Journal ArticleDOI
A review of nanometer resolution position sensors: Operation and performance
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TLDR
In this paper, the authors define concise performance metrics and provide exact and approximate expressions for error sources including nonlinearity, drift and noise for position sensors with nanometer resolution, including resistive, piezoelectric and piezoresistive strain sensors.Abstract:
Position sensors with nanometer resolution are a key component of many precision imaging and fabrication machines. Since the sensor characteristics can define the linearity, resolution and speed of the machine, the sensor performance is a foremost consideration. The first goal of this article is to define concise performance metrics and to provide exact and approximate expressions for error sources including non-linearity, drift and noise. The second goal is to review current position sensor technologies and to compare their performance. The sensors considered include: resistive, piezoelectric and piezoresistive strain sensors; capacitive sensors; electrothermal sensors; eddy current sensors; linear variable displacement transformers; interferometers; and linear encoders.read more
Citations
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Journal ArticleDOI
Comparative experiments regarding approaches to feedforward hysteresis compensation for piezoceramic actuators
Guoying Gu,Li-Min Zhu +1 more
TL;DR: In this paper, the authors compared three different feed-forward hysteresis compensation approaches to compensate the nonlinearity of piezoceramic actuators in micro/nano-positioning applications.
Journal ArticleDOI
Improved Extended Kalman Filter Estimation Using Threshold Signal Detection With an MEMS Electrostatic Microscanner
TL;DR: A threshold signal detector is proposed to improve the state estimation accuracy of an extended Kalman filter (EKF) and is validated experimentally with a microelectromechanical system electrostatic microscanner.
Journal ArticleDOI
Displacement Measurement With a Self-Sensing MEMS Electrostatic Drive
TL;DR: In this article, a simultaneous actuation and displacement sensing technique applied to a microelectromechanical system (MEMS) electrostatic drive is presented, where the displacement sensing is performed with capacitive measurement implemented by incorporating the drive into an LC oscillator, providing the mapping from displacement-to-capacitance to frequency-tovoltage.
Journal ArticleDOI
A balance for dark matter bound states
TL;DR: In this paper, the existence of bound states with ordinary matter, for a similar Dark Matter candidate with not negligible interactions, is considered, with binding energy larger than ∼ 1meV.
Journal ArticleDOI
Highly accurate, absolute optical encoder using a hybrid-positioning method.
TL;DR: High-quality sinusoidal signals of grating interferometry are used to accurately locate the marks on the scale grating, with stable 100-subdivision phase information.
References
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TL;DR: In this paper, the Discrete Kalman Filter (DFL) is used for smoothing and prediction linearization in the Global Positioning System (GPS) and a case study is presented.
Journal ArticleDOI
Piezoresistance Effect in Germanium and Silicon
TL;DR: In this article, the complete tensor piezoresistance has been determined experimentally for these materials and expressed in terms of the pressure coefficient of resistivity and two simple shear coefficients.
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Micromachined Transducers Sourcebook
TL;DR: In this paper, the authors present an overview of Micromachining Techniques, Mechanical Transducers, Optical Transducers and Ionizing Radiation Transducers for Microfluidic Devices.
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A Survey of Control Issues in Nanopositioning
TL;DR: This paper presents an overview of nanopositioning technologies and devices emphasizing the key role of advanced control techniques in improving precision, accuracy, and speed of operation of these systems.
Journal ArticleDOI
Review: Semiconductor Piezoresistance for Microsystems
TL;DR: This paper provides a comprehensive overview of integrated piezoresistor technology with an introduction to the physics of Piezoresistivity, process and material selection and design guidance useful to researchers and device engineers.