Journal ArticleDOI
Structural, electrical and optical properties of aluminum doped zinc oxide films prepared by radio frequency magnetron sputtering
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TLDR
In this paper, the structural, electrical, and optical properties of aluminum doped zinc oxide (AZO) films are investigated in terms of the preparation conditions, such as the Al2O3 content in the target, rf power, substrate temperature and working pressure.Abstract:
Aluminum doped zinc oxide (AZO) films are prepared by rf magnetron sputtering on glass or Si substrates using specifically designed ZnO targets containing different amount of Al2O3 powder as the Al doping source. The structural, electrical, and optical properties of the AZO films are investigated in terms of the preparation conditions, such as the Al2O3 content in the target, rf power, substrate temperature and working pressure. The crystal structure of the AZO films is hexagonal wurtzite. The orientation, regardless of the Al content, is along the c axis perpendicular to the substrate. The doping concentration in the film is 1.9 at. % for 1 wt % Al2O3 target, 4.0 at. % for 3 wt % Al2O3 target, and 6.2 at. % for 5 wt % Al2O3 target. The resistivity of the AZO film prepared with the 3 wt % Al2O3 target is ∼4.7×10−4 Ω cm, and depends mainly on the carrier concentration. The optical transmittance of a 1500-A-thick film at 550 nm is ∼90%. The optical band gap depends on the Al doping level and on the microstr...read more
Citations
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Searching for better plasmonic materials
Paul R. West,Satoshi Ishii,Gururaj V. Naik,Naresh Kumar Emani,Vladimir M. Shalaev,Alexandra Boltasseva +5 more
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Posted Content
Searching for Better Plasmonic Materials
Paul R. West,Satoshi Ishii,Gururaj V. Naik,Naresh Kumar Emani,Vladimir M. Shalaev,Alexandra Boltasseva +5 more
TL;DR: A comparative study of various materials including metals, metal alloys and heavily doped semiconductors is presented and an approach for realizing optimal plasmonic material properties for specific frequencies and applications is outlined.
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Resistivity of polycrystalline zinc oxide films: current status and physical limit
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Al-doped zinc oxide films deposited by simultaneous rf and dc excitation of a magnetron plasma: Relationships between plasma parameters and structural and electrical film properties
R. Cebulla,R. Wendt,K. Ellmer +2 more
TL;DR: In this paper, a new technique of the simultaneous excitation of a magnetron sputtering discharge by rf and dc was used for the deposition of undoped ZnO-and Al-doped znO (ZnO:Al) films.
References
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Journal ArticleDOI
Mechanisms behind green photoluminescence in ZnO phosphor powders
Karel Vanheusden,William L. Warren,Carleton H. Seager,David R. Tallant,J. A. Voigt,Bruce E. Gnade +5 more
TL;DR: In this article, the authors explore the interrelationships between the green 510 nm emission, the free-carrier concentration, and the paramagnetic oxygen vacancy density in commercial ZnO phosphors by combining photoluminescence, optical absorption, and electron paramagnetic resonance spectroscopies.
Journal ArticleDOI
Transparent conductors—A status review
TL;DR: In this paper, the authors present a comprehensive and up-to-date description of the deposition techniques, electro-optical properties, solid state physics of the electron transport and optical effects and some applications of these transparent conductors.
Journal ArticleDOI
Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings
TL;DR: Two cylindrically symmetric and complementary sputtering geometries, the post and hollow cathodes, were used to deposit thick coatings of various metals (Mo, Cr, Ti, Fe, Cu, and Al-alloy) onto glass and metallic substrates at deposition rates of 1000-2000 A/min under various conditions of substrate temperature, argon pressure, and plasma bombardment as mentioned in this paper.
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Band-gap widening in heavily Sn-doped In 2 O 3
TL;DR: In this article, the optical properties of evaporated films of doped semiconducting In2O3 in the 2-6eV range were investigated, i.e., around the fundamental bandgap.
Journal ArticleDOI
Group III Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
TL;DR: In this paper, a detailed study of electrical properties in group III impurity doped ZnO thin films prepared by rf magnetron sputtering is described, and it is shown that the resistivity dependence on film thickness below 300 nm.