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Showing papers on "Thin film published in 1973"


Journal ArticleDOI
TL;DR: In this article, the amplitude of a reflection from a thin bed is to the first order of approximation equal to 4πAb/λb, where b is the thickness of the bed and A is the amplitude amplitude of the reflection if the bed were to be very thick.
Abstract: Based on reflective properties, a thin bed may be conveniently defined as one whose thickness is less than about λb/8 where λb is the (predominant) wavelength computed using the velocity of the bed. The amplitude of a reflection from a thin bed is to the first order of approximation equal to 4πAb/λb, where b is the thickness of the bed and A is the amplitude of the reflection if the bed were to be very thick. The equation shows that a bed as thin as 10 ft has, for typical frequency and velocity, considerably more reflective power than is usually attributed to it.

969 citations


Journal ArticleDOI
TL;DR: In this paper, the optical absorption spectra of amorphous and crystalline thin Wo3 films have been measured in the temperature range 110° to 500°K and the temperature coefficient of the band edges was found to be − 5.0 × 10−4 eV/°K.
Abstract: Thin films of Wo3 deposited on quartz substrates at room temperature have been shown to be amorphous in structure. The optical absorption spectra of the amorphous and crystalline films have been measured in the temperature range 110° to 500°K. The fundamental absorption edge of an amorphous film occurs at 3800 A which on crystallization moves to 4500 A. On the high-energy side of the absorption edge several absorption peaks are resolvable in both types of film. The frequency dependence of the absorption coefficient below 104 cm−1 is described by an expression of the form K (v, T) = K 0 exp[− (β/kT) (E 0 − hv)] and above 104 cm−1 it follows a square law dependency. The temperature coefficient of the band edges was found to be − 5.0 × 10−4 eV/°K and the estimated band gaps at 0°K were found to be 3.65 and 3.27 eV for the amorphous and crystalline films, respectively. The electrical conductivity of a thin film has been measured in the temperature range 298–573°K and the activation energy was found t...

933 citations


Journal ArticleDOI
J. H. Mooij1
TL;DR: In this article, the origin of the low temperature coefficient of resistance in NiCr thin films is investigated, and it is shown that this coefficient is an intrinsic property of the alloy.
Abstract: Results are presented of an investigation on the origin of the low temperature coefficient of resistance in NiCr thin films. It is shown that this low temperature coefficient is an intrinsic property of the alloy. Besides NiCr a large number of disordered alloys containing transition metals have similar conduction properties, both in bulk and as a thin film. For these materials a correlation has been found between the resistivity and its temperature coefficient. These anomalous conduction properties are probably caused by the very small electron mean free path in these materials.

751 citations


Journal ArticleDOI
TL;DR: In this article, an optical interference method is described for measuring thickness and refractive index profiles of thin films trapped between two transparent deformable sheets, which is most suitable for studying very thin films whose thicknesses range from zero to a few thousand angstroms (thickness resolution ∼1 A).

682 citations


Journal ArticleDOI
King-Ning Tu1
TL;DR: In this article, a Seemann-Bohlin diffractometer was used to investigate interdiffusion and intermetallic compound formation in Cu-Sn thin film couples.

468 citations


Journal ArticleDOI
Go Okamoto1
TL;DR: In this article, the authors examined the structure and composition of the passive film formed in sulphuric acid solution at definite potentials in the passive region, and the most important parameter controlling the corrosion resistance of the steel is concluded to be the amorphous nature of the film in which bound water is included.

381 citations


Journal ArticleDOI
TL;DR: In this paper, it has been shown that perpendicular uniaxial anisotropy and compensation points in the vicinity of room temperature can be obtained in amorphous thin films of rare earth transition metal alloys.
Abstract: It has been demonstrated that perpendicular uniaxial anisotropy and compensation points in the vicinity of room temperature can be obtained in amorphous thin films of rare‐earth—transition‐metal alloys. The magneto‐optic properties of these films are reported, and it is shown that a remarkably good signal‐to‐noise ratio can be obtained in a thermomagnetically written film.

360 citations


Journal ArticleDOI
TL;DR: In this paper, a collimated mono-energetic and mono-atomic beam incident on a target provides information on its structure and composition when the energy of the back-scattered beam atoms, or of the particles generated by nuclear reactions, is analyzed.

299 citations


Journal ArticleDOI
P. Wurfel1, Inder P. Batra1
TL;DR: In this paper, the existence of depolarization fields in thin ferroelectric films is experimentally demonstrated by investigating an unconventional electrode-ferroelectric configuration consisting of a triglycine sulphate (TGS) film sandwiched between a gold and a doped-silicon electrode.
Abstract: The existence of depolarization fields in thin ferroelectric films is experimentally demonstrated by investigating an unconventional electrode-ferroelectric configuration consisting of a triglycine sulphate (TGS) film sandwiched between a gold and a doped-silicon electrode. Due to nonidentical electrodes, the compensating-charge distribution for opposite polarization directions is asymmetric and consequently depolarization fields cannot be sufficiently reduced by domain formation. These depolarization fields manifest themselves by reducing the intrinsic polarization in thin ferroelectric films with respect to the bulk value and this aspect is experimentally confirmed. For a sufficiently thin film, depolarization fields become too strong and a polarization instability is observed. These effects are simulated by altering the compensation-charge extension in the silicon electrode by photoillumination. Other causes, like impurities, and structural defects, which can lead to reduction of polarization, are ruled out. Theoretical model calculations including the depolarization field are reported. The calculation predicts an intrinsic polarization reduction in thin ferroelectric films and is in good agreement with experiments reported here.

203 citations


Journal ArticleDOI
TL;DR: In this article, it is shown that the polarization in a thin ferroelectric film sandwiched between semiconducting electrodes is compensated incompletely by depolarization fields, which are size dependent and change the magnitude of the polarization, transition temperature, coercive field, and order of the phase transition.
Abstract: It is shown that the polarization in a thin ferroelectric film, which is sandwiched between semiconducting electrodes, is compensated incompletely The associated depolarization fields are size dependent and change the magnitude of the polarization, transition temperature, coercive field, and the order of the phase transition Thermodynamic considerations give stability requirements for thin films, which are different from the bulk The properties of a thin ferroelectric film, which in bulk form exhibits a second-order phase transition, are investigated as a function of thickness, temperature, biasing potential, and electrode properties Numerical results are presented for triglycinesulfate

171 citations


Journal ArticleDOI
TL;DR: The first practical application of smectic liquid crystals, an infrared-laser-addressed light valve for the recording, storage, and display of high-resolution graphic images, was described in this article.
Abstract: Thermally induced optical storage and erasure (local and nonlocal) of scattering centers in thin films of smectic liquid crystals has been demonstrated. These new thermo‐optic and electrothermo‐optic effects provide the basis for what is believed to be the first practical application of smectic liquid crystals, an infrared‐laser‐addressed light valve for the recording, storage, and display of high‐resolution graphic images.

Journal ArticleDOI
TL;DR: In this article, the authors developed a theory for thermally stimulated currents (TSC) that flow in optically or electrically excited insulators and semiconductors in which the field is sufficiently high and the active region in which free carriers are generated is sufficiently thin (e.g., reverse-biased junctions, thin films, etc.) so that recombination rate of the free carriers is negligible.
Abstract: The theory is developed for thermally stimulated currents (TSC) that flow in optically or electrically excited insulators and semiconductors in which the field is sufficiently high and the (active) region in which the free carriers are generated is sufficiently thin (e.g., reverse-biased junctions, thin films, etc.) so that recombination rate of the free carriers is negligible. Closed-form solutions are obtained for the TSC characteristics for semiconductors and insulators containing arbitrary trap distributions. Using various ad hoc trapping distributions, it is shown that the approximate high-field TSC characteristics correlate extremely well with the exact characteristics that were computed numerically. More important, however, it is shown that the shape of the observed TSC characteristic is a direct reflection of the sum of the trap distribution in the upper half and the lower half of the band gap. The technique is potentially a powerful means of characterizing trap distributions in defect semiconductors and insulators, in that it permits the direct determination of the trap distribution without requiring an a priori knowledge of the trap parameters and without the need for laborious analyses.

Book ChapterDOI
F.M. D'heurle1, R. Rosenberg1
01 Jan 1973

Journal ArticleDOI
H. P. Weber1, F A Dunn1, W N Leibolt1
TL;DR: An apparatus for the measurement of attenuation of light in thin-film waveguides involves a prism that rides on a liquid film along the guide and couples the light out of the guide.
Abstract: An apparatus for the measurement of attenuation of light in thin-film waveguides is described. It involves a prism that rides on a liquid film along the guide and couples the light out of the guide. A spatial resolution of ~0.5 mm and an accuracy of 0.02 dB/cm were achieved.


Journal ArticleDOI
TL;DR: In this article, a range and damage distribution for light ions slowing down in heavy targets in the energy region where electronic stopping is dominating and approximately proportional to velocity was calculated for light ion bombarding a thin film.
Abstract: Range and damage distributions have been calculated for light ions slowing down in heavy targets in the energy region where electronic stopping is dominating and approximately proportional to velocity. Following Schi⊘tt's approach, well-known integral equations for spatial moments were approximated by differential equations, and the latter solved by numerical integration. Moments over the two distributions up to third order have been obtained, and the distributions were constructed by use of the Edgeworth expansion. From the profiles, backscattering coefficients and relative sputtering yields were determined. Comparison is made with previous theoretical results, computer simulation and experimental results. An improved calculation of the sputtering yield of light ions bombarding a thin film is also presented.


Journal ArticleDOI
TL;DR: In this paper, the authors describe a diffusion-controlled growth of Pd2Si on amorphous Si substrates with a t 0.5 dependence on the substrate orientation.

Journal ArticleDOI
TL;DR: In this article, the electrical properties of thin films of the amorphous alloy As 2 Se 5 were investigated and the memory switching behavior of this material was also reported, showing a Poole-Frenkel effect.

Journal ArticleDOI
TL;DR: In this paper, a trifluorophosphine complex is used to produce adherent bright films of crystals on a variety of substrates at 200°-300°C in 1 atm hydrogen.
Abstract: Chemical vapor deposition of platinum for microelectronic applications has been studied with the aim of avoiding the radiation damage to dielectrics caused by sputter or e‐gun deposition. Two known CVD methods—the pyrolysis of Pt acetylacetonate and the reduction of —were tried and judged unsatisfactory for either purity or adherence. A novel method of Pt deposition using the trifluorophosphine complex is reported. The process is simple and reliable, and produces adherent bright films of crystals on a variety of substrates at 200°–300°C in 1 atm hydrogen. The Pt contains small amounts of residual phosphorus, mostly concentrated at the surface. Resistivity of 750Aa films is 1.8 times that of bulk Pt. MOS capacitors with CVD Pt field plates on both and alone have shown good stability under bias‐temperature aging. CVD Pt and Si interdiffuse readily to form ohmic or Schottky diode contacts.

Patent
04 Jan 1973
TL;DR: A transducer for converting electrical energy into mechanical or acoustic energy or vice versa using a converting means made of a thin film of high molecular weight polymer piezoelectric organic compound having orientated molecules and having electrodes bonded or deposited onto both surfaces thereof is described in this article.
Abstract: A transducer for converting electrical energy into mechanical or acoustic energy or vice versa using a converting means made of a thin film of high molecular weight polymer piezo-electric organic compound having orientated molecules and having electrodes bonded or deposited onto both surfaces thereof. When an electric current is applied to the electrodes, the thin film is extended or contracted in a direction different from the direction of orientation of the molecules. when the angle between these two directions is 45*, the extent of the extension or contraction of the thin film is at a maximum and the best converting efficiency can be obtained.

Journal ArticleDOI
TL;DR: The rate of reaction between Si (100) surfaces and tungsten films deposited by rf diode sputtering depends on the preparation of the silicon surface and the native oxide layer that exists when sputter cleaning is not used as discussed by the authors.
Abstract: The rate of reaction between Si (100) surfaces and tungsten films deposited by rf diode sputtering depends on the preparation of the silicon surface. If rf substrate bias is used to clean the silicon, then the rate of reaction in the temperature range 700–850 °C is independent of time, with an activation energy of 3 eV/mole W. The native oxide layer between the silicon and tungsten, that exists when sputter cleaning is not used, can act as a barrier to WSi2 formation. In this case, the time‐independent region is preceded by a period when the reaction rate increases with time. The rate is then controlled by two‐dimensional spreading of discontinuous WSi2 regions that originate at sites where the reaction barrier can be penetrated. After a continuous WSi2 layer is formed, additional growth can produce a stage where the increased path length for silicon diffusion causes the transport step to control the over‐all rate of the reaction. Quantitative models are presented for each of the three stages in the reaction. The models explain some of the macroscopic observations made on reacted layers.

Journal ArticleDOI
TL;DR: In this paper, an out-diffused planar optical waveguide in LiNbO3 has been used to produce an efficient broad-band electro-optic phase modulator.
Abstract: An out‐diffused planar optical waveguide in LiNbO3 has been used to produce an efficient broad‐band electro‐optic phase modulator. The ratio of modulation index η and voltage is 0.13 V−1, the maximum base bandwidth with 50‐Ω load is 3.2 GHz, and the modulating power per unit bandwidth for η=1 rad is 0.2 mW/MHz.

Journal ArticleDOI
TL;DR: In this paper, a good correlation exists between superconducting Tc's and film structure and composition regardless of the sputtering conditions used to achieve this structure, and the most important parameters affecting Tc are lattice parameter, crystal structure, island structure and impurity content.
Abstract: Superconducting properties and electrical resistivities of NbN thin films have been studied as a function of sputtering parameters, film structure, and composition. A good correlation exists between superconducting Tc's and film structure and composition regardless of the sputtering conditions used to achieve this structure. The most important parameters affecting Tc are lattice parameter, crystal structure, island structure, and impurity content. Substrate temperature, Ar/N2 ratio, and impurity content are the principal sputtering parameters affecting film structure, and thus Tc.

Journal ArticleDOI
TL;DR: In this article, a system for securing the laser-Raman spectrum of a thin layer on a reflecting metal surface is discussed, and the general design considerations are specifically illustrated for a thin-layer on silver using a 4880 A laser exciting line.

Journal ArticleDOI
D. Chen1, G. Otto1, F. Schmit1
TL;DR: In this article, a review of material physical properties of MnBi, including memory characteristics in regard to read, write, and erase operation, the physical process involved in the writing and erasure by thermomagnetic technique, the technique for detection of written information, and the utilization of this medium for magnetic holographic storage.
Abstract: Progress made during the past years in the area of magnetooptic data storage by the computer industry has been most impressive. Many material media and physical phenomena have been developed for this particular application. It now appears that a large capacity ( \gsim 10^{10} bits) magnetooptic data store possessing major advantages over the conventional recording techniques could be developed. Of the many materials and techniques advanced to date, the use of thin films of MnBi for thermomagnetic writing, erasing, and magnetooptic reading has received particularly intensive study because of the many unique properties of this film medium. In order to provide an assessment of the potential of this medium for optical memory application, we have included in this review the pertinent material physical properties of MnBi; the memory characteristics in regard to read, write, and erase operation; the physical process involved in the writing and erasure by thermomagnetic technique; the technique for detection of written information; and the utilization of this medium for magnetic holographic storage. Emphasis is given to the material properties and physical phenomena, rather than the systems considerations in using MnBi films for optical memory.

Journal ArticleDOI
TL;DR: In this article, the physical and mathematical characteristics of carrier-facilitated transport in a liquid film are examined for a reaction scheme of the form A + B ⇄ AB, in which A is the permeating species and B and AB are diffusable species which are constrained not to leave the film.
Abstract: The physical and mathematical characteristics of carrier-facilitated transport in a liquid film are examined for a reaction scheme of the form A + B ⇄ AB, in which A is the permeating species and B and AB are diffusable species which are constrained not to leave the film. For thin films, a solution is developed as a perturbation from purely physical diffusion and is expressed as a second-order power series. For thick films, a solution is developed as a perturbation from a state in which the species concentrations at any one point within the film are related by an equilibrium constraint. This development utilizes the techniques of matched asymptotic analysis. Taken together, these solutions provide an excellent estimate of the facilitation for a film of any thickness, as shown by comparison with numerical results.

Patent
29 Nov 1973
TL;DR: In this paper, a method for use in depositing thin films in the fabrication of integrated circuits which avoids edge tearing of the films is presented. But the method involves depositing a non-photosensitive organic polymeric material on a substrate, and forming on said polymeric layer a masking layer of an inorganic material, preferably metal, having openings in a selected pattern.
Abstract: A method for use in depositing thin films in the fabrication of integrated circuits which avoids edge tearing of the films. The method involves depositing a non-photosensitive organic polymeric material on a substrate, and forming on said polymeric layer a masking layer of an inorganic material, preferably metal, having openings in a selected pattern. Then, forming, by reactive sputter etching, utilizing the metallic mask as a barrier, openings through the polymeric layer extending to the substrate, the openings in the polymeric layer being aligned with and laterally wider than the corresponding openings in the metallic masking layer. The thin film to be deposited is then applied over the structure; it is, thereby, deposited on the substrate in said openings. Then, the remaining polymeric layer is removed, lifting off the masking layer and the thin film above the polymeric layer to leave thin film deposited in a selected pattern in the openings.

Journal ArticleDOI
TL;DR: In this article, a modulated ellipsometer was constructed for the study of the optical properties of thin films deposited and maintained in a variety of controlled environments, which involves a photoelastic device which modulates the state of polarization of the light beam.

Journal ArticleDOI
TL;DR: In this paper, the normal-incidence spectral reflectance of ice at −7° C has been measured in the range 300-5000 cm−1, and a Kramers-Kronig phase-shift analysis has been employed to provide values of the real and imaginary parts of the refractive index.
Abstract: The normal-incidence spectral reflectance of ice at −7° C has been measured in the range 300–5000 cm−1. A Kramers–Kronig phase-shift analysis of the measured spectral reflectance has been employed to provide values of the real and imaginary parts of the refractive index. The resulting values of these optical constants are suitable for use in Mie-theory computations of scattering by ice particles in planetary atmospheres. The optical constants of ice at −7° C are compared in detail with those of liquid water at several temperatures and with those recently determined for ice at −170° C.