J
J. Van Steenbergen
Researcher at Katholieke Universiteit Leuven
Publications - 25
Citations - 887
J. Van Steenbergen is an academic researcher from Katholieke Universiteit Leuven. The author has contributed to research in topics: Silicon & Germanium. The author has an hindex of 15, co-authored 25 publications receiving 865 citations. Previous affiliations of J. Van Steenbergen include IMEC.
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Journal ArticleDOI
Germanium MOSFET Devices: Advances in Materials Understanding, Process Development, and Electrical Performance
David P. Brunco,B. De Jaeger,Geert Eneman,Jerome Mitard,Geert Hellings,Alessandra Satta,Valentina Terzieva,Laurent Souriau,Frederik Leys,Geoffrey Pourtois,Michel Houssa,Gillis Winderickx,E. Vrancken,Sonja Sioncke,Karl Opsomer,G. Nicholas,Matty Caymax,Andre Stesmans,J. Van Steenbergen,Paul W. Mertens,Marc Meuris,M.M. Heyns +21 more
TL;DR: In this article, thin, strained epi-Si is examined as a passivation of the Ge/gate dielectric interface, with an optimized thickness found at 6 monolayers.
Journal ArticleDOI
Deposition of HfO2 on germanium and the impact of surface pretreatments
S. Van Elshocht,Bert Brijs,Matty Caymax,Thierry Conard,T. Chiarella,S. De Gendt,B. De Jaeger,Stefan Kubicek,M. Meuris,Bart Onsia,O. Richard,Ivo Teerlinck,J. Van Steenbergen,Chao Zhao,M.M. Heyns +14 more
TL;DR: The deposition behavior of HfO2 by metalorganic chemical vapor deposition on germanium has been investigated in this article, showing that much thinner interfacial layers can be obtained, approximately half the thickness of what is typically found for depositions on silicon, suggesting the possibility of more aggressive oxide thickness∕leakage scaling.
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Optimisation of a thin epitaxial Si layer as Ge passivation layer to demonstrate deep sub-micron n- and p-FETs on Ge-On-Insulator substrates
B. De Jaeger,Renaud Bonzom,Frederik Leys,O. Richard,J. Van Steenbergen,Gillis Winderickx,E. Van Moorhem,G. Raskin,Fabrice Letertre,T. Billon,Marc Meuris,M.M. Heyns +11 more
TL;DR: In this article, a thin epitaxially grown Si layer is used as the high-k dielectric to obtain low interface state density and high carrier mobility for Ge MOSFETs.
Journal ArticleDOI
New interface state density extraction method applicable to peaked and high-density distributions for Ge MOSFET development
Koen Martens,Brice De Jaeger,R. Bonzom,J. Van Steenbergen,M. Meuris,Guido Groeseneken,Herman Maes +6 more
TL;DR: In this paper, a method for extracting parameters of weakly Fermi-level pinned germanium capacitors is introduced, which makes progress toward a more generally valid reliable interface state parameter extraction.
Journal ArticleDOI
Effect of hafnium germanate formation on the interface of HfO2/germanium metal oxide semiconductor devices
S. Van Elshocht,Matty Caymax,Thierry Conard,S. De Gendt,I. Hoflijk,Michel Houssa,B. De Jaeger,J. Van Steenbergen,M.M. Heyns,M. Meuris +9 more
TL;DR: In this paper, the authors studied the thermal stability of HfO2 thin layers on germanium and the substrate interface development and found that hafnium germanate is an oxygen barrier.