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J. Van Steenbergen

Researcher at Katholieke Universiteit Leuven

Publications -  25
Citations -  887

J. Van Steenbergen is an academic researcher from Katholieke Universiteit Leuven. The author has contributed to research in topics: Silicon & Germanium. The author has an hindex of 15, co-authored 25 publications receiving 865 citations. Previous affiliations of J. Van Steenbergen include IMEC.

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Deposition of HfO2 on germanium and the impact of surface pretreatments

TL;DR: The deposition behavior of HfO2 by metalorganic chemical vapor deposition on germanium has been investigated in this article, showing that much thinner interfacial layers can be obtained, approximately half the thickness of what is typically found for depositions on silicon, suggesting the possibility of more aggressive oxide thickness∕leakage scaling.
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New interface state density extraction method applicable to peaked and high-density distributions for Ge MOSFET development

TL;DR: In this paper, a method for extracting parameters of weakly Fermi-level pinned germanium capacitors is introduced, which makes progress toward a more generally valid reliable interface state parameter extraction.
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Effect of hafnium germanate formation on the interface of HfO2/germanium metal oxide semiconductor devices

TL;DR: In this paper, the authors studied the thermal stability of HfO2 thin layers on germanium and the substrate interface development and found that hafnium germanate is an oxygen barrier.