Extreme Ultraviolet and Soft X-Ray Diffraction Efficiency of a Blazed Reflection Grating Fabricated by Thermally Activated Selective Topography Equilibration
TLDR
In this paper, a mold for a reflection grating with a periodicity of 400 nm and grooves resembling an asymmetric sawtooth was patterned in 130 nm thick poly(methyl methacrylate) resist on a silicon substrate over a 50 mm by 7.5 mm area.Abstract:
Future observatories utilizing reflection grating spectrometers for extreme ultraviolet (EUV) and soft X-ray (SXR) spectroscopy require high-fidelity gratings with both blazed groove facets and custom groove layouts that are often fanned or feature a slight curvature. While fabrication procedures centering on wet anisotropic etching in monocrystalline silicon produce highly efficient blazed gratings, the precision of a nonparallel groove layout is limited by the cubic structure of the silicon crystal. This motivates the pursuit of alternative techniques to grating manufacture, namely thermally activated selective topography equilibration (TASTE), which uses gray-scale electron-beam lithography to pattern multilevel structures in resist followed by an optimized polymer thermal reflow to smooth the 3D patterns into continuous surface relief profiles. Using TASTE, a mold for a reflection grating with a periodicity of 400 nm and grooves resembling an asymmetric sawtooth was patterned in 130 nm thick poly(methyl methacrylate) resist on a silicon substrate over a 50 mm by 7.5 mm area. This structure was coated with 15 nm of gold by electron-beam physical vapor deposition using titanium as an adhesion layer and then tested for EUV and SXR diffraction efficiency at beamline 6.3.2 of the Advanced Light Source synchrotron facility. Results demonstrate a quasi-blaze response characteristic of a 27 degree blaze angle with groove facets smooth to 1.5 nm rms. Absolute peak-order efficiency ranges from 75% to 25%, while total relative efficiency measures gap90% across the measured bandpass of 15.5 nm > lambda > 1.55 nm.read more
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Thriving artificial underwater drag-reduction materials inspired from aquatic animals: progresses and challenges
TL;DR: In this paper, a review of the research on drag-reduction surfaces inspired by aquatic animals, including sharks, dolphins, and other aquatic animals is presented, with a discussion on the drag reduction mechanism and drag reduction effect to understand the development of underwater drag reduction.
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A Review on Fabrication of Blazed Gratings
TL;DR: In this paper, the physical principles of blazed gratings, specific approaches and the achievements of typical processing methods, including mechanical ruling, holographic ion beam etching, electron beam lithography, wet etching etc.
Proceedings ArticleDOI
Fabrication of custom astronomical gratings for the extreme and far ultraviolet bandpasses
Fabien Grisé,Nicholas Kruczek,Brian Fleming,Randall L. McEntaffer,Drew M. Miles,Chad Eichfeld,Michael LaBella +6 more
TL;DR: In this article, the ESCAPE NASA Small Explorer (Univ. of Colorado/Boulder) was used to write straight grooves on a spherically curved substrate for the DEUCE sounding rocket payload.
Journal ArticleDOI
Limiting Spectral Resolution of a Reflection Grating Made via Electron-Beam Lithography
Casey T. DeRoo,Jared Termini,Fabien Grisé,Randall L. McEntaffer,Benjamin D. Donovan,Chad Eichfeld +5 more
TL;DR: In this article, a 1.5 mm thick, 1000 nm period at grating using electron-beam lithography (EBL), a promising lithographic technique for patterning gratings for future astronomical observatories, is presented.
Journal ArticleDOI
Limiting Spectral Resolution of a Reflection Grating Made via Electron-beam Lithography
Casey T. DeRoo,Jared Termini,Fabien Grisé,Randall L. McEntaffer,Benjamin D. Donovan,Chad Eichfeld +5 more
TL;DR: In this paper, a 1.5 mm thick, 1000 nm period at grating using electron-beam lithography (EBL), a promising lithographic technique for patterning gratings for future astronomical observatories, is presented.
References
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The Reflection Grating Spectrometer on board XMM-Newton
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