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Tetsu Tanaka

Researcher at Tohoku University

Publications -  423
Citations -  11239

Tetsu Tanaka is an academic researcher from Tohoku University. The author has contributed to research in topics: Wafer & Chip. The author has an hindex of 38, co-authored 406 publications receiving 10375 citations. Previous affiliations of Tetsu Tanaka include NTT DoCoMo & Tokyo Medical and Dental University.

Papers
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Proceedings ArticleDOI

Improving the integrity of Ti barrier layer in Cu-TSVs through self-formed TiSi x for via-last TSV technology

TL;DR: It was found that the self-formed TiSix at the interface between Cu and SiO2 during the sputter deposition of Ti barrier layer was converted into an amorphous TiOx and SiOx upon vacuum annealing.
Journal ArticleDOI

A high Reliability Module with Thermoelectric Device by Molding Technology for M2M Wireless Sensor Network

TL;DR: In this paper, a new energy harvesting module that used the thermoelectric device (TED) by using molding technology is presented, and the output voltage per heater temperature of the TED module at 20?C ambient temperature is 8mV/K and similar to the result with the aluminium heat sink.
Book ChapterDOI

Multimodal Functional Analysis Platform: 2. Development of Si Opto-Electro Multifunctional Neural Probe with Multiple Optical Waveguides and Embedded Optical Fiber for Optogenetics.

TL;DR: In this article, a Si opto-electro multifunctional neural probe with multiple waveguides and embedded optical fiber for highly accurate optical stimulation was developed. But it is not suitable for neural recordings.
Proceedings ArticleDOI

Development of fine sized cu through-silicon vias for three-dimensional stacked retinal prosthesis chip

Yuki Ohara, +1 more
TL;DR: This work proposes a fully implantable retinal prosthesis system with a three-dimensional (3-D) stacked retina prosthesis chip that comprises a photodetector chip for transforming incident light into current, a signal processing chip, and a stimulus current generation chip for generating the appropriate electrical stimulation pattern.