Coherence scanning interferometry: linear theory of surface measurement
read more
Citations
Calibration and verification of areal surface texture measuring instruments
On tilt and curvature dependent errors and the calibration of coherence scanning interferometry
Coherence scanning interferometry: measurement and correction of three-dimensional transfer and point-spread characteristics.
Modeling of interference microscopy beyond the linear regime
Lens aberration compensation in interference microscopy
References
Principles of optics : electromagnetic theory of propagation, interference and diffraction of light
The scattering of electromagnetic waves from rough surfaces
Three-dimensional structure determination of semi-transparent objects from holographic data
Linear systems, Fourier transforms, and optics
Mirau correlation microscope.
Related Papers (5)
Frequently Asked Questions (12)
Q2. What is the reflection coefficient for a perfect conductor?
More generally, the reflection coefficient depends on polarization but the sum of reflection coefficients for orthogonal polarization states is approximately constant for angles of incidence that are less than 45 deg.
Q3. What is the way to explain the scattering process?
For the case of strong surface scattering from the interface between two homogenous media however, providing multiple scattering is negligible, the process can also be considered linear.
Q4. What is the simplest way to explain the scattering of a point source?
It is noted that the scattered field is in general a nonlinear function of the object function ΔB r0 ; however, the process is linearized by assuming that the term Es r0 ; in the integrand is negligible.
Q5. What is the definition of the foil model?
When the surface of a homogenous object is measured, it can be replaced by an infinitely thin foil-like membrane, which has been called the “foil model” of the surface.
Q6. What is the spectral density of the source?
if the spectral density of the source as a function of wavenumber is S k0 , then integrating over all illumination wave vectors, kr, within the numerical aperture and all wavenumbers, k0 that are defined by the function ~GNA −kr; k0 , the output of the CSI can be written~OF k ~ΔF k ~HF k ; (31)where ~H k is the TF and is given by~HF k jkj2 2k · zZZ ~GNA kr; k0 ~GNA k− kr; k0 d3krS k0 dk0.
Q7. What is the reflection coefficient for a dielectric?
For a dielectric, the field at the lower boundary and its gradient may depart markedly from those given in Eqs. (11) and (12) due to propagation through the object.
Q8. What is the effect of the surface scattering approach?
As pointed out by Sheppard in the context of confocal microscopy [24,25], an apparent consequence of the surface scattering approach is that the effective TF (and PSF) of the measuring instrument is modified.
Q9. What is the Kirchhoff approximation for the surface?
In this case the Kirchhoff or physical optics approximation is assumed, which implies that the surface is slowly varying (such that the local radius of curvature is larger than the wavelength).
Q10. What is the significance of a spherical artifact?
More importantly, however, an interferogram 1559-128X/13/163662-09$15.00/0 © 2013 Optical Society of America3662 APPLIED OPTICS / Vol. 52, No. 16 / 1 June 2013of a spherical artifact provides the information necessary to define the resolution of the instrument and, in some cases, compensate for errors introduced by lens aberrations [9].
Q11. What is the definition of the surface scattering approach?
The equations rest on the1 June 2013 / Vol. 52, No. 16 / APPLIED OPTICS 3663assumption of weak scattering, or in other words, that the incident field is weakly perturbed by the object.
Q12. What is the way to deduce the scattering characteristics of a 3D object?
As has been shown elsewhere [17,18], these characteristics can be deduced for a range of far-field measurement instruments, including CSI, if the scattered field is a linear function of the object function, but in general, this is only true if some approximations are made.