Journal ArticleDOI
A review of nanometer resolution position sensors: Operation and performance
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TLDR
In this paper, the authors define concise performance metrics and provide exact and approximate expressions for error sources including nonlinearity, drift and noise for position sensors with nanometer resolution, including resistive, piezoelectric and piezoresistive strain sensors.Abstract:
Position sensors with nanometer resolution are a key component of many precision imaging and fabrication machines. Since the sensor characteristics can define the linearity, resolution and speed of the machine, the sensor performance is a foremost consideration. The first goal of this article is to define concise performance metrics and to provide exact and approximate expressions for error sources including non-linearity, drift and noise. The second goal is to review current position sensor technologies and to compare their performance. The sensors considered include: resistive, piezoelectric and piezoresistive strain sensors; capacitive sensors; electrothermal sensors; eddy current sensors; linear variable displacement transformers; interferometers; and linear encoders.read more
Citations
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Proceedings ArticleDOI
Robust design of a 3D- and inkjet-printed capacitive force/pressure sensor
Lisa-Marie Faller,Hubert Zangl +1 more
TL;DR: In this article, a robust design of a capacitive force/pressure sensor, manufactured in a rapid prototyping manner, by adaptation of the electrode structure is presented, which aims at minimizing the influence of topology and geometry variations as well as measurement noise on the sensor readout.
Proceedings ArticleDOI
Surface-height measurement noise in interference microscopy
Peter J. de Groot,Jack DiSciacca +1 more
TL;DR: In this article, the authors proposed a noise density normalized to the square root of the number of data points per unit time, to evaluate performance independent of measurement speed and areal filtering.
Journal ArticleDOI
Designing Ordered Structure with Piezoceramic Actuation Units (OSPAU) for Generating Continual Nanostep Motion.
TL;DR: Inspired by the idea of ordered structures with functional units, a much simpler nanostep piezoelectric actuator consisting of (2 × 2) arrayed, cofired multilayer piezoceramic actuation units is developed, which operates in an artificially generated quasi shear mode (AGQSM) that is missing in natural piezOElectric ceramics.
Journal ArticleDOI
A Novel Two-Dimensional Sensor With Inductive Spiral Coils
TL;DR: In this article, a novel inductive position sensor with the capability of measuring displacements in $x$ - and $y$ -directions simultaneously is presented, and the structure and working principles of the sensor are proposed.
Journal ArticleDOI
A high Precision Time Grating Displacement Sensor Based on Temporal and Spatial Modulation of Light-Field.
TL;DR: An optimization method that used continuous cosinusoidal light transmission surfaces with spatially symmetrical distribution was proposed, and the effectiveness of this method was verified with simulations and experiments.
References
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A Survey of Control Issues in Nanopositioning
TL;DR: This paper presents an overview of nanopositioning technologies and devices emphasizing the key role of advanced control techniques in improving precision, accuracy, and speed of operation of these systems.
Journal ArticleDOI
Review: Semiconductor Piezoresistance for Microsystems
TL;DR: This paper provides a comprehensive overview of integrated piezoresistor technology with an introduction to the physics of Piezoresistivity, process and material selection and design guidance useful to researchers and device engineers.