Journal ArticleDOI
Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators
Reads0
Chats0
TLDR
In this article, the design, fabrication, and characterization of piezoelectrically-transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk acoustic modes to address the need for high-Q microelectronic-integrable frequency-selective components is presented.Abstract:
This paper reports on the design, fabrication, and characterization of piezoelectrically-transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk acoustic modes to address the need for high-Q microelectronic-integrable frequency-selective components. A simple electromechanical model for optimizing performance is presented. For verification, resonators were fabricated on 5-mum-thick silicon-on- insulator substrates and use a 0.3-mum zinc oxide film for transduction. A bulk acoustic mode was observed from a 240 mum times 40 mum resonator with a 600-Omega impedance (Q=3400 at P=1 atm) at 90 MHz. A linear resonator absorbed power of -0.5 dBm and an output current of 1.3 mA rms were measured. The same device also exhibited a Q of 12 000 in its fundamental extensional mode at a pressure of 5 torr.read more
Citations
More filters
Proceedings ArticleDOI
Gallium nitride-on-silicon micromechanical overtone resonators and filters
TL;DR: In this article, a GaN-on-silicon resonator is reported which exhibits a quality factor of 1850 at 802.5 MHz, resulting in an f×Q value twice the highest reported for GaNbased resonators to date.
Journal ArticleDOI
Micro‐ and nano‐electromechanical resonators based on SiC and group III‐nitrides for sensor applications
K. Brueckner,F. Niebelschuetz,Katja Tonisch,Ch. Foerster,Volker Cimalla,Ralf Stephan,Jörg Pezoldt,Thomas Stauden,Oliver Ambacher,Matthias Hein +9 more
TL;DR: In this article, the authors report on resonant MEMS and NEMS devices with functional layers of SiC, AlN and AlGaN/GaN heterostructures on different substrates, which have been investigated and analyzed in the course of an interdisciplinary research focus program of the German Research Foundation (DFG).
Journal ArticleDOI
Thin-Film Piezoelectric-on-Silicon Resonant Transformers
Sarah S. Bedair,Jeffrey S. Pulskamp,Ronald G. Polcawich,Brian Morgan,Joel L. Martin,Brian Power +5 more
TL;DR: In this paper, the performance of lead-zirconate-titanate (PZT)-on-silicon electromechanical resonators as thin-film piezoelectric transformers is reported.
Journal ArticleDOI
VHF-band biconvex AlN-on-silicon micromechanical resonators with enhanced quality factor and suppressed spurious modes
Cheng Tu,Joshua E.-Y. Lee +1 more
TL;DR: In this paper, a biconvex-edge design is proposed to confine the acoustic energy to the center of the resonators, thus reducing out-of-plane bending on the supporting tethers that contribute to acoustic energy leakage.
Journal ArticleDOI
Planar ring-shaped phononic crystal anchoring boundaries for enhancing the quality factor of Lamb mode resonators
TL;DR: In this paper, planar ring-shaped phononic crystals (PnCs) are used as anchor boundaries of very high-frequency band piezoelectric-on-silicon Lamb mode resonators for the purpose of enhancing their quality factor.
References
More filters
Book
Fundamentals of microfabrication
TL;DR: The second edition of the Fundamentals of Microfabrication as discussed by the authors provides an in-depth coverage of the science of miniaturization, its methods, and materials, from the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering.
Journal ArticleDOI
Thin Film Piezoelectrics for MEMS
TL;DR: In this article, the authors reviewed the literature in this field, with an emphasis on the factors that impact the magnitude of the available piezoelectric response for non-ferroelectric materials such as ZnO and AlN.
Journal ArticleDOI
MEMS technology for timing and frequency control
TL;DR: As vibrating RF MEMS devices are perceived more as circuit building blocks than as stand-alone devices, and as the frequency processing circuits they enable become larger and more complex, the makings of an integrated micromechanical circuit technology begin to take shape, perhaps with a functional breadth not unlike that of integrated transistor circuits.
Journal ArticleDOI
Nonlinear limits for single-crystal silicon microresonators
TL;DR: In this article, the authors analyzed the nonlinear effects of single-crystal silicon micro-resonators with the focus on mechanical nonlinearities and showed that the higher energy density attainable with the silicon resonators can partially compensate for the small microresonator size.
Journal ArticleDOI
Thin film resonator technology
TL;DR: In this article, the development of the thin-film resonator technology and the core elements that give rise to resonators and filters for today's high performance wireless applications are surveyed.