Journal ArticleDOI
Theoretical aspects of atomic mixing by ion beams
Peter Sigmund,A. Gras-Marti +1 more
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TLDR
In this paper, the half-widths of matrix relocation profiles were determined explicitly for ion-impurity knockon events (recoil implantation) as well as isotropic cascade mixing.About:
This article is published in Nuclear Instruments and Methods.The article was published on 1981-04-15. It has received 443 citations till now. The article focuses on the topics: Mixing (physics).read more
Citations
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Effect of thermodynamics on ion mixing
TL;DR: In this article, a phenomenological model of ion mixing that predicts a dependence on the chemical heats of mixing, DeltaHmix, and on the cohesive energies of the bilayer elements is presented.
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Marker experiments in growth studies of Ni2Si, Pd2Si, and CrSi2 formed both by thermal annealing and by ion mixing
TL;DR: In this paper, inert markers (evaporated tungsten and silver) were used in growth studies of silicides formed both by thermal annealing and by ion mixing in the Ni/Si, Pd/Si and Cr/Si systems.
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Do thermal spikes contribute to the ion‐induced mixing of Ni into Zr, Ti, and Pd?
TL;DR: In this paper, low-temperature ion beam mixing rates for Ni•Ti, Zr•Ni, and Pd•Ni bilayers were found to vary linearly with nuclear damage energy for irradiation with 600 keV Xe, Kr, or Ar, 300 keV Ne or N, or 200 keV N ions, or 1 MeV Au ions.
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Kinetic processes during ion bombardment
TL;DR: A number of processes change the structure and the distribution of alloying elements in near-surface regions of alloys during ion bombardment as mentioned in this paper, such as preferential sputtering, Gibbsian surface adsorption or RIS which modify the composition at the surface and hence, the composition of the sputtered material.
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Correlation between the cohesive energy and the onset of radiation-enhanced diffusion in ion mixing
TL;DR: In this article, a correlation between the cohesive energy of elemental solids and the characteristic temperature Tc for the onset of radiation-enhanced diffusion during ion mixing is established, and a theoretical argument based on the current models of cascade mixing and radiation enhanced diffusion is provided as a basis for understanding this observation.
References
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Handbook of Mathematical Functions
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Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
TL;DR: In this article, an integrodifferential equation for the sputtering yield is developed from the general Boltzmann transport equation, and solutions of the integral equation are given that are asymptotically exact in the limit of high ion energy as compared to atomic binding energies.
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The depth resolution of sputter profiling
TL;DR: In this article, it is shown that the bulk radiation damage accompanying sputtering events sets ultimate limits to the depth resolution attainable in sputter profiling, and guidelines for selection of projectile species and energies to minimize such mixing are given and numerical estimates for attainable depth resolutions.