Journal ArticleDOI
Fabrication of Sub-10-nm Silicon Nanowire Arrays by Size Reduction Lithography
TLDR
In this paper, a photolithography-based method capable of size reduction to produce sub-10nm Si nanowire arrays on a wafer scale is described, by conformally depositing a material (silicon oxide or silicon) that...Abstract:
A photolithography-based method capable of size reduction to produce sub-10-nm Si nanowire arrays on a wafer scale is described. By conformally depositing a material (silicon oxide or silicon) that...read more
Citations
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Journal ArticleDOI
New approaches to nanofabrication: molding, printing, and other techniques.
Journal ArticleDOI
Silicon-based Nanomaterials for Lithium-Ion Batteries - A Review
TL;DR: In this article, the most recent advance in the applications of 0D (nanoparticles), 1D(nanowires and nanotubes), and 2D (thin film) silicon nanomaterials in lithium-ion batteries are summarized.
Journal ArticleDOI
Silicon Nanowires for Photovoltaic Solar Energy Conversion
Kui-Qing Peng,Shuit-Tong Lee +1 more
TL;DR: The recent developments in the utilization of SiNWs for PV applications, the relationship between SiNW-based PV device structure and performance, and the challenges to obtaining high-performance cost-effective solar cells are reviewed.
Journal ArticleDOI
Inorganic semiconductor nanostructures and their field-emission applications
TL;DR: In this paper, a comprehensive review of the state-of-the-art research activities in the field of inorganic semiconductor nanostructures is presented, which mainly focuses on the most widely studied inorganic nano-structures, such as ZnO, ZnS, Si, WO3, AlN, SiC and their field-emission properties.
Journal Article
Inorganic semiconductor nanostructures and their field-emission applications
TL;DR: In this article, a comprehensive review of the state-of-the-art research activities in the field of inorganic semiconductor nanostructures is presented, which mainly focuses on the most widely studied inorganic nano-structures, such as ZnO, ZnS, Si, WO3, AlN, SiC and their field-emission properties.
References
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Journal ArticleDOI
Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species
TL;DR: The small size and capability of these semiconductor nanowires for sensitive, label-free, real-time detection of a wide range of chemical and biological species could be exploited in array-based screening and in vivo diagnostics.
Journal ArticleDOI
"Dip-Pen" Nanolithography
TL;DR: A direct-write "dip-pen" nanolithography (DPN) has been developed to deliver collections of molecules in a positive printing mode, making DPN a potentially useful tool for creating and functionalizing nanoscale devices.
Journal ArticleDOI
Electron beam lithography: resolution limits and applications
Christophe Vieu,Franck Carcenac,A. Pépin,Yong Chen,M. Mejias,A. Lebib,L. Manin-Ferlazzo,L. Couraud,H. Launois +8 more
TL;DR: In this article, the authors report on the resolution limits of EBL in the conventional polymethylmethacrylate (PMMA) organic resist and show that resolution can be pushed below 10 nm for isolated features and dense arrays of periodic structures can be fabricated at a pitch of 30 nm, leading to a density close to 700 Gbit/in2.
Journal ArticleDOI
Two-dimensional thermal oxidation of silicon. II. Modeling stress effects in wet oxides
TL;DR: In this paper, the authors proposed a simplified mathematical formulation made possible by the symmetry in cylindrical structures, and compared with experimental data, possible applications, and limitations of the model are also discussed.
Journal ArticleDOI
A spacer patterning technology for nanoscale CMOS
TL;DR: In this article, a spacer patterning technology using a sacrificial layer and a chemical vapor deposition (CVD) spacer layer has been developed, and is demonstrated to achieve sub-7 nm structures with conventional dry etching.