Journal ArticleDOI
Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators
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TLDR
In this article, the design, fabrication, and characterization of piezoelectrically-transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk acoustic modes to address the need for high-Q microelectronic-integrable frequency-selective components is presented.Abstract:
This paper reports on the design, fabrication, and characterization of piezoelectrically-transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk acoustic modes to address the need for high-Q microelectronic-integrable frequency-selective components. A simple electromechanical model for optimizing performance is presented. For verification, resonators were fabricated on 5-mum-thick silicon-on- insulator substrates and use a 0.3-mum zinc oxide film for transduction. A bulk acoustic mode was observed from a 240 mum times 40 mum resonator with a 600-Omega impedance (Q=3400 at P=1 atm) at 90 MHz. A linear resonator absorbed power of -0.5 dBm and an output current of 1.3 mA rms were measured. The same device also exhibited a Q of 12 000 in its fundamental extensional mode at a pressure of 5 torr.read more
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Proceedings ArticleDOI
MEMS-based and switched-capacitor approaches for miniature power supply applications
Sarah S. Bedair,Christopher D. Meyer,Nathan Lazarus,Christopher Dougherty,Jeffrey S. Pulskamp,Brian Morgan,Ronald G. Polcawich,Xue Lin,Rizwan Bashirullah,Iain Kierzewski,Joel Martin,Brian Power +11 more
TL;DR: In this paper, the authors present work towards creating mm-scale power converters using high-frequency CMOS as well as MEMS and micro-machined passives.
Journal ArticleDOI
Piezoelectric in-plane microplate resonators based on contour and flexure-actuated modes
Tomas Manzaneque,Víctor Ruiz-Díez,J. Hernando-García,Abdallah Ababneh,A. N. Al-Omari,M. Kucera,Achim Bittner,Ulrich Schmid,Hans-Peter Seidel,José Luis Sánchez-Rojas +9 more
TL;DR: In this paper, the authors present piezoelectric in-plane microresonators designed by two different approaches: contour mode-based plates, in which nearly the whole structure suffers considerable deformation; and flexure-actuated plates, where a central plate with almost no deformation is moved by low-stiffness flexures that also support it.
Book ChapterDOI
Phononic Crystal Resonators
TL;DR: In this article, the theory of phononic crystal, classification of PnC according to its physical nature, and phononic crystals (PnC) phenomena in locally resonant materials with 2D, and 3D crystals structure are presented.
Proceedings ArticleDOI
Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators
TL;DR: In this paper, a parametric study on a set of single-crystal-silicon plate resonators, whose lateral dimensions are varied so that the main resonance mode occurs at a range of f = 13-30 MHz, was performed.
Journal ArticleDOI
Frequency splitting of the main mode in a microelectromechanical resonator due to coupling with an anchor resonance
TL;DR: In this article, the authors present an experimental study of the frequency scaling of the main, square-extensional mode in a piezoelectrically actuated plate resonator.
References
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Journal ArticleDOI
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