Journal ArticleDOI
A review of nanometer resolution position sensors: Operation and performance
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TLDR
In this paper, the authors define concise performance metrics and provide exact and approximate expressions for error sources including nonlinearity, drift and noise for position sensors with nanometer resolution, including resistive, piezoelectric and piezoresistive strain sensors.Abstract:
Position sensors with nanometer resolution are a key component of many precision imaging and fabrication machines. Since the sensor characteristics can define the linearity, resolution and speed of the machine, the sensor performance is a foremost consideration. The first goal of this article is to define concise performance metrics and to provide exact and approximate expressions for error sources including non-linearity, drift and noise. The second goal is to review current position sensor technologies and to compare their performance. The sensors considered include: resistive, piezoelectric and piezoresistive strain sensors; capacitive sensors; electrothermal sensors; eddy current sensors; linear variable displacement transformers; interferometers; and linear encoders.read more
Citations
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On-chip capacitive sensing and tilting motion estimation of a micro-stage for in situ MEMS gyroscope calibration
TL;DR: In this article, a novel on-chip capacitive sensor design and a motion estimation method for measuring multi-axis out-of-plane tilting motion of a micro-stage that is used for in situ calibration of an integrated MEMS gyroscope is introduced.
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Vibration isolator carrying atomic force microscope’s head
TL;DR: In this paper, a vibration isolation system that actively positions the head of an atomic force microscope (AFM) to maintain the vertical distance to the sample is proposed for high-resolution imaging in harsh environments.
Journal ArticleDOI
Absolute Position Sensing Based on a Robust Differential Capacitive Sensor with a Grounded Shield Window
Yang Bai,Yunfeng Lu,Pengcheng Hu,Gang Wang,Jinxin Xu,Tao Zeng,Zhengkun Li,Zhonghua Zhang,Jiubin Tan +8 more
TL;DR: A simple differential capacitive sensor is provided in this paper to measure the absolute positions of length measuring systems by utilizing a shield window inside the differential capacitor, and it has a sensitivity of 2 × 10−4 pF/μm with 0.08 μm resolution.
Journal ArticleDOI
Review of Fiber Optic Displacement Sensors
TL;DR: In this paper , the authors present a review of the advanced fiber optic displacement sensing techniques that have been developed in the past two decades and discuss challenges and perspectives on future research in the development of practical and high-temperature tolerant displacement sensors.
Journal ArticleDOI
Piezoelectric actuators with integrated high-voltage power electronics
Yuen Kuan Yong,Andrew J. Fleming +1 more
TL;DR: In this paper, the authors explored the possibility of piezoelectric actuators with integrated high-voltage power electronics, and compared the thermal impedance of a bender with laminated miniature power electronics.
References
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TL;DR: This paper presents an overview of nanopositioning technologies and devices emphasizing the key role of advanced control techniques in improving precision, accuracy, and speed of operation of these systems.
Journal ArticleDOI
Review: Semiconductor Piezoresistance for Microsystems
TL;DR: This paper provides a comprehensive overview of integrated piezoresistor technology with an introduction to the physics of Piezoresistivity, process and material selection and design guidance useful to researchers and device engineers.