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Patent

Semiconductor structure and method for manufacturing the same

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TLDR
In this article, a method for manufacturing a semiconductor structure, comprising of a mask layer to cover the metal interconnect liners and forming openings, which expose the metal internals on the mask layer, is presented.
Abstract
The present invention provides a method for manufacturing a semiconductor structure, comprising: a) forming metal interconnect liners on a substrate; b) forming a mask layer to cover the metal interconnect liners and forming openings, which expose the metal interconnect liners, on the mask layer; c) etching and disconnecting the metal interconnect liners via the openings, thereby insulating and isolating the metal interconnect liners. The present invention further provides a semiconductor structure, which comprises a substrate and metal interconnect liners, wherein ends of the metal interconnect liners are disconnected by insulating walls formed within the substrate. The structure and the method provided by the present invention are favorable for shortening distance between ends of adjacent metal interconnect liners, saving device area and suppressing short circuits happening to metal interconnect liners.

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Extremely Thin Semiconductor-On-Insulator (ETSOI) FET With A Back Gate and Reduced Parasitic Capacitance And Method of Forming The Same

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References
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Book

Chemical Mechanical Planarization of Microelectronic Materials

TL;DR: In this article, historical perspective CMP: variables and manipulations electrochemical and mechanical concepts for CMP processes copper CMP CMP of other materials post CMP cleaning, and a discussion of the relationship between CMP and manipulation.
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System comprising a semiconductor device and structure

TL;DR: In this article, a system includes a semiconductor device consisting of a first single crystal silicon layer comprising first transistors, first alignment marks, and at least one metal layer overlying the first single-crystalline silicon layer.
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High density data storage using stacked wafers

TL;DR: In this paper, a solid-state memory unit is constructed using stacked wafers containing a large number of memory units in each wafer, and vertical connections between them are created using bumps at the contact points and metal in through-holes aligned with the bumps.
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Semiconductor device and method of fabricating the same

TL;DR: In this article, a tensile tensile stress is formed on the substrate to relax a compressive stress existing in the channel region, and the second nitride layer having actual compressive stresses is formed to cover the p-channel MOSFET.
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Lattice-Mismatched Semiconductor Structures with Reduced Dislocation Defect Densities and Related Methods for Device Fabrication

TL;DR: In this paper, the fabrication of monolithic lattice-mismatched semiconductor heterostructures with limited area regions having upper portions substantially exhausted of threading dislocations is discussed.