Journal ArticleDOI
Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators
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TLDR
In this article, the design, fabrication, and characterization of piezoelectrically-transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk acoustic modes to address the need for high-Q microelectronic-integrable frequency-selective components is presented.Abstract:
This paper reports on the design, fabrication, and characterization of piezoelectrically-transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk acoustic modes to address the need for high-Q microelectronic-integrable frequency-selective components. A simple electromechanical model for optimizing performance is presented. For verification, resonators were fabricated on 5-mum-thick silicon-on- insulator substrates and use a 0.3-mum zinc oxide film for transduction. A bulk acoustic mode was observed from a 240 mum times 40 mum resonator with a 600-Omega impedance (Q=3400 at P=1 atm) at 90 MHz. A linear resonator absorbed power of -0.5 dBm and an output current of 1.3 mA rms were measured. The same device also exhibited a Q of 12 000 in its fundamental extensional mode at a pressure of 5 torr.read more
Citations
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Journal ArticleDOI
Study of the Performance Enhancement of Sc-Doped AlN Super High Frequency Cross-Sectional Lamé Mode Resonators
Meruyert Assylbekova,Michele Pirro,Xuanyi Zhao,Giuseppe Michetti,Pietro Simeoni,Matteo Rinaldi +5 more
TL;DR: In this paper , the authors explored the use of substitutional doping of Al in AlN with Sc to enhance the kt2 values of SHF CLMRs, and showed that the measured kt 2·Qm product of Al72Sc28N CLMR was four times greater than that of AlNCLMRs operating at the same frequency.
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A Two-Square Shaped Phononic Crystal Strip for Anchor Quality Factor Enhancement in a Length Extensional Mode TPoS Resonator
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A Wide-Dynamic Range (-40 °C to 180 °C) Active Wireless MEMS Temperature Sensor With 7m °C Sensitivity
TL;DR: In this paper , the authors demonstrate a temperature sensor with the largest reported dynamic range (40 °C to 180 °C) among active MEMS temperature sensors using an innovative frequency shift keying (FSK) 900-MHz direct upconversion transmitter.
Journal ArticleDOI
A Two-Square Shaped Phononic Crystal Strip for Anchor Quality Factor Enhancement in a Length Extensional Mode TPoS Resonator
Piezoelectric-on-silicon latera bination of etched-slots and conv
TL;DR: In this paper, the quality factor of thin film piezoelec (TPoS) MEMS resonators through engineeri modes was improved by considering the effec slots and convex curving of the resonator ed anchor loss.
References
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Book
Fundamentals of microfabrication
TL;DR: The second edition of the Fundamentals of Microfabrication as discussed by the authors provides an in-depth coverage of the science of miniaturization, its methods, and materials, from the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering.
Journal ArticleDOI
Thin Film Piezoelectrics for MEMS
TL;DR: In this article, the authors reviewed the literature in this field, with an emphasis on the factors that impact the magnitude of the available piezoelectric response for non-ferroelectric materials such as ZnO and AlN.
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MEMS technology for timing and frequency control
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Nonlinear limits for single-crystal silicon microresonators
TL;DR: In this article, the authors analyzed the nonlinear effects of single-crystal silicon micro-resonators with the focus on mechanical nonlinearities and showed that the higher energy density attainable with the silicon resonators can partially compensate for the small microresonator size.
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Thin film resonator technology
TL;DR: In this article, the development of the thin-film resonator technology and the core elements that give rise to resonators and filters for today's high performance wireless applications are surveyed.