Journal ArticleDOI
Mechanical and structural properties of RF magnetron sputter-deposited silicon carbide films for MEMS applications
TLDR
In this paper, the authors reported preparation and characterization of silicon carbide (SiC) films obtained by RF magnetron sputtering using a SiC ceramic target, and the residual stress of the films was measured as a function of sputtering parameters.Abstract:
In the present work, we report preparation and characterization of silicon carbide (SiC) films obtained by RF magnetron sputtering using a SiC ceramic target. The films were deposited in Ar ambient without external substrate heating. The residual stress of the films was measured as a function of sputtering parameters. The stress of the as-deposited films was observed to be compressive for the entire range of sputtering parameters used in the present work. Postdeposition annealing at 400 ?C in N2?ambient was useful in reducing the stress in the films. On sequentially annealing the films at higher temperatures (600 and 800 ?C), the nature of the stress changed from low compressive to high tensile. A superhard SiC film with low residual compressive stress (58.7 MPa) was obtained with hardness and Young's modulus values of 49.86 GPa and 363.75 GPa respectively. The x-ray diffraction pattern revealed that the films were either amorphous or nano-crystalline, depending on the deposition parameters and postdeposition annealing temperature. Atomic force microscopy roughness results confirmed good chemical stability of the films in potassium hydroxide and buffered hydrofluoric acid solutions. Several types of micro-structures were fabricated to demonstrate the feasibility and compatibility of these films in MEMS fabrication.read more
Citations
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Journal ArticleDOI
Carbon thin-films/SiOx nanowires complex using a polyvinylchloride (PVC) solution for lithium-ion batteries
TL;DR: Carbon thin-films/SiO x nanowires were fabricated by combining a simple electrospinning process combined with a carbon heat treatment method using a polyvinylchloride (PVC) solution as organic precursor.
Journal ArticleDOI
A facile in situ synthesis of SiC&Si@CNT composite 3D frameworks as an anode material for lithium-ion batteries
TL;DR: The results suggest that the SiC&Si@CNT composite 3D frameworks can be used as appropriate anode materials for lithium-ion batteries.
Journal ArticleDOI
Effect of RF power and gas flow ratio on the growth and morphology of the PECVD SiC thin film s for MEMS applications
TL;DR: In this article, the authors used the CH4 and SiH4 as the precursor gases in presence of Ar as the carrier gas and two process parameters i.e. RF power with mixed frequency condition and flow ratio of silane to methane were varied by keeping the temperature and pressure constant to investigate the influence of these parameters on the growth rate, surface roughness and morphology of SiC thin films.
DissertationDOI
Study, Modelling and Implementation of the Level Set Method Used in Micromachining Processes
TL;DR: The main topic of the present thesis is the improvement of fabrication processes simulation by means of the Level Set (LS) method, focused on wet and dry etching processes, which are widely used in the micromachining process of Micro-Electro-Mechanical Systems (MEMS).
Journal ArticleDOI
Pulsed laser deposition of nanocrystalline SiC films
Gabriel Socol,Aurelian Catalin Galca,Doina Craciun,M. Hanna,Curtis R. Taylor,Eric Lambers,Valentin Craciun +6 more
TL;DR: In this article, thin SiC films were grown on (1 − 0 − 0) Si substrates at temperatures from 400 to 1000 °C under various CH 4 pressures by the pulsed laser deposition (PLD) technique using a KrF excimer laser.
References
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Journal ArticleDOI
The Tension of Metallic Films Deposited by Electrolysis
TL;DR: It is well known that metallic films deposited electrolytically are in many cases liable to peel off if deposited to any considerable thickness as discussed by the authors, especially if it does not adhere very tightly to the body on which it is deposited.
Journal ArticleDOI
Effects of the substrate on the determination of thin film mechanical properties by nanoindentation
Ranjana Saha,William D. Nix +1 more
TL;DR: In this paper, the effects of the substrate on the determination of mechanical properties of thin films by nanoindentation were examined, and the properties of aluminum and tungsten films on the following substrates: aluminum, glass, silicon and sapphire.
Journal ArticleDOI
Silicon carbide as a new MEMS technology
TL;DR: Silicon carbide (SiC) is a material with very attractive properties for microsystems applications as discussed by the authors, its mechanical strength, high thermal conductivity, ability to operate at high temperatures and extreme chemical inertness in several liquid electrolytes, make SiC an attractive candidate for MEMS applications, both as structural material and as coating layer.
Journal ArticleDOI
Silicon carbide MEMS for harsh environments
TL;DR: In this paper, a review of silicon carbide for microelectromechanical systems (SiC MEMS) is presented, where current efforts in developing SiC MEMs to extend the silicon-based MEMS technology to applications in harsh environments are discussed.
Journal ArticleDOI
SiC MEMS: Opportunities and challenges for applications in harsh environments
TL;DR: In this paper, a review of recent advancements in areas that are critical to the establishment of a SiC MEMS technology is presented, focusing on the material and processing aspects of SiC fabrication.