Journal ArticleDOI
A review of nanometer resolution position sensors: Operation and performance
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TLDR
In this paper, the authors define concise performance metrics and provide exact and approximate expressions for error sources including nonlinearity, drift and noise for position sensors with nanometer resolution, including resistive, piezoelectric and piezoresistive strain sensors.Abstract:
Position sensors with nanometer resolution are a key component of many precision imaging and fabrication machines. Since the sensor characteristics can define the linearity, resolution and speed of the machine, the sensor performance is a foremost consideration. The first goal of this article is to define concise performance metrics and to provide exact and approximate expressions for error sources including non-linearity, drift and noise. The second goal is to review current position sensor technologies and to compare their performance. The sensors considered include: resistive, piezoelectric and piezoresistive strain sensors; capacitive sensors; electrothermal sensors; eddy current sensors; linear variable displacement transformers; interferometers; and linear encoders.read more
Citations
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Journal ArticleDOI
Highly compact and easy-to-use optical chip interferometer with picometric performances.
TL;DR: A compact, inexpensive, and easy-to-use optical chip interferometer based on the telecom integrated waveguide technology with very high resolution and the potential bandwidth is currently only limited by electronics.
Journal ArticleDOI
A Novel Bionic Piezoelectric Actuator Based on the Walrus Motion
TL;DR: In this paper, a novel bionic piezoelectric actuator based on the walrus motion to achieve high performance on large working stroke for micro/nano positioning systems is first proposed.
Journal ArticleDOI
Position measurement and control of a thin and compact linear switched reluctance motor with a disposable-film mover
TL;DR: A position measurement method using the combination of the eddy current sensor output and a lookup table based on a previously measured information is proposed that is robust to reproducible amplitude variation of the sensor output owing to the deformation of the mover.
Journal ArticleDOI
A Thermal Drift Compensation Method for Precision Sensors Considering Historical Temperature State
TL;DR: This article proposes a compensation method for precision sensors considering historical temperature states, which can significantly reduce the thermal drift of the sensors during rapid temperature change process and is expected to function efficiently for any precision sensor in complex and harsh temperature environments.
References
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Book
introduction to random signals and applied kalman filtering
TL;DR: In this paper, the Discrete Kalman Filter (DFL) is used for smoothing and prediction linearization in the Global Positioning System (GPS) and a case study is presented.
Journal ArticleDOI
Piezoresistance Effect in Germanium and Silicon
TL;DR: In this article, the complete tensor piezoresistance has been determined experimentally for these materials and expressed in terms of the pressure coefficient of resistivity and two simple shear coefficients.
Book
Micromachined Transducers Sourcebook
TL;DR: In this paper, the authors present an overview of Micromachining Techniques, Mechanical Transducers, Optical Transducers and Ionizing Radiation Transducers for Microfluidic Devices.
Journal ArticleDOI
A Survey of Control Issues in Nanopositioning
TL;DR: This paper presents an overview of nanopositioning technologies and devices emphasizing the key role of advanced control techniques in improving precision, accuracy, and speed of operation of these systems.
Journal ArticleDOI
Review: Semiconductor Piezoresistance for Microsystems
TL;DR: This paper provides a comprehensive overview of integrated piezoresistor technology with an introduction to the physics of Piezoresistivity, process and material selection and design guidance useful to researchers and device engineers.