Journal ArticleDOI
Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators
Reads0
Chats0
TLDR
In this article, the design, fabrication, and characterization of piezoelectrically-transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk acoustic modes to address the need for high-Q microelectronic-integrable frequency-selective components is presented.Abstract:
This paper reports on the design, fabrication, and characterization of piezoelectrically-transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk acoustic modes to address the need for high-Q microelectronic-integrable frequency-selective components. A simple electromechanical model for optimizing performance is presented. For verification, resonators were fabricated on 5-mum-thick silicon-on- insulator substrates and use a 0.3-mum zinc oxide film for transduction. A bulk acoustic mode was observed from a 240 mum times 40 mum resonator with a 600-Omega impedance (Q=3400 at P=1 atm) at 90 MHz. A linear resonator absorbed power of -0.5 dBm and an output current of 1.3 mA rms were measured. The same device also exhibited a Q of 12 000 in its fundamental extensional mode at a pressure of 5 torr.read more
Citations
More filters
Journal ArticleDOI
A 10 MHz thin-film piezoelectric-on-silicon MEMS resonator with T-shaped tethers for Q enhancement
TL;DR: In this paper, a 10 MHz TPoS MEMS resonator with T-shaped tethers coupled with reflecting blocks was proposed to reduce energy leakage through the anchor substrate by reflecting mechanical waves and trapping the energy.
Dissertation
Gallium Nitride Resonators for Infrared Detector Arrays and Resonant Acoustoelectric Amplifiers.
TL;DR: In this paper, the authors propose a novel approach to solve the problem of gender discrimination in advertising.............................................................................................................. xxxi Chapter xxxiii Chapter 2.1.0
Real-Time Bio Sensing Using Micro-Channel Encapsulated MEMS Resonators
TL;DR: In this paper, a label-free bio-molecular detection technique based on real-time monitoring of the resonant frequency of micromechanical thermal-piezoresistive rotational mode disk resonators encapsulated in microfluidic channels is presented.
Proceedings ArticleDOI
High-frequency piezoelectric-on-Si MEMS resonator and numerical method for parameter extraction
TL;DR: In this paper, the design and characterization of a piezoelectrically-transduced (AlN) on silicon micro-mechanical resonator operating in its lateral bulk acoustic width-extensional mode at 28.73 MHz is presented.
References
More filters
Book
Fundamentals of microfabrication
TL;DR: The second edition of the Fundamentals of Microfabrication as discussed by the authors provides an in-depth coverage of the science of miniaturization, its methods, and materials, from the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering.
Journal ArticleDOI
Thin Film Piezoelectrics for MEMS
TL;DR: In this article, the authors reviewed the literature in this field, with an emphasis on the factors that impact the magnitude of the available piezoelectric response for non-ferroelectric materials such as ZnO and AlN.
Journal ArticleDOI
MEMS technology for timing and frequency control
TL;DR: As vibrating RF MEMS devices are perceived more as circuit building blocks than as stand-alone devices, and as the frequency processing circuits they enable become larger and more complex, the makings of an integrated micromechanical circuit technology begin to take shape, perhaps with a functional breadth not unlike that of integrated transistor circuits.
Journal ArticleDOI
Nonlinear limits for single-crystal silicon microresonators
TL;DR: In this article, the authors analyzed the nonlinear effects of single-crystal silicon micro-resonators with the focus on mechanical nonlinearities and showed that the higher energy density attainable with the silicon resonators can partially compensate for the small microresonator size.
Journal ArticleDOI
Thin film resonator technology
TL;DR: In this article, the development of the thin-film resonator technology and the core elements that give rise to resonators and filters for today's high performance wireless applications are surveyed.