Journal ArticleDOI
Local trap spectroscopy on cross-sectioned AlGaN/GaN devices with in situ biasing
D. A. Gleason,K. Galiano,Jeff L. Brown,Albert Hilton,Steven A. Ringel,Aaron R. Arehart,Eric R. Heller,Donald L. Dorsey,Jonathan P. Pelz +8 more
Reads0
Chats0
TLDR
In this article, deep-level transient spectroscopy (SP-DLTS) is applied to cross-sectioned, fully processed, commercially sourced AlGaN/GaN Schottky barrier diodes and high electron mobility transistors (HEMTs) biased in situ.Abstract:
Scanning probe deep-level transient spectroscopy (SP-DLTS) is applied to cross-sectioned, fully processed, commercially sourced AlGaN/GaN Schottky barrier diodes (SBDs) and high electron mobility transistors (HEMTs) biased in situ. The SBD and HEMT structures had been specially designed to allow two- and three-terminal biasing after cross-sectioning. The cross-sectioning procedure exposes electrically active regions throughout the length and depth of the devices while also preserving electrical functionality. Spatially resolved SP-DLTS surface potential transients (SPTs) measured on the appropriately cross-sectioned faces of the devices reveal the presence of two traps in the GaN buffer layer which are shown to be consistent with traps detected in macroscopic deep-level transient spectroscopy measurements performed on an intact AlGaN/GaN SBD made at the same time as the HEMT device. This indicates that, for an appropriate cross-sectioning process, the cross-sectioned surface does not screen or mask defects in the bulk GaN from the probe tip. SP-DLTS maps collected over the cross-sectioned faces in active device regions also reveal the spatial variation in trapping-induced SPTs. These measurements demonstrate an avenue for exploring the energies, concentrations, and spatial distributions of traps located throughout GaN-based devices with potential applications to other material and device systems.read more
Citations
More filters
Journal ArticleDOI
Monitoring the Joule heating profile of GaN/SiC high electron mobility transistors via cross-sectional thermal imaging
TL;DR: In this paper, the authors proposed a new cross-sectional imaging technique to map the vertical temperature distribution in gallium nitride (HEMTs) by combining advanced cross-sectioning processing with the recently developed near bandgap transient thermoreflectance imaging technique.
Journal ArticleDOI
Local capacitance-voltage profiling and high voltage stress effect study of SiO2/SiC structures by time-resolved scanning nonlinear dielectric microscopy
Kohei Yamasue,Yasuo Cho +1 more
TL;DR: In this article, a nanoscale capacitance-voltage (CV) profiling method based on time-resolved scanning nonlinear dielectric microscopy (tr-SNDM) was proposed for SiO2/SiC structures.
References
More filters
Journal ArticleDOI
Deep‐level transient spectroscopy: A new method to characterize traps in semiconductors
TL;DR: Deep Level Transformer Spectroscopy (DLTS) as discussed by the authors is a high-frequency capacitance transient thermal scanning method useful for observing a wide variety of traps in semiconductors, which can display the spectrum of traps as positive and negative peaks on a flat baseline as a function of temperature.
Journal ArticleDOI
A Survey of Wide Bandgap Power Semiconductor Devices
TL;DR: In this article, a review of recent progresses in the development of SiC- and GaN-based power semiconductor devices together with an overall view of the state of the art of this new device generation is presented.
Journal ArticleDOI
Trapping effects and microwave power performance in AlGaN/GaN HEMTs
Steven C. Binari,K. Ikossi,J.A. Roussos,Walter Kruppa,Doewon Park,Harry B. Dietrich,Daniel D. Koleske,Alma Wickenden,R. L. Henry +8 more
TL;DR: In this article, the dc small-signal and microwave power output characteristics of AlGaN/GaN HEMTs are presented, and it is demonstrated that gate lag is related to surface trapping and drain current collapse is associated with the properties of the GaN buffer layer.
Journal ArticleDOI
Deep-level optical spectroscopy in GaAs
TL;DR: Deep-level optical spectroscopy (DLOS) as discussed by the authors uses photostimulated capacitance transients measurements after electrical, thermal, or optical excitation of the sample, i.e., a diode.
Journal ArticleDOI
Deep-Level Characterization in GaN HEMTs-Part I: Advantages and Limitations of Drain Current Transient Measurements
Davide Bisi,Matteo Meneghini,Carlo De Santi,Alessandro Chini,Michael Dammann,Peter Brückner,Michael Mikulla,Gaudenzio Meneghesso,Enrico Zanoni +8 more
TL;DR: In this paper, the advantages and limitations of the current-transient methods used for the study of the deep levels in GaN-based high-electron mobility transistors (HEMTs), by evaluating how the procedures adopted for measurement and data analysis can influence the results of the investigation.