Journal ArticleDOI
Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators
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TLDR
In this article, the design, fabrication, and characterization of piezoelectrically-transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk acoustic modes to address the need for high-Q microelectronic-integrable frequency-selective components is presented.Abstract:
This paper reports on the design, fabrication, and characterization of piezoelectrically-transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk acoustic modes to address the need for high-Q microelectronic-integrable frequency-selective components. A simple electromechanical model for optimizing performance is presented. For verification, resonators were fabricated on 5-mum-thick silicon-on- insulator substrates and use a 0.3-mum zinc oxide film for transduction. A bulk acoustic mode was observed from a 240 mum times 40 mum resonator with a 600-Omega impedance (Q=3400 at P=1 atm) at 90 MHz. A linear resonator absorbed power of -0.5 dBm and an output current of 1.3 mA rms were measured. The same device also exhibited a Q of 12 000 in its fundamental extensional mode at a pressure of 5 torr.read more
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Proceedings ArticleDOI
Air Damping Effects on Different Modes of AlN-on-Si Microelectromechanical Resonators
TL;DR: In this article , the first measurements and analyses of air damping effects on both bulk and flexural resonance modes of AlN-on-Si (AlN/Si) bulk acoustic resonators (BARs) are presented for the resonant frequency (f) and quality (Q) with p varying from 760Torr down to 100μTorr.
Chined lead zirconate titana sonator with 50ω terminatio
TL;DR: In this article, a PZT-on-2-μm-silicon 15 M 22 dB return loss and maximum unload QUL,max, of ~540 in air resulted for this r performances with a QUL max of demonstrated with a fabricated device.
References
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TL;DR: The second edition of the Fundamentals of Microfabrication as discussed by the authors provides an in-depth coverage of the science of miniaturization, its methods, and materials, from the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering.
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