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Shengdong Zhang

Researcher at Peking University

Publications -  515
Citations -  5004

Shengdong Zhang is an academic researcher from Peking University. The author has contributed to research in topics: Thin-film transistor & Threshold voltage. The author has an hindex of 30, co-authored 479 publications receiving 3806 citations. Previous affiliations of Shengdong Zhang include China-Japan Friendship Hospital & Hong Kong University of Science and Technology.

Papers
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Proceedings ArticleDOI

A Capped Trimming Hard-Mask Patterning Technique for Integration of Nano-Devices and Conventional Integrated Circuits

TL;DR: In this article, a capping trimming hard-mask (CTHM) patterning technique has been developed based on standard materials and processing equipments for sub-50nm feature sized pattern can be realized based on 0.5μm lithography technology.
Journal ArticleDOI

High-performance full transparent tin-doped zinc oxide thin-film transistors fabricated on glass at low temperatures

TL;DR: In this paper, the effect of O2/Ar gas flow ratio during channel deposition on the electrical properties of TZO TFTs was investigated and an optimised growing condition (O 2 /Ar gasflow ratio: 8/92) for TZo film as the channel layer was acheived.
Patent

Schockley barrier MOS transistor and its manufacturing method

TL;DR: In this paper, a Schottky potential barrier MOS transistor with two layers of metals or compounds formed by metals and semiconductors is presented, the process method of which is compatible with the traditional one and only adds low energy ionic injection to increase the performance greatly.