Journal ArticleDOI
Fabrication and Electrical Properties of Lead Zirconate Titanate Thick Films
H. Daniel Chen,K. R. Udayakumar,Christopher J. Gaskey,L. Eric Cross,Jonathan J. Bernstein,Lance C. Niles +5 more
TLDR
In this article, the thickness dependence of film structure and the dielectric, ferroelectric, and piezoelectric properties have been characterized over the thickness range of 1-12 μm.Abstract:
Thick films of lead zirconate titanate of the morphotropic phase boundary composition, Pb(Zr0.52Ti0.48)O3, have been fabricated on platinum-buffered silicon using a modified sol–gel spin-coating technique. Crack-free films of 12-μm thickness can be uniformly deposited on 3-in.-diameter wafers with high yield and properties comparable to those of bulk ceramics. The thickness dependence of film structure and the dielectric, ferroelectric, and piezoelectric properties have been characterized over the thickness range of 1–12 μm. A strong (100) texture develops as film thickness increases above 5 μm; the films were marked by saturation values of longitudinal piezoelectric coefficient d33, 340 pC/N; remanent polarization, 27 μC/cm2; and dielectric permittivity, 1450. PZT films in this thickness range are extremely well-suited to application as electromechanical transduction media in silicon-based microelectromechanical systems (MEMS).read more
Citations
More filters
Journal ArticleDOI
A comprehensive review on the progress of lead zirconate-based antiferroelectric materials
TL;DR: In this paper, a review of PZ-based AFE materials is presented, focusing on the external field (electric field, hydrostatic pressure and temperature) dependences of the AFE-FE phase transition, with a specific attention to the performances of AFE films for various potential applications, such as high energy storage, electric field induced strains, pyroelectric effect and electrocaloric effect.
Journal ArticleDOI
New materials for micro-scale sensors and actuators An engineering review
Stephen A. Wilson,Renaud Jourdain,Qi Zhang,Robert A. Dorey,Christopher R. Bowen,Magnus Willander,Qamar Ul Wahab,Safaa Al-Hilli,Omer Nur,Eckhard Quandt,Christer Johansson,E. Pagounis,Manfred Kohl,Jovan Matovic,Björn Samel,Wouter van der Wijngaart,Edwin Jager,Daniel O Carlsson,Zoran Djinovic,Michael Wegener,Carmen Moldovan,Rodica Iosub,E. Abad,Michael Wendlandt,Cristina Rusu,Katrin Persson +25 more
TL;DR: In this paper, a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices is provided. And a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology is presented.
Journal ArticleDOI
Room Temperature Impact Consolidation (RTIC) of Fine Ceramic Powder by Aerosol Deposition Method and Applications to Microdevices
TL;DR: In this article, the advantages of the aerosol deposition (AD) method are highlighted by realizing a comparison with conventional thin-film methods and thermal spray technology, and examples of integration of AD method in the fabrication of electronic components are also given to show the easiness in usage and in integration of this method in device process flow.
Journal ArticleDOI
PZT thin films for microsensors and actuators: Where do we stand?
TL;DR: This paper reviews deposition, integration, and device fabrication of PbZr/sub x/Ti/sub 1-x/O/sub 3/ (PZT) films for applications in micro-electromechanical systems and some preliminary conclusions are presented.
Journal ArticleDOI
Microstructure and Electrical Properties of Lead Zirconate Titanate (Pb(Zr52/Ti48)O3) Thick Films Deposited by Aerosol Deposition Method
Jun Akedo,Maxim Lebedev +1 more
TL;DR: In this paper, the microstructure and chemical composition of lead zirconate titanate (PZT) films were investigated by transmission electron microscopy (TEM) and energy dispersive X-ray spectra (EDX) analysis.
References
More filters
Journal ArticleDOI
Preparation of Pb(Zr,Ti)O3 thin films by sol gel processing: Electrical, optical, and electro‐optic properties
Guanghua Yi,Z. Wu,Michael Sayer +2 more
TL;DR: In this article, a crack-free transparent ferroelectric polycrystalline Pb(Zr,Ti)O3 thin films were prepared by spin-coating solutions of complex alkoxides.
Journal ArticleDOI
Chemical aspects of solution routes to perovskite-phase mixed-metal oxides from metal-organic precursors
TL;DR: In this article, a review of the reaction chemistry occurring in solution routes to multicomponent metal oxides from metal-organic precursors is presented, with specific attention on those reports where mechanistic insight is presented.
Journal ArticleDOI
Dielectric Breakdown of Porous Ceramics
Robert Gerson,Thomas C. Marshall +1 more
TL;DR: In this article, a statistical approach is used to determine the effect of porosity in ceramic materials on their dielectric breakdown strength, which is in good agreement with the experimental data for lead zirconate titanate ceramics.
Book
Introduction to the Theory and Design of Sonar Transducers
TL;DR: In this paper, a complete treatment of the fundamentals of transducer theory and the existing literature in the naval postgraduate school is provided, with a new reference as reader towards further.
Related Papers (5)
Characterization of thick lead zirconate titanate films fabricated using a new sol gel based process
Preparation of Pb(Zr,Ti)O3 thin films by sol gel processing: Electrical, optical, and electro‐optic properties
Guanghua Yi,Z. Wu,Michael Sayer +2 more