then characterized by laser vibrometry towards their flexural resonant frequencies in the range of 0.1–20 MHz to deduce their mechanical properties. Enhancements in the structural properties of an AlN piezo-actuator united with an advanced elasticity of nano-diamond electrode lead to superior mechanical parameters of the resulting unimorphs. These allow for the fabrication of flexural resonant microsystems with a potential to extend the operating frequencies well above 1 GHz.read more
Citations
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Journal ArticleDOI
Microstructure and mechanical properties of stress-tailored piezoelectric AlN thin films for electro-acoustic devices
Markus Reusch,Markus Reusch,Sabina Cherneva,Yuan Lu,Agnė Žukauskaitė,Lutz Kirste,Katarzyna Holc,Maria Datcheva,Dimitar Stoychev,Vadim Lebedev,Oliver Ambacher,Oliver Ambacher +11 more
TL;DR: In this paper, the intrinsic stress gradient caused by the growing inplane grain size along film thickness was minimized by increasing the N 2 concentration in the Ar/N 2 gas mixture during the growth process.
Journal ArticleDOI
Inkjet-Printed High-Q Nanocrystalline Diamond Resonators
André F. Sartori,Pierpaolo Belardinelli,Robin J. Dolleman,Peter G. Steeneken,Murali Krishna Ghatkesar,Josephus Gerardus Buijnsters +5 more
TL;DR: This work demonstrates the fabrication of functional high-performance diamond-based micro-sensors by direct inkjet printing, outperforming many similar devices produced by traditional top-down, lithography-based techniques.
Journal ArticleDOI
Selective area deposition of diamond films on AlGaN/GaN heterostructures
TL;DR: In this article, a selective area diamond deposition on AlGaN/GaN layers focusing on the elimination of surface and metal contact damage (Ni, NiO, Ir, and IrO2) and suppressing the spontaneous nucleation of diamond was presented.
Journal ArticleDOI
Analysis and optimization of sputter deposited AlN-layers for flexural plate wave devices
Markus Reusch,Katarzyna Holc,Wilfried Pletschen,Lutz Kirste,Agnė Žukauskaitė,Taro Yoshikawa,D. Iankov,Oliver Ambacher,Vadim Lebedev +8 more
TL;DR: In this article, the influence of process pressure and N2 concentration has been evaluated by means of spectroscopic ellipsometry, residual stress measurements, xray diffraction, atomic and piezoresponse force microscopy, along with analysis of the piezoelectric charge coefficient d33,f.
Journal ArticleDOI
Si-based MEMS resonant sensor: A review from microfabrication perspective
TL;DR: In this paper, a detailed discussion has been carried out to understand critical steps involved in the fabrication of the silicon-based MEMS resonator and some challenges starting from the materials' selection to the final phase of obtaining a compact MEMS resonance device for its fabrication have been explored critically.
References
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