Journal ArticleDOI
Low-energy ion scattering at surfaces
TLDR
The field of low-energy ion scattering for surface interactions at metals, alloys, catalysts and semiconductors is reviewed in this article, where the basic principles, classical scattering theory, the effect of shadowing and blocking, and some of the computer simulation programs are briefly described.About:
This article is published in Surface Science Reports.The article was published on 1993-05-01. It has received 531 citations till now. The article focuses on the topics: Low-energy ion scattering & Scattering.read more
Citations
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Journal ArticleDOI
Thermal Atomic Layer Etching of Silica and Alumina Thin Films Using Trimethylaluminum with Hydrogen Fluoride or Fluoroform.
Rezwanur Rahman,Eric C. Mattson,Joseph P. Klesko,Aaron Dangerfield,Sandrine Rivillon-Amy,David Charles Smith,Dennis M. Hausmann,Yves J. Chabal +7 more
TL;DR: This work investigates the feasibility of using fluoroform (CHF3) with TMA for the thermal ALE of SiO2 and Al2O3 surfaces and compares it to the established TMA/HF process, and presents a novel method to remove the residual fluorine accumulated during the ALE process by exposure to water vapor.
Journal ArticleDOI
Atomic transport and integrity of Al2O3(2.0nm)∕HfO2(2.5nm) gate stacks on Si
TL;DR: In this article, the structural integrity of Al2O3(2.0nm)∕HfO2( 2.5nm) ∕SiO2 (<1nm) ∼Si(001) stacks after rapid thermal annealing at temperature up to 1025°C was investigated.
Journal ArticleDOI
Calculation of Auger-neutralization probabilities for He+-ions in LEIS
TL;DR: In this article, an existent theory on Auger-neutralization (based on a Linear Combination of Atomic Orbitals) is adapted to the LEIS geometry, and the ion survival probability is calculated and compared to measurements.
Journal ArticleDOI
Stacking and structure of platinum on Cu (1 1 1) up to five monolayers
TL;DR: In this paper, a quantitative investigation of the stacking and structure of ultrathin films of Pt deposited on a Cu (1 1/1) surface has been carried out by a combination of real space low energy ion scattering (LEIS) and low energy electron diffraction (LEED) techniques.
Journal ArticleDOI
Trajectory resolved analysis of LEIS energy spectra: Neutralization and surface structure
R. Beikler,Edmund Taglauer +1 more
TL;DR: In this article, the authors analyzed scattered ion energy spectra by using the computer code MARLOWE for which they developed a new analysis routine that allows to record energy distributions in dependence of the number of projectile-target atom collisions, in dependence in the distance of closest approach, or in dependence on the scattering crystalline layer.
References
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Book
Practical surface analysis: By auger and x-ray photoelectron spectroscopy
David Briggs,M. P. Seah +1 more
Journal ArticleDOI
Surface studies by scanning tunneling microscopy
TL;DR: In this paper, surface microscopy using vacuum tunneling has been demonstrated for the first time, and topographic pictures of surfaces on an atomic scale have been obtained for CaIrSn 4 and Au.
Journal ArticleDOI
A Monte Carlo computer program for the transport of energetic ions in amorphous targets
J.P. Biersack,L.G. Haggmark +1 more
TL;DR: In this article, a Monte Carlo computer program was developed for determining ion range and damage distributions as well as angular and energy distributions of backscattered and transmitted ions in amorphous targets.
Book
The theory of atomic collisions
TL;DR: The perturbation theory has been applied to many-body problems and applications, such as electron collisions with atoms, collisions between atomic systems, nuclear collisions, and certain aspects of two-body systems under relativistic collisions.