Journal ArticleDOI
Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators
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TLDR
In this article, the design, fabrication, and characterization of piezoelectrically-transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk acoustic modes to address the need for high-Q microelectronic-integrable frequency-selective components is presented.Abstract:
This paper reports on the design, fabrication, and characterization of piezoelectrically-transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk acoustic modes to address the need for high-Q microelectronic-integrable frequency-selective components. A simple electromechanical model for optimizing performance is presented. For verification, resonators were fabricated on 5-mum-thick silicon-on- insulator substrates and use a 0.3-mum zinc oxide film for transduction. A bulk acoustic mode was observed from a 240 mum times 40 mum resonator with a 600-Omega impedance (Q=3400 at P=1 atm) at 90 MHz. A linear resonator absorbed power of -0.5 dBm and an output current of 1.3 mA rms were measured. The same device also exhibited a Q of 12 000 in its fundamental extensional mode at a pressure of 5 torr.read more
Citations
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Journal ArticleDOI
High-Overtone Thin Film Ferroelectric AlScN-on-Silicon Composite Resonators
TL;DR: In this paper, a thin-film ferroelectric Aluminum Scandium Nitride (AlScN)-on-silicon composite resonators are presented, targeting high-overtone resonance modes in the sub-6GHz band with a high figure of merit (FoM).
Journal ArticleDOI
Enhancing quality factor by etch holes in piezoelectric-on-silicon lateral mode resonators
Cheng Tu,Joshua E.-Y. Lee +1 more
TL;DR: In this paper, a unique method of using etch-holes to greatly improve the unloaded quality factor (Q u ) of VHF-band low impedance laterally vibrating AlN Thin-film Piezoelectric-on-silicon (TPoS) MEMS resonators was reported.
Journal ArticleDOI
PZT transduction of high-overtone contour- mode resonators
TL;DR: The Butterworth-van Dyke model and quantitative comparison that explore the design space of lead zirconate titanate-only and PZT on 3-, 5-, and 10-μm single-crystal silicon (SCS) high-overtone widthextensional mode (WEM) resonators with identical lateral dimensions for incorporation into radio frequency microelectromechanical systems (RF MEMS) filters and oscillators are presented.
Journal ArticleDOI
Micromechanical Resonators Based on Silicon Two-Dimensional Phononic Crystals of Square Lattice
Nan Wang,Julius Ming-Lin Tsai,Fu-Li Hsiao,Bo Woon Soon,Dim-Lee Kwong,Moorthi Palaniapan,Chengkuo Lee +6 more
TL;DR: In this article, a two-dimensional (2D) silicon slab with air holes of square lattice has been investigated, and two kinds of microfabricated PnC resonators have different optimization conditions in terms of resonant frequency and Q factor.
Journal ArticleDOI
Multi-stage phononic crystal structure for anchor-loss reduction of thin-film piezoelectric-on-silicon microelectromechanical-system resonator
Fei-Hong Bao,Lei-Lei Bao,Xinyi Li,Muhammad Ammar Khan,Hua-Ye Wu,Feng Qin,Ting Zhang,Yi Zhang,Jingfu Bao,Xiao-Sheng Zhang +9 more
TL;DR: In this paper, a multi-stage phononic crystal (PnC) structure was proposed to achieve an ultra-high quality factor (Q) in thin-film piezoelectric-on-silicon acoustic wave resonators.
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