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Veena Misra
Researcher at North Carolina State University
Publications - 251
Citations - 5283
Veena Misra is an academic researcher from North Carolina State University. The author has contributed to research in topics: Gate dielectric & Dielectric. The author has an hindex of 39, co-authored 249 publications receiving 4954 citations. Previous affiliations of Veena Misra include University of North Carolina at Chapel Hill & Motorola.
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Method for forming an MOS transistor having a metallic gate electrode that is formed after the formation of self-aligned source and drain regions
Veena Misra,Suresh Venkatesan,Christopher C. Hobbs,B. Smith,Jeffrey S. Cope,Earnest B. Wilson +5 more
Abstract: A method for forming a metal gate MOS transistor begins by forming source and drain electrodes (26, 28, and/or 118) within a substrate (12 or 102). These source and drain regions (26, 28, and 118) are self-aligned to a lithographically-patterned feature (24 or 108). After formation of the source and drain regions, the features (24 and 108 are processed to fill these features with a metallic gate layer (28a or 128a). This metal layer (28a or 128a) is then chemically mechanically polished (CMPed) to form a metallic plug region (28b or 128b) within the features (24 or 108). The plug region (28b or 128b) is formed in either an inlaid or dual inlaid manner wherein this metallic plug region (28b or 128b) is self-aligned to the previously formed source and drain regions and preferably functions as a metal MOS gate region.
Journal ArticleDOI
Bonding constraints and defect formation at interfaces between crystalline silicon and advanced single layer and composite gate dielectrics
TL;DR: In this article, the authors extended constraint theory to crystalline silicon-dielectric interfaces that go beyond Si-SiO2 through development of a model that quantifies average bonding coordination at these interfaces.
Journal ArticleDOI
Flexible Technologies for Self-Powered Wearable Health and Environmental Sensing
Veena Misra,Alper Bozkurt,Benton H. Calhoun,Thomas N. Jackson,Jesse S. Jur,John Lach,Bongmook Lee,John F. Muth,Omer Oralkan,Mehmet C. Öztürk,Susan Trolier-McKinstry,Daryoosh Vashaee,David D. Wentzloff,Yong Zhu +13 more
TL;DR: The latest advances in high-efficiency nanostructured energy harvesters and storage capacitors, new sensing modalities that consume less power, low power computation, and communication strategies, and novel flexible materials that provide form, function, and comfort are presented.
Patent
Optoelectronic devices having arrays of quantum-dot compound semiconductor superlattices therein
TL;DR: In this paper, an anodized metal oxide (AAO) thin film is used as an etching mask to transfer the first array of nano-channels to the underlying substrate insulating layer, which may be thinner than the etching template.
Journal ArticleDOI
Low-Power Wearable Systems for Continuous Monitoring of Environment and Health for Chronic Respiratory Disease
James Dieffenderfer,Henry Goodell,Steven Mills,Michael McKnight,Shanshan Yao,Feiyan Lin,Eric Beppler,Brinnae Bent,Bongmook Lee,Veena Misra,Yong Zhu,Omer Oralkan,Jason Strohmaier,John F. Muth,David B. Peden,Alper Bozkurt +15 more
TL;DR: The preliminary efforts to achieve a submilliwatt system ultimately powered by the energy harvested from thermal radiation and motion of the body are described with the primary contributions being an ultralow-power ozone sensor, an volatile organic compounds sensor, spirometer, and the integration of these and other sensors in a multimodal sensing platform.